Comment innotec SNF 2010-08-04 05:32:52: planetary working...

ryhuang at snf.stanford.edu ryhuang at snf.stanford.edu
Wed Aug 4 05:32:53 PDT 2010


Planetary worked fine for me on all 4 runs.  After last Pt deposition, lots of metal flaking from 2 dummy wafers.  Replaced dummies and vacuumed thoroughly.
Robert




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