Comment innotec SNF 2009-10-19 22:32:48: Si source

mzhang2 at mzhang2 at
Mon Oct 19 22:32:49 PDT 2009

the silicon source is almost used up. When I made the deposition, the first one minute is fine, then there is a sudden decrease of the deposition rate and when I took out the source, there is a hole inside the source going through the bottom.

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