Comment innotec SNF 2009-11-29 19:56:17: Crystal failed - changed

[ajamo at snf.stanford.edu]

Crystal health was ok at 94% when I started.  After I pumped down and was loading the Pt parameters on the Maytex dep controller, the Maytex controller alarmed and said the crystal had failed.  I vented, changed the crystal and it was okay.  Deposition was normal.  The source clicked off once while I was ramping up the power.  I powered off & restarted & it was okay after that.