Problem innotec SNF 2010-11-24 01:30:06: Ti Target looks strange

jperez at snf.stanford.edu jperez at snf.stanford.edu
Wed Dec 1 15:20:05 PST 2010


I tried evaporating Ti , I needed higher power than normal and 
deposition was low. I put a new Ti Starter source in the jar.
Remember it will take awhile to condition the new source, before
it will deposit.




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