Problem innotec SNF 2009-09-27 22:18:44: Please do not use C3

wanki at wanki at
Sun Sep 27 22:18:44 PDT 2009

  During the deposition of Pt usig C3, Pt target was broken and part of it is stuck in the C3. I did every single step of innotec as usual but Pt target was brocken. Sorry for the inconvenience.

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