Problem innotec SNF 2009-10-29 12:58:44: Unstable e-beam while depositing Aluminum

[jperez at snf.stanford.edu]

The high voltage and amps seem stable when deposition rate was
all over the place. I checked source position when vented and it siting 
right in the crucible.
Dep rate from  0.02 to  (spike) 25 Angstroms per second.