Problem innotec SNF 2009-10-06 21:33:55: high voltage unstable

slcheng at snf.stanford.edu slcheng at snf.stanford.edu
Tue Oct 6 21:33:55 PDT 2009


High voltage jumps between -10 to -7  during the power ramp at 2 to 4%. My target is 10%.
Ion gauge shows the pressure jumps high (5 to 7 E-7) when this voltage jump happens. I need to ramp it really slow to avoid that.




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