Problem innotec SNF 2009-10-06 11:38:14: lost hvac?

komadina at snf.stanford.edu komadina at snf.stanford.edu
Tue Oct 6 11:38:15 PDT 2009


During Si deposition, beam power suddenly dropped to zero. The HV and Source 1 power had turned off, as had the Filament. Cooled, vented...chamber was relatively clean - there was a small Si splatter, but very minor. Not sure what caused the problem.




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