From sqliu at snf.stanford.edu Fri Oct 2 15:27:31 2009 From: sqliu at snf.stanford.edu (sqliu at snf.stanford.edu) Date: Fri, 2 Oct 2009 15:27:31 -0700 Subject: Comment innotec SNF 2009-10-02 15:27:29: Gold target in c5 Message-ID: I was not able to remove it. From mferrier at snf.stanford.edu Sat Oct 3 20:28:09 2009 From: mferrier at snf.stanford.edu (mferrier at snf.stanford.edu) Date: Sat, 3 Oct 2009 20:28:09 -0700 Subject: Problem innotec SNF 2009-10-03 20:28:09: can not see through glass window Message-ID: apparently it got coated. Can not see eam and or target make it very difficult to do proper dep From mferrier at snf.stanford.edu Sun Oct 4 10:42:18 2009 From: mferrier at snf.stanford.edu (mferrier at snf.stanford.edu) Date: Sun, 4 Oct 2009 10:42:18 -0700 Subject: Problem innotec SNF 2009-10-04 10:42:18: window still coated Message-ID: From gth at snf.stanford.edu Sun Oct 4 21:28:28 2009 From: gth at snf.stanford.edu (gth at snf.stanford.edu) Date: Sun, 4 Oct 2009 21:28:28 -0700 Subject: Problem innotec SNF 2009-10-04 21:28:28: unable to see target during dep. Message-ID: very bad viewport. From jhaydon at snf.stanford.edu Mon Oct 5 08:51:00 2009 From: jhaydon at snf.stanford.edu (jhaydon at snf.stanford.edu) Date: Mon, 5 Oct 2009 08:51:00 -0700 Subject: Comment innotec SNF 2009-10-02 15:27:29: Gold target in c5 Message-ID: gold target has been removed From jhaydon at snf.stanford.edu Mon Oct 5 08:51:31 2009 From: jhaydon at snf.stanford.edu (jhaydon at snf.stanford.edu) Date: Mon, 5 Oct 2009 08:51:31 -0700 Subject: Problem innotec SNF 2009-10-03 20:28:09: can not see through glass window Message-ID: cleaned window and installed new film From jhaydon at snf.stanford.edu Mon Oct 5 08:51:59 2009 From: jhaydon at snf.stanford.edu (jhaydon at snf.stanford.edu) Date: Mon, 5 Oct 2009 08:51:59 -0700 Subject: Problem innotec SNF 2009-10-04 10:42:18: window still coated Message-ID: cleaned window and installed new film From jhaydon at snf.stanford.edu Mon Oct 5 08:52:32 2009 From: jhaydon at snf.stanford.edu (jhaydon at snf.stanford.edu) Date: Mon, 5 Oct 2009 08:52:32 -0700 Subject: Problem innotec SNF 2009-10-04 21:28:28: unable to see target during dep. Message-ID: cleaned window and installed new film From yiyang at snf.stanford.edu Tue Oct 6 11:20:38 2009 From: yiyang at snf.stanford.edu (yiyang at snf.stanford.edu) Date: Tue, 6 Oct 2009 11:20:38 -0700 Subject: Comment innotec SNF 2009-10-06 11:20:37: Ag and Cr sources Message-ID: Silver target looks very oxidized, and needs more pellets One Chrome Target is punched through, and the other is almost punched through, so need more Cr pellets From komadina at snf.stanford.edu Tue Oct 6 11:38:15 2009 From: komadina at snf.stanford.edu (komadina at snf.stanford.edu) Date: Tue, 6 Oct 2009 11:38:15 -0700 Subject: Problem innotec SNF 2009-10-06 11:38:14: lost hvac? Message-ID: During Si deposition, beam power suddenly dropped to zero. The HV and Source 1 power had turned off, as had the Filament. Cooled, vented...chamber was relatively clean - there was a small Si splatter, but very minor. Not sure what caused the problem. From slcheng at snf.stanford.edu Tue Oct 6 21:33:55 2009 From: slcheng at snf.stanford.edu (slcheng at snf.stanford.edu) Date: Tue, 6 Oct 2009 21:33:55 -0700 Subject: Problem innotec SNF 2009-10-06 21:33:55: high voltage unstable Message-ID: High voltage jumps between -10 to -7 during the power ramp at 2 to 4%. My target is 10%. Ion gauge shows the pressure jumps high (5 to 7 E-7) when this voltage jump happens. I need to ramp it really slow to avoid that. From helencxy at snf.stanford.edu Wed Oct 7 16:04:25 2009 From: helencxy at snf.stanford.edu (helencxy at snf.stanford.edu) Date: Wed, 7 Oct 2009 16:04:25 -0700 Subject: Problem innotec SNF 2009-10-07 16:04:24: Au target very low Message-ID: Target is dangerously low. Pallets ran out already. From gth at snf.stanford.edu Sat Oct 10 01:02:04 2009 From: gth at snf.stanford.edu (gth at snf.stanford.edu) Date: Sat, 10 Oct 2009 01:02:04 -0700 Subject: Problem innotec SNF 2009-10-10 01:02:04: last shutter in use. Message-ID: All previous shutters are dirty and flaky. From jperez at snf.stanford.edu Mon Oct 12 07:52:30 2009 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Mon, 12 Oct 2009 07:52:30 -0700 Subject: Comment innotec SNF 2009-08-26 14:17:50: pumped to 5e-7 in 17 min Message-ID: Great! From jperez at snf.stanford.edu Mon Oct 12 07:53:46 2009 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Mon, 12 Oct 2009 07:53:46 -0700 Subject: Comment innotec SNF 2009-08-27 09:23:08: Cryo replacement Message-ID: From jperez at snf.stanford.edu Mon Oct 12 07:54:36 2009 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Mon, 12 Oct 2009 07:54:36 -0700 Subject: Comment innotec SNF 2009-08-28 08:23:00: crystal failed during Ta evap Message-ID: Crystal changed. From jperez at snf.stanford.edu Mon Oct 12 07:58:07 2009 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Mon, 12 Oct 2009 07:58:07 -0700 Subject: Comment innotec SNF 2009-09-02 16:19:41: Pt source replaced Message-ID: Thanks, for the information From jperez at snf.stanford.edu Mon Oct 12 07:58:43 2009 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Mon, 12 Oct 2009 07:58:43 -0700 Subject: Comment innotec SNF 2009-09-14 11:28:26: changed shutter Message-ID: Thanks for the information! From jperez at snf.stanford.edu Tue Oct 13 10:20:52 2009 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Tue, 13 Oct 2009 10:20:52 -0700 Subject: Problem innotec SNF 2009-10-07 16:04:24: Au target very low Message-ID: Please add pellets to the Starter source when using Gold. I just filled the baggy with pellets. From jperez at snf.stanford.edu Tue Oct 13 10:22:15 2009 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Tue, 13 Oct 2009 10:22:15 -0700 Subject: Comment innotec SNF 2009-10-06 11:20:37: Ag and Cr sources Message-ID: Replaced Ag and Cr Starter sources and added pellets to the jar /bag. From jperez at snf.stanford.edu Tue Oct 13 10:22:50 2009 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Tue, 13 Oct 2009 10:22:50 -0700 Subject: Comment innotec SNF 2009-09-30 09:49:05: 30 Au pellets added to box Message-ID: Refilled baggy again. From jperez at snf.stanford.edu Tue Oct 13 10:26:03 2009 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Tue, 13 Oct 2009 10:26:03 -0700 Subject: Comment innotec SNF 2009-09-23 17:29:46: Gold target replaced Message-ID: ordering more pellets. From jperez at snf.stanford.edu Tue Oct 13 10:33:08 2009 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Tue, 13 Oct 2009 10:33:08 -0700 Subject: Comment innotec SNF 2009-09-21 16:04:41: added 50 Pd to box Message-ID: Thanks! From jperez at snf.stanford.edu Tue Oct 13 10:34:16 2009 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Tue, 13 Oct 2009 10:34:16 -0700 Subject: Comment innotec SNF 2009-09-21 20:42:36: recovered stuck pellets Message-ID: Hearth rotating. From jperez at snf.stanford.edu Tue Oct 13 10:36:39 2009 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Tue, 13 Oct 2009 10:36:39 -0700 Subject: Comment innotec SNF 2009-09-16 12:04:29: disks in short supply Message-ID: We are waiting on vendor to return clean disks and shutters. I will put a box of test wafers or dummies to get us by until items are returned from Quantum Clean. From jperez at snf.stanford.edu Tue Oct 13 10:37:03 2009 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Tue, 13 Oct 2009 10:37:03 -0700 Subject: Comment innotec SNF 2009-09-16 10:05:12: changed shutter- 2 clean remain Message-ID: Thanks/1 From jhaydon at snf.stanford.edu Wed Oct 14 16:24:15 2009 From: jhaydon at snf.stanford.edu (jhaydon at snf.stanford.edu) Date: Wed, 14 Oct 2009 16:24:15 -0700 Subject: Problem innotec SNF 2009-10-10 01:02:04: last shutter in use. Message-ID: new shutters are here From ajamo at snf.stanford.edu Wed Oct 14 22:00:19 2009 From: ajamo at snf.stanford.edu (ajamo at snf.stanford.edu) Date: Wed, 14 Oct 2009 22:00:19 -0700 Subject: Comment innotec SNF 2009-10-14 22:00:19: Source shutting off, dep rate low Message-ID: I deposited Pt. When I increased the power (what I thought was slow) the source shut off when it reached 2.5%. This happened twice. third time I increased the power really slowly and it was okay. crept up to 8.5% and opened the shutter. Rate was .5 angstroms. Last users to use Pt got 1.1 to 1.5 angstroms/sec at 7.0 & 8.5 % power. I only had to dep 50 Angstroms so I finished. Not sure if this is indicative of a problem but I thought I'd leave a comment anyways. P.S. Where is the mirror for checking the shutter? does not seem to be in the drawer From gth at snf.stanford.edu Thu Oct 15 21:28:06 2009 From: gth at snf.stanford.edu (gth at snf.stanford.edu) Date: Thu, 15 Oct 2009 21:28:06 -0700 Subject: Problem innotec SNF 2009-10-15 21:28:05: Ti target problem Message-ID: Ti target has a "tail" sticking out !, barely fitting in the slot. From gth at snf.stanford.edu Thu Oct 15 23:19:08 2009 From: gth at snf.stanford.edu (gth at snf.stanford.edu) Date: Thu, 15 Oct 2009 23:19:08 -0700 Subject: Problem innotec SNF 2009-10-15 23:19:08: crucible slots very dirty Message-ID: From jperez at snf.stanford.edu Fri Oct 16 10:25:47 2009 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Fri, 16 Oct 2009 10:25:47 -0700 Subject: Shutdown innotec SNF 2009-10-16 10:25:47: Ag that was new on 10/13/09 has blown up Message-ID: From jperez at snf.stanford.edu Fri Oct 16 10:27:17 2009 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Fri, 16 Oct 2009 10:27:17 -0700 Subject: Shutdown innotec SNF 2009-10-16 10:27:16: Chisel is missing, hearth will not rotate Message-ID: From jhaydon at snf.stanford.edu Fri Oct 16 12:37:27 2009 From: jhaydon at snf.stanford.edu (jhaydon at snf.stanford.edu) Date: Fri, 16 Oct 2009 12:37:27 -0700 Subject: Shutdown innotec SNF 2009-10-16 10:25:47: Ag that was new on 10/13/09 has blown up Message-ID: Ag pocket cleaned out From jhaydon at snf.stanford.edu Fri Oct 16 12:38:13 2009 From: jhaydon at snf.stanford.edu (jhaydon at snf.stanford.edu) Date: Fri, 16 Oct 2009 12:38:13 -0700 Subject: Shutdown innotec SNF 2009-10-16 10:27:16: Chisel is missing, hearth will not rotate Message-ID: hearth repaired From ajamo at snf.stanford.edu Sat Oct 17 00:37:53 2009 From: ajamo at snf.stanford.edu (ajamo at snf.stanford.edu) Date: Sat, 17 Oct 2009 00:37:53 -0700 Subject: Comment innotec SNF 2009-10-17 00:37:52: C5 Au buildup Message-ID: There is some Au buildup around the pocket on C5. I was not successful removing it with a screwdriver. It was a bit difficult to remove the Au target after dep. A Chisel would probably work. From gdiankov at snf.stanford.edu Sun Oct 18 18:41:02 2009 From: gdiankov at snf.stanford.edu (gdiankov at snf.stanford.edu) Date: Sun, 18 Oct 2009 18:41:02 -0700 Subject: Shutdown innotec SNF 2009-10-18 18:41:01: W target stuck, no crucible rotation Message-ID: From mtang at snf.stanford.edu Sun Oct 18 21:05:36 2009 From: mtang at snf.stanford.edu (mtang at snf.stanford.edu) Date: Sun, 18 Oct 2009 21:05:36 -0700 Subject: Shutdown innotec SNF 2009-10-18 18:41:01: W target stuck, no crucible rotation Message-ID: Eric P rescued the target and tested rotation. I'm putting it up for use -- users should be careful! From jperez at snf.stanford.edu Mon Oct 19 06:48:47 2009 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Mon, 19 Oct 2009 06:48:47 -0700 Subject: Problem innotec SNF 2009-10-15 23:19:08: crucible slots very dirty Message-ID: Jim Haydon cleaned out the crucibles on 10/ 16 /09 From mzhang2 at snf.stanford.edu Mon Oct 19 22:32:49 2009 From: mzhang2 at snf.stanford.edu (mzhang2 at snf.stanford.edu) Date: Mon, 19 Oct 2009 22:32:49 -0700 Subject: Comment innotec SNF 2009-10-19 22:32:48: Si source Message-ID: the silicon source is almost used up. When I made the deposition, the first one minute is fine, then there is a sudden decrease of the deposition rate and when I took out the source, there is a hole inside the source going through the bottom. From bilee at snf.stanford.edu Tue Oct 20 11:11:10 2009 From: bilee at snf.stanford.edu (bilee at snf.stanford.edu) Date: Tue, 20 Oct 2009 11:11:10 -0700 Subject: Problem innotec SNF 2009-10-20 11:11:10: Si source is too thin Message-ID: Need to rebuild the Si source. From jperez at snf.stanford.edu Thu Oct 22 06:44:07 2009 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Thu, 22 Oct 2009 06:44:07 -0700 Subject: Comment innotec SNF 2009-10-19 22:32:48: Si source Message-ID: It looks like the Si starter source exploded. Too much power too fast. This source requires trained users to bring up the power slowly and moving e-beam so that one area isn't cooler or hotter than another area. From jperez at snf.stanford.edu Thu Oct 22 06:44:45 2009 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Thu, 22 Oct 2009 06:44:45 -0700 Subject: Comment innotec SNF 2009-10-17 00:37:52: C5 Au buildup Message-ID: Jim Haydon cleaned up c5 pocket. From jperez at snf.stanford.edu Thu Oct 22 06:46:39 2009 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Thu, 22 Oct 2009 06:46:39 -0700 Subject: Problem innotec SNF 2009-10-20 11:11:10: Si source is too thin Message-ID: We used the Si starter source and added pieces. Needs more pieces when used again. From gth at snf.stanford.edu Sun Oct 25 13:41:36 2009 From: gth at snf.stanford.edu (gth at snf.stanford.edu) Date: Sun, 25 Oct 2009 13:41:36 -0700 Subject: Problem innotec SNF 2009-10-25 13:41:35: all shutters dirty/flaky Message-ID: From jasonlin at snf.stanford.edu Sun Oct 25 22:41:22 2009 From: jasonlin at snf.stanford.edu (jasonlin at snf.stanford.edu) Date: Sun, 25 Oct 2009 22:41:22 -0700 Subject: Problem innotec SNF 2009-10-25 22:41:22: Source 1 turned off during deposition Message-ID: Source 1 turned off during deposition. I turned off high voltage, then turned on high voltage and source 1 and was able to continue deposition. From jperez at snf.stanford.edu Mon Oct 26 15:19:54 2009 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Mon, 26 Oct 2009 15:19:54 -0700 Subject: Problem innotec SNF 2009-10-26 15:19:52: Crystal failure with new holder and crystal Message-ID: From jperez at snf.stanford.edu Mon Oct 26 15:21:03 2009 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Mon, 26 Oct 2009 15:21:03 -0700 Subject: Problem innotec SNF 2009-10-26 15:19:52: Crystal failure with new holder and crystal Message-ID: Changed Crystal holder again and crystal and changed ceramic holder. Now working. From jperez at snf.stanford.edu Mon Oct 26 15:21:42 2009 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Mon, 26 Oct 2009 15:21:42 -0700 Subject: Problem innotec SNF 2009-10-25 13:41:35: all shutters dirty/flaky Message-ID: Brought in four clean shutters. From jperez at snf.stanford.edu Mon Oct 26 15:26:38 2009 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Mon, 26 Oct 2009 15:26:38 -0700 Subject: Problem innotec SNF 2009-10-15 21:28:05: Ti target problem Message-ID: Ti starter source OK. From jperez at snf.stanford.edu Mon Oct 26 15:28:40 2009 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Mon, 26 Oct 2009 15:28:40 -0700 Subject: Problem innotec SNF 2009-10-25 22:41:22: Source 1 turned off during deposition Message-ID: Jim changed e gun, OK when I ran Ti, but shut off with Alum. Tried it again with Jim standing in front and source 1 didn't shut off once. From gdiankov at snf.stanford.edu Tue Oct 27 21:34:47 2009 From: gdiankov at snf.stanford.edu (gdiankov at snf.stanford.edu) Date: Tue, 27 Oct 2009 21:34:47 -0700 Subject: Problem innotec SNF 2009-10-27 21:34:46: Pumpdown keeps aborting Message-ID: MDC Abort message keeps appearing; can't pumpdown. From jhaydon at snf.stanford.edu Wed Oct 28 13:21:20 2009 From: jhaydon at snf.stanford.edu (jhaydon at snf.stanford.edu) Date: Wed, 28 Oct 2009 13:21:20 -0700 Subject: Problem innotec SNF 2009-10-27 21:34:46: Pumpdown keeps aborting Message-ID: From jperez at snf.stanford.edu Thu Oct 29 07:14:23 2009 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Thu, 29 Oct 2009 07:14:23 -0700 Subject: Comment innotec SNF 2009-08-31 17:33:16: New shields coated Message-ID: Thanks! From lyjiao at snf.stanford.edu Thu Oct 29 12:23:07 2009 From: lyjiao at snf.stanford.edu (lyjiao at snf.stanford.edu) Date: Thu, 29 Oct 2009 12:23:07 -0700 Subject: Problem innotec SNF 2009-10-29 12:23:06: Ag source problem Message-ID: There is a huge hole in the Ag target made by the previous user. Can not do the deposition. From jperez at snf.stanford.edu Thu Oct 29 12:58:44 2009 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Thu, 29 Oct 2009 12:58:44 -0700 Subject: Problem innotec SNF 2009-10-29 12:58:44: Unstable e-beam while depositing Aluminum Message-ID: The high voltage and amps seem stable when deposition rate was all over the place. I checked source position when vented and it siting right in the crucible. Dep rate from 0.02 to (spike) 25 Angstroms per second. From jperez at snf.stanford.edu Thu Oct 29 13:01:02 2009 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Thu, 29 Oct 2009 13:01:02 -0700 Subject: Problem innotec SNF 2009-10-06 11:38:14: lost hvac? Message-ID: Silicon was damaged, could this have been the problem? From jperez at snf.stanford.edu Thu Oct 29 14:56:27 2009 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Thu, 29 Oct 2009 14:56:27 -0700 Subject: Problem innotec SNF 2009-10-29 14:56:26: Damaged Ag (3rd one since Oct 12th) Message-ID: Out of Silver