Comment innotec SNF 2009-11-29 19:56:17: Crystal failed - changed

ajamo at snf.stanford.edu ajamo at snf.stanford.edu
Sun Nov 29 19:56:18 PST 2009


Crystal health was ok at 94% when I started.  After I pumped down and was loading the Pt parameters on the Maytex dep controller, the Maytex controller alarmed and said the crystal had failed.  I vented, changed the crystal and it was okay.  Deposition was normal.  The source clicked off once while I was ramping up the power.  I powered off & restarted & it was okay after that.  




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