Comment innotec SNF 2009-10-19 22:32:48: Si source

mzhang2 at snf.stanford.edu mzhang2 at snf.stanford.edu
Mon Oct 19 22:32:49 PDT 2009


the silicon source is almost used up. When I made the deposition, the first one minute is fine, then there is a sudden decrease of the deposition rate and when I took out the source, there is a hole inside the source going through the bottom.




More information about the innotec-pcs mailing list