Problem innotec SNF 2009-09-16 03:15:45: silicon source and crystal

komadina at komadina at
Wed Sep 16 03:15:46 PDT 2009

added pellets to the silicon source, but source sputtered and a lot of material was lost despite best attempts to heat evenly. I cleaned as best I could with the vacuum after venting.
additionally, during deposition, the crystal would sometimes read large negative deposition rates (as high as -50A/s) and then slowly come back to a normal reading.

More information about the innotec-pcs mailing list