Problem innotec SNF 2010-08-01 02:20:14: pumping crossover

[dongrip at snf.stanford.edu]

the same problem as the previous user's. The roughing pump doesn't reach the crossover point (150 microns). Vacuum, wipe, several venting and pumping...anything didn't work. 179 microns of chamber TC was the minimum. Initial pumping speed looks normal, but pumping speed becomes extremely slow around 300 microns.