From mislam at snf.stanford.edu Sun Aug 1 00:45:59 2010 From: mislam at snf.stanford.edu (mislam at snf.stanford.edu) Date: Sun, 1 Aug 2010 00:45:59 -0700 Subject: Problem innotec SNF 2010-08-01 00:45:58: won't crossover Message-ID: After 30min of pumping pressure stuck at 185 micron and therefore could not get it to crossover. Tried venting and re-pumping, same result. From dongrip at snf.stanford.edu Sun Aug 1 02:20:14 2010 From: dongrip at snf.stanford.edu (dongrip at snf.stanford.edu) Date: Sun, 1 Aug 2010 02:20:14 -0700 Subject: Problem innotec SNF 2010-08-01 02:20:14: pumping crossover Message-ID: the same problem as the previous user's. The roughing pump doesn't reach the crossover point (150 microns). Vacuum, wipe, several venting and pumping...anything didn't work. 179 microns of chamber TC was the minimum. Initial pumping speed looks normal, but pumping speed becomes extremely slow around 300 microns. From tkodama at snf.stanford.edu Sun Aug 1 08:32:50 2010 From: tkodama at snf.stanford.edu (tkodama at snf.stanford.edu) Date: Sun, 1 Aug 2010 08:32:50 -0700 Subject: Comment innotec SNF 2010-08-01 08:32:50: Message-ID: From tkodama at snf.stanford.edu Sun Aug 1 08:34:10 2010 From: tkodama at snf.stanford.edu (tkodama at snf.stanford.edu) Date: Sun, 1 Aug 2010 08:34:10 -0700 Subject: Problem innotec SNF 2010-08-01 08:34:09: pumping down error Message-ID: I experienced the same error and could not be used. From tdo at snf.stanford.edu Sun Aug 1 11:26:37 2010 From: tdo at snf.stanford.edu (tdo at snf.stanford.edu) Date: Sun, 1 Aug 2010 11:26:37 -0700 Subject: Comment innotec SNF 2010-08-01 11:26:36: crossover problem Message-ID: Roughing pump gets below 150-200mTorr slowly, but doesn't make the 150 micron set point. temporarily changed the setpoint to 250 micron so crossover occurs (with perrmission of jshott). From jperez at snf.stanford.edu Mon Aug 2 07:16:17 2010 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Mon, 2 Aug 2010 07:16:17 -0700 Subject: Comment innotec SNF 2010-08-01 08:32:50: Message-ID: No information. From jprovine at snf.stanford.edu Mon Aug 2 09:00:31 2010 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Mon, 2 Aug 2010 09:00:31 -0700 Subject: Problem innotec SNF 2010-08-02 09:00:31: cross-over pump not at 250mTorr Message-ID: cross-over from roughing pump will not even work at 250mTorr. needs attention asap. From jperez at snf.stanford.edu Mon Aug 2 12:44:43 2010 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Mon, 2 Aug 2010 12:44:43 -0700 Subject: Shutdown innotec SNF 2010-08-02 12:44:42: Not able to pump down to 150mTorr with Roughing pump Message-ID: From jhaydon at snf.stanford.edu Mon Aug 2 15:03:34 2010 From: jhaydon at snf.stanford.edu (jhaydon at snf.stanford.edu) Date: Mon, 2 Aug 2010 15:03:34 -0700 Subject: Shutdown innotec SNF 2010-08-02 12:44:42: Not able to pump down to 150mTorr with Roughing pump Message-ID: Fixed for now. Had leak in bellows to cryopump roughing line. Line has been removed and port blanked off. NO REGENS UNTIL I REPLACE BELLOWS From jhaydon at snf.stanford.edu Mon Aug 2 15:04:06 2010 From: jhaydon at snf.stanford.edu (jhaydon at snf.stanford.edu) Date: Mon, 2 Aug 2010 15:04:06 -0700 Subject: Problem innotec SNF 2010-08-02 09:00:31: cross-over pump not at 250mTorr Message-ID: see shutdown report From jhaydon at snf.stanford.edu Mon Aug 2 15:04:40 2010 From: jhaydon at snf.stanford.edu (jhaydon at snf.stanford.edu) Date: Mon, 2 Aug 2010 15:04:40 -0700 Subject: Problem innotec SNF 2010-08-01 08:34:09: pumping down error Message-ID: see shut down report From jhaydon at snf.stanford.edu Mon Aug 2 15:04:53 2010 From: jhaydon at snf.stanford.edu (jhaydon at snf.stanford.edu) Date: Mon, 2 Aug 2010 15:04:53 -0700 Subject: Problem innotec SNF 2010-08-01 02:20:14: pumping crossover Message-ID: see shut down report From jhaydon at snf.stanford.edu Mon Aug 2 15:05:08 2010 From: jhaydon at snf.stanford.edu (jhaydon at snf.stanford.edu) Date: Mon, 2 Aug 2010 15:05:08 -0700 Subject: Problem innotec SNF 2010-08-01 00:45:58: won't crossover Message-ID: see shut down report From jhaydon at snf.stanford.edu Mon Aug 2 15:05:50 2010 From: jhaydon at snf.stanford.edu (jhaydon at snf.stanford.edu) Date: Mon, 2 Aug 2010 15:05:50 -0700 Subject: Problem innotec SNF 2010-07-26 15:24:14: Hoist Unjammed Message-ID: up switch was probably stuck open From jperez at snf.stanford.edu Mon Aug 2 15:14:35 2010 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Mon, 2 Aug 2010 15:14:35 -0700 Subject: Problem innotec SNF 2010-08-02 15:14:34: Can not Regen Innotec at this time Message-ID: Jim has blocked where he believes the Innotec has a leak. He will order a bellow's part. In the meantime no Cryo regens until corrected. From jperez at snf.stanford.edu Tue Aug 3 07:13:01 2010 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Tue, 3 Aug 2010 07:13:01 -0700 Subject: Comment innotec SNF 2010-08-03 07:13:01: Do not Regen until leak is repaired Message-ID: Jim Haydon has isoleted the leak until parts are ordered and corrected. In the meantime no regens are to be done. OK to use Innotec under these conditions. From jperez at snf.stanford.edu Tue Aug 3 07:13:27 2010 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Tue, 3 Aug 2010 07:13:27 -0700 Subject: Problem innotec SNF 2010-08-02 15:14:34: Can not Regen Innotec at this time Message-ID: Changed to a comment. From mkseo at snf.stanford.edu Tue Aug 3 22:25:15 2010 From: mkseo at snf.stanford.edu (mkseo at snf.stanford.edu) Date: Tue, 3 Aug 2010 22:25:15 -0700 Subject: Problem innotec SNF 2010-08-03 22:25:14: Planetary does not rotate. Message-ID: Planetary does not rotate. From ryhuang at snf.stanford.edu Wed Aug 4 05:32:53 2010 From: ryhuang at snf.stanford.edu (ryhuang at snf.stanford.edu) Date: Wed, 4 Aug 2010 05:32:53 -0700 Subject: Comment innotec SNF 2010-08-04 05:32:52: planetary working... Message-ID: Planetary worked fine for me on all 4 runs. After last Pt deposition, lots of metal flaking from 2 dummy wafers. Replaced dummies and vacuumed thoroughly. Robert From jperez at snf.stanford.edu Thu Aug 5 11:18:27 2010 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Thu, 5 Aug 2010 11:18:27 -0700 Subject: Problem innotec SNF 2010-08-03 22:25:14: Planetary does not rotate. Message-ID: Maybe an intermitten problem with rotation, but no one else has seen this problem. From jperez at snf.stanford.edu Thu Aug 5 11:19:55 2010 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Thu, 5 Aug 2010 11:19:55 -0700 Subject: Comment innotec SNF 2010-08-04 05:32:52: planetary working... Message-ID: Thanks for the information. It also worked for me today. From ahazeghi at snf.stanford.edu Wed Aug 11 01:43:13 2010 From: ahazeghi at snf.stanford.edu (ahazeghi at snf.stanford.edu) Date: Wed, 11 Aug 2010 01:43:13 -0700 Subject: Comment innotec SNF 2010-08-11 01:43:12: Gold traget low Message-ID: used all pellets From maurice at snf.stanford.edu Wed Aug 11 10:25:26 2010 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Wed, 11 Aug 2010 10:25:26 -0700 Subject: Comment innotec SNF 2010-08-11 01:43:12: Gold traget low Message-ID: Added 6 Au pellets to the box From tdo at snf.stanford.edu Wed Aug 11 10:57:28 2010 From: tdo at snf.stanford.edu (tdo at snf.stanford.edu) Date: Wed, 11 Aug 2010 10:57:28 -0700 Subject: Problem innotec SNF 2010-08-11 10:57:27: Peeling Message-ID: Starting to peel badly From dongrip at snf.stanford.edu Wed Aug 11 23:55:06 2010 From: dongrip at snf.stanford.edu (dongrip at snf.stanford.edu) Date: Wed, 11 Aug 2010 23:55:06 -0700 Subject: Comment innotec SNF 2010-08-11 23:55:06: sharp increase in cryo pump temp Message-ID: When I increased the power as usual at the beginning, the cryo pump temp. sharply increased from 13K to 30K. Meanwhile, the chamber was overpressurized and the gun was turned off. The cryo pump temp. came back to the normal (13K) in about 5 min. I turned off the power, vented the chamber, and pumped it down again. After that, everything was good as usual. Please keep your eye on the cryo pump temp. From jperez at snf.stanford.edu Fri Aug 13 06:45:50 2010 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Fri, 13 Aug 2010 06:45:50 -0700 Subject: Comment innotec SNF 2010-08-11 23:55:06: sharp increase in cryo pump temp Message-ID: Jim Haydon believes it was the starter source that wasn't properly sitting in the crucible. From jperez at snf.stanford.edu Fri Aug 13 06:51:26 2010 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Fri, 13 Aug 2010 06:51:26 -0700 Subject: Problem innotec SNF 2010-08-11 10:57:27: Peeling Message-ID: Will always peel. It has only been six to seven weeks since last Part change. Keep vacuuming. From jperez at snf.stanford.edu Tue Aug 17 15:17:24 2010 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Tue, 17 Aug 2010 15:17:24 -0700 Subject: Problem innotec SNF 2010-08-17 15:17:24: Innotec peeling badly please vacuum before each pump down. Message-ID: System will go down for shield change on Monday, August 23,, 2010 From jasonlin at snf.stanford.edu Sun Aug 22 18:47:06 2010 From: jasonlin at snf.stanford.edu (jasonlin at snf.stanford.edu) Date: Sun, 22 Aug 2010 18:47:06 -0700 Subject: Problem innotec SNF 2010-08-22 18:47:06: Cut Back Message-ID: flashes during the deposition. The high voltage drops to 3kV ~ 7kV for fractions of a second then goes up to 10kV again. Deposition seems to be OK though. From jperez at snf.stanford.edu Mon Aug 23 07:08:39 2010 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Mon, 23 Aug 2010 07:08:39 -0700 Subject: Shutdown innotec SNF 2010-08-23 07:08:38: Down for Shield change Message-ID: From jperez at snf.stanford.edu Mon Aug 23 14:06:33 2010 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Mon, 23 Aug 2010 14:06:33 -0700 Subject: Problem innotec SNF 2010-08-22 18:47:06: Cut Back Message-ID: Replace the E gun. From jperez at snf.stanford.edu Mon Aug 23 14:07:26 2010 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Mon, 23 Aug 2010 14:07:26 -0700 Subject: Problem innotec SNF 2010-08-17 15:17:24: Innotec peeling badly please vacuum before each pump down. Message-ID: Dirty parts (peeling) have been pullede and exchanged with clean parts. From jperez at snf.stanford.edu Mon Aug 23 14:19:10 2010 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Mon, 23 Aug 2010 14:19:10 -0700 Subject: Shutdown innotec SNF 2010-08-23 07:08:38: Down for Shield change Message-ID: System has been coated and is ready for a Alum test. From jperez at snf.stanford.edu Mon Aug 23 14:25:14 2010 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Mon, 23 Aug 2010 14:25:14 -0700 Subject: Problem innotec SNF 2010-08-23 14:25:14: Will ran a test tonight Message-ID: I Will not be able to measure test wafers today. Will measure tomorrow 8/24/10 Your welcome to use Innotec, if you wish not to wait for qualifications to be complete. From jperez at snf.stanford.edu Mon Aug 23 14:37:10 2010 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Mon, 23 Aug 2010 14:37:10 -0700 Subject: Problem innotec SNF 2010-08-23 14:25:14: Will ran a test tonight Message-ID: Couldn't run a test because even though Jim replaced the E-gun: The cut back fan flashing and the e-beam is pulsing (flickering). bright and then dim. From jperez at snf.stanford.edu Mon Aug 23 14:39:30 2010 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Mon, 23 Aug 2010 14:39:30 -0700 Subject: Shutdown innotec SNF 2010-08-23 14:39:29: Still seeing ebeam pulsing and cut back fan flickering Message-ID: It doesn't matter if low power or high power, flashes. Cut back light flashes and ebeam pulses. From jperez at snf.stanford.edu Tue Aug 24 12:07:19 2010 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Tue, 24 Aug 2010 12:07:19 -0700 Subject: Shutdown innotec SNF 2010-08-23 14:39:29: Still seeing ebeam pulsing and cut back fan flickering Message-ID: Still pulsing this morning and Jim ran down in the basement and dusted off the power supply. Ran a couple of more metals (two more pump downs) and each time the arcing and cut back stopped flashiing as much. OK to use. From tdo at snf.stanford.edu Wed Aug 25 08:26:33 2010 From: tdo at snf.stanford.edu (tdo at snf.stanford.edu) Date: Wed, 25 Aug 2010 08:26:33 -0700 Subject: Problem innotec SNF 2010-08-25 08:26:32: needs au pellet refill Message-ID: From ahazeghi at snf.stanford.edu Thu Aug 26 01:07:14 2010 From: ahazeghi at snf.stanford.edu (ahazeghi at snf.stanford.edu) Date: Thu, 26 Aug 2010 01:07:14 -0700 Subject: Problem innotec SNF 2010-08-26 01:07:13: vacuum loss Message-ID: Please be advised I had a problem with the system. The main power and HV supplies where ON when I arrived. I turned the supplies off and proceeded normally to vent the chamber, after loading the wafer and pumping down, when I turned on the HV supply there was a loud hiss and chamber suddenly lost vaccuum. Cryo temp raised to 25 K, so I vented the chamber and pumped for ~ 1hr. Everything seems to be working now. From jperez at snf.stanford.edu Thu Aug 26 07:10:25 2010 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Thu, 26 Aug 2010 07:10:25 -0700 Subject: Problem innotec SNF 2010-08-25 08:26:32: needs au pellet refill Message-ID: thanks From jperez at snf.stanford.edu Fri Aug 27 06:47:51 2010 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Fri, 27 Aug 2010 06:47:51 -0700 Subject: Problem innotec SNF 2010-08-26 01:07:13: vacuum loss Message-ID: Yesterday I pumped down the system and turned on HV twice. No unusual noise or problems. Next User also didn't have a problem. From jparker at snf.stanford.edu Sat Aug 28 11:12:36 2010 From: jparker at snf.stanford.edu (jparker at snf.stanford.edu) Date: Sat, 28 Aug 2010 11:12:36 -0700 Subject: Comment innotec SNF 2010-08-28 11:12:35: Cr pellets needed Message-ID: Chromium pellets are out. There's a bit of a dish in the middle of the source, but there's enough to still deposit some, though. From elibol at snf.stanford.edu Sat Aug 28 16:44:23 2010 From: elibol at snf.stanford.edu (elibol at snf.stanford.edu) Date: Sat, 28 Aug 2010 16:44:23 -0700 Subject: Problem innotec SNF 2010-08-28 16:44:23: No Cr Pellets left - source developing a hole Message-ID: From hrleebh at snf.stanford.edu Sat Aug 28 21:19:33 2010 From: hrleebh at snf.stanford.edu (hrleebh at snf.stanford.edu) Date: Sat, 28 Aug 2010 21:19:33 -0700 Subject: Problem innotec SNF 2010-08-28 21:19:32: Au pelltes needed Message-ID: We only have one more pellet. From jperez at snf.stanford.edu Mon Aug 30 08:50:01 2010 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Mon, 30 Aug 2010 08:50:01 -0700 Subject: Problem innotec SNF 2010-08-28 21:19:32: Au pelltes needed Message-ID: Added pellets to jar. From jperez at snf.stanford.edu Mon Aug 30 08:50:35 2010 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Mon, 30 Aug 2010 08:50:35 -0700 Subject: Problem innotec SNF 2010-08-28 16:44:23: No Cr Pellets left - source developing a hole Message-ID: added pellets to jar. Two starter sources in jar. From jperez at snf.stanford.edu Mon Aug 30 08:52:04 2010 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Mon, 30 Aug 2010 08:52:04 -0700 Subject: Comment innotec SNF 2010-08-28 11:12:35: Cr pellets needed Message-ID: Two starter sources in jar. New Cr source added to jar on Thursday or Friday of last week (8/26/10).Added pellets to the jar.