Problem innotec SNF 2010-08-01 02:20:14: pumping crossover

dongrip at snf.stanford.edu dongrip at snf.stanford.edu
Sun Aug 1 02:20:14 PDT 2010


the same problem as the previous user's. The roughing pump doesn't reach the crossover point (150 microns). Vacuum, wipe, several venting and pumping...anything didn't work. 179 microns of chamber TC was the minimum. Initial pumping speed looks normal, but pumping speed becomes extremely slow around 300 microns. 




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