Problem innotec SNF 2009-11-21 09:00:23: source cuts out

komadina at snf.stanford.edu komadina at snf.stanford.edu
Sat Nov 21 09:00:24 PST 2009


Both the ON and OFF lights are lit after turning source ON. No current after raising power. Power down, HV and source turned OFF. After 2-3 more attempts, source stayed ON and deposition worked normally.




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