Problem innotec SNF 2009-10-29 12:58:44: Unstable e-beam while depositing Aluminum

jperez at snf.stanford.edu jperez at snf.stanford.edu
Thu Oct 29 12:58:44 PDT 2009


The high voltage and amps seem stable when deposition rate was
all over the place. I checked source position when vented and it siting 
right in the crucible.
Dep rate from  0.02 to  (spike) 25 Angstroms per second.




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