From jasonlin at snf.stanford.edu Tue Feb 2 01:48:42 2010 From: jasonlin at snf.stanford.edu (jasonlin at snf.stanford.edu) Date: Tue, 2 Feb 2010 01:48:42 -0800 Subject: Problem innotec SNF 2010-02-02 01:48:41: Current source cuts out during dep Message-ID: Same problem as reported by Arash, Aneesh, and Jim. From jhaydon at snf.stanford.edu Tue Feb 2 07:16:43 2010 From: jhaydon at snf.stanford.edu (jhaydon at snf.stanford.edu) Date: Tue, 2 Feb 2010 07:16:43 -0800 Subject: Shutdown innotec SNF 2010-02-02 07:16:43: testing new harth Message-ID: From jhaydon at snf.stanford.edu Tue Feb 2 16:08:08 2010 From: jhaydon at snf.stanford.edu (jhaydon at snf.stanford.edu) Date: Tue, 2 Feb 2010 16:08:08 -0800 Subject: Shutdown innotec SNF 2010-02-02 07:16:43: testing new harth Message-ID: testing finished for the day From dongrip at snf.stanford.edu Tue Feb 2 20:11:30 2010 From: dongrip at snf.stanford.edu (dongrip at snf.stanford.edu) Date: Tue, 2 Feb 2010 20:11:30 -0800 Subject: Problem innotec SNF 2010-02-02 20:11:29: current source failure again Message-ID: while increasing the power, the current source changed to "OFF" condition. Especially, when the current source meter changed from -0.01 to 0.00, it occurred. I turned off the power and restarted the process, and it finally worked. From ajamo at snf.stanford.edu Tue Feb 2 22:53:20 2010 From: ajamo at snf.stanford.edu (ajamo at snf.stanford.edu) Date: Tue, 2 Feb 2010 22:53:20 -0800 Subject: Problem innotec SNF 2010-02-02 22:53:18: No HV? Message-ID: I pumped down to 3 e-7, loaded the parameters for Sn, and then turned on the telemark. when I pushed the reset button, the vac light on the HV panel did not light, and the Hvac light on the source panel did not light. I turned it off and restarted. same thing, i noticed on the monitor that the ion guage read OFF. I vented the system and re-pumped it down and tried again. everything looked good, except when I turned on the HV, the on button came on and stayed lit, but the read-out was only .03 instead of 10.00. I tried turning the knob to adjust it up, but it didn't respond. retried 2 more times, same thing. From fanpy at snf.stanford.edu Fri Feb 5 01:43:11 2010 From: fanpy at snf.stanford.edu (fanpy at snf.stanford.edu) Date: Fri, 5 Feb 2010 01:43:11 -0800 Subject: Problem innotec SNF 2010-02-05 01:43:10: Current source Message-ID: it was normal until deposition of Al at 166A, where current drops off and there is a "puff" sound as when you vent the chamber. Vac and HVac lights on the panel went off. NUmber for ion gauge pressure is off. Voltage was 0.0X, not able to adjust it. From fanpy at snf.stanford.edu Fri Feb 5 03:38:40 2010 From: fanpy at snf.stanford.edu (fanpy at snf.stanford.edu) Date: Fri, 5 Feb 2010 03:38:40 -0800 Subject: Comment innotec SNF 2010-02-05 03:38:39: finished dep Message-ID: able to finish dep, but high voltage very unstable. had to pump several times, each time when current cut off From jperez at snf.stanford.edu Fri Feb 5 13:21:12 2010 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Fri, 5 Feb 2010 13:21:12 -0800 Subject: Comment innotec SNF 2010-02-05 13:21:11: Replaced Ni and Cu starter sources Message-ID: Remember when you use any NEW starter source it takes awhile to broke through and get a vapor going.. How long? sometimes a few minutes and sometimes 15 to 20 minutes. From tdo at snf.stanford.edu Sat Feb 6 12:53:46 2010 From: tdo at snf.stanford.edu (tdo at snf.stanford.edu) Date: Sat, 6 Feb 2010 12:53:46 -0800 Subject: Problem innotec SNF 2010-02-06 12:53:45: same "e-beam off" problem Message-ID: Twice observed that the e-beam shut off, same as previous users. I did two runs, and it shut off during approximately the same time during the gold deposition layer. Not sure if coincidence or not. But both times was running about 12-13% power midway through a 2000A deposition. From tdo at snf.stanford.edu Sat Feb 6 12:55:19 2010 From: tdo at snf.stanford.edu (tdo at snf.stanford.edu) Date: Sat, 6 Feb 2010 12:55:19 -0800 Subject: Problem innotec SNF 2010-02-06 12:55:19: clarification Message-ID: clarification on previous problem: there was no change in vacuum, and none of the interlocks triggered. it seems the current source 1 just decided to shut off (actually identical to the response if you hit OFF while the high voltage supply on) From tdo at snf.stanford.edu Sat Feb 6 13:28:28 2010 From: tdo at snf.stanford.edu (tdo at snf.stanford.edu) Date: Sat, 6 Feb 2010 13:28:28 -0800 Subject: Comment innotec SNF 2010-02-06 13:28:28: replaced crystal holder Message-ID: Accidentally broke edge of crystal holder while replacing crystal. Found older crystal holder in crystal box and replaced. Seems to work ok - reads 98% From ajamo at snf.stanford.edu Sun Feb 7 18:38:26 2010 From: ajamo at snf.stanford.edu (ajamo at snf.stanford.edu) Date: Sun, 7 Feb 2010 18:38:26 -0800 Subject: Problem innotec SNF 2010-02-07 18:38:25: no HV again Message-ID: HV would not come on. Was careful not to toggle Cryo button off while opening and closing shutter - so that is not the problem. When Telemark was powered up, all 7 buttons lit up when reset was pushed, Source came on with no problems. When HV on button was pushed, light came on but nothing in the read-out, turned knob, no response. I powered everything down, vented & had Eric P. Do the pump down and start up procedures, the same (no HV) problem happened. In the manual screen the HVac showed as INTLK -we are not sure if this is normal. I'm unloading all my stuff now. To Next user, this happened to me last week, & the following user was able to run the system with no problem. Please leave a pass-down. Thx. From jennyhu at snf.stanford.edu Sun Feb 7 19:50:31 2010 From: jennyhu at snf.stanford.edu (jennyhu at snf.stanford.edu) Date: Sun, 7 Feb 2010 19:50:31 -0800 Subject: Problem innotec SNF 2010-02-07 19:50:30: No High Voltage Message-ID: Same problem as previous user. After turning on High Voltage, it reads 0.03. Tried several times, but still didn't work. From mzhang2 at snf.stanford.edu Sun Feb 7 21:09:09 2010 From: mzhang2 at snf.stanford.edu (mzhang2 at snf.stanford.edu) Date: Sun, 7 Feb 2010 21:09:09 -0800 Subject: Shutdown innotec SNF 2010-02-07 21:09:08: kilovolts meter cannot reach 10.0 Message-ID: after pressing high voltage button ON, kilovoltz meter reads only 0.3, and I can't turned up the voltage by tuning the knob. same situation happens for two previous users who made a report on the login book From ghyrn at snf.stanford.edu Mon Feb 8 00:39:00 2010 From: ghyrn at snf.stanford.edu (ghyrn at snf.stanford.edu) Date: Mon, 8 Feb 2010 00:39:00 -0800 Subject: Comment innotec SNF 2010-02-08 00:38:59: No High Voltage Message-ID: I had no problem with it at 10am this morning. The only thing abnormal I noticed when I first started my evaporation was a missing wafer clip. I've seen this type of issue before. Typically the power-up instructions weren't followed in the right order and then you have to go backwards to get the HV to turn on (even if you reset). I will take a look in the morning when I'm in. From ajamo at snf.stanford.edu Mon Feb 8 01:04:02 2010 From: ajamo at snf.stanford.edu (ajamo at snf.stanford.edu) Date: Mon, 8 Feb 2010 01:04:02 -0800 Subject: Comment innotec SNF 2010-02-08 01:04:01: followed instructions Message-ID: Due to the problems I had last week I was very careful to follow the documented instructions. The power-up sequence was done in the proper order. From ghyrn at snf.stanford.edu Mon Feb 8 10:47:57 2010 From: ghyrn at snf.stanford.edu (ghyrn at snf.stanford.edu) Date: Mon, 8 Feb 2010 10:47:57 -0800 Subject: Comment innotec SNF 2010-02-08 10:47:57: RE: No High voltage Message-ID: Ran test run this morning, checked fine. From ghyrn at snf.stanford.edu Mon Feb 8 11:08:47 2010 From: ghyrn at snf.stanford.edu (ghyrn at snf.stanford.edu) Date: Mon, 8 Feb 2010 11:08:47 -0800 Subject: Comment innotec SNF 2010-02-08 11:08:47: Au pellets Message-ID: The bottom of the Au source looks like someone has been putting pellets underneath. From jperez at snf.stanford.edu Mon Feb 8 11:38:05 2010 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Mon, 8 Feb 2010 11:38:05 -0800 Subject: Comment innotec SNF 2010-02-08 11:08:47: Au pellets Message-ID: Some of the source appear that pellets for added to the bottom, but I hope no one is doing that. Please only add pellets to the top of the starter source. From ghyrn at snf.stanford.edu Mon Feb 8 11:38:29 2010 From: ghyrn at snf.stanford.edu (ghyrn at snf.stanford.edu) Date: Mon, 8 Feb 2010 11:38:29 -0800 Subject: Comment innotec SNF 2010-02-08 11:38:29: RE: No High Voltage Message-ID: Second test run complete. Runs normal. From jperez at snf.stanford.edu Mon Feb 8 11:39:45 2010 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Mon, 8 Feb 2010 11:39:45 -0800 Subject: Comment innotec SNF 2010-02-08 10:47:57: RE: No High voltage Message-ID: Vented and pumped down many times. Turned power on and didn't have any vacuum burst. Power supply came on each time. From jperez at snf.stanford.edu Mon Feb 8 11:40:40 2010 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Mon, 8 Feb 2010 11:40:40 -0800 Subject: Comment innotec SNF 2010-02-08 11:38:29: RE: No High Voltage Message-ID: Thanks for your effort. From jperez at snf.stanford.edu Mon Feb 8 11:46:59 2010 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Mon, 8 Feb 2010 11:46:59 -0800 Subject: Comment innotec SNF 2010-02-08 01:04:01: followed instructions Message-ID: It is operating fine. We pumped the system down several time without a problem. With so many Users seeing a problem, I believe we have a problem just not when we are running it. From jperez at snf.stanford.edu Mon Feb 8 11:48:45 2010 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Mon, 8 Feb 2010 11:48:45 -0800 Subject: Shutdown innotec SNF 2010-02-07 21:09:08: kilovolts meter cannot reach 10.0 Message-ID: We tried many times today without a problem. Had a user run it and he didn't have a problem From jperez at snf.stanford.edu Mon Feb 8 13:04:10 2010 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Mon, 8 Feb 2010 13:04:10 -0800 Subject: Problem innotec SNF 2010-02-07 18:38:25: no HV again Message-ID: We tried several time without a problem. HV came on each time. I start with selecting the metal with Maxtek. Reset is lit, press abort press reset, press start, find metal and press start, press abort, press reset press manual. Then start with the power (Telemark) TT10/15). See if this helps. From jperez at snf.stanford.edu Mon Feb 8 13:05:11 2010 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Mon, 8 Feb 2010 13:05:11 -0800 Subject: Comment innotec SNF 2010-02-08 00:38:59: No High Voltage Message-ID: Thanks for the information. From jperez at snf.stanford.edu Mon Feb 8 13:07:24 2010 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Mon, 8 Feb 2010 13:07:24 -0800 Subject: Problem innotec SNF 2010-02-07 19:50:30: No High Voltage Message-ID: If it happens again try starting at step 9; reset lit, press abort and so on. If it still doesn't work for you the next time we'll try something else. We only kow that it worked this morning several times. From jperez at snf.stanford.edu Mon Feb 8 13:08:23 2010 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Mon, 8 Feb 2010 13:08:23 -0800 Subject: Comment innotec SNF 2010-02-06 13:28:28: replaced crystal holder Message-ID: What did you do with the broken holder? From jperez at snf.stanford.edu Mon Feb 8 13:09:02 2010 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Mon, 8 Feb 2010 13:09:02 -0800 Subject: Comment innotec SNF 2010-02-05 13:21:11: Replaced Ni and Cu starter sources Message-ID: OK ! From jperez at snf.stanford.edu Mon Feb 8 13:14:03 2010 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Mon, 8 Feb 2010 13:14:03 -0800 Subject: Problem innotec SNF 2010-02-02 22:53:18: No HV? Message-ID: Please try again if it happens at step 9. If I pressed the abort button previous and without starting at step 9 I could see how the KV's may not work (Power supply). From ajamo at snf.stanford.edu Sat Feb 13 17:20:18 2010 From: ajamo at snf.stanford.edu (ajamo at snf.stanford.edu) Date: Sat, 13 Feb 2010 17:20:18 -0800 Subject: Problem innotec SNF 2010-02-13 17:20:17: Cryo @ 237K Message-ID: Went to use the Innotec but Run Time Screen had the message. "PROCESS ABORTED PUMP HIGH PRESSURE" & "MDC Abort". The Cryo temp is at 237K. On the back of the system the cryo panel reads "No Cryo Power 2" Called Ed Myers to see if anyone can come in to fix. From jhaydon at snf.stanford.edu Sat Feb 13 18:23:04 2010 From: jhaydon at snf.stanford.edu (jhaydon at snf.stanford.edu) Date: Sat, 13 Feb 2010 18:23:04 -0800 Subject: Shutdown innotec SNF 2010-02-13 18:23:04: leak through HV valve Message-ID: From jhaydon at snf.stanford.edu Mon Feb 15 22:30:25 2010 From: jhaydon at snf.stanford.edu (jhaydon at snf.stanford.edu) Date: Mon, 15 Feb 2010 22:30:25 -0800 Subject: Shutdown innotec SNF 2010-02-13 18:23:04: leak through HV valve Message-ID: was able to clean valve surface improved leak rate. Passed cryo rate of rise without a problem. From jhaydon at snf.stanford.edu Mon Feb 15 22:31:57 2010 From: jhaydon at snf.stanford.edu (jhaydon at snf.stanford.edu) Date: Mon, 15 Feb 2010 22:31:57 -0800 Subject: Comment innotec SNF 2010-02-15 22:31:56: ok to use when cry has reached operating temp around midnight Message-ID: From jperez at snf.stanford.edu Tue Feb 16 07:39:19 2010 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Tue, 16 Feb 2010 07:39:19 -0800 Subject: Problem innotec SNF 2010-02-13 17:20:17: Cryo @ 237K Message-ID: Regen Cryo on Feb 13th From jperez at snf.stanford.edu Tue Feb 16 07:40:24 2010 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Tue, 16 Feb 2010 07:40:24 -0800 Subject: Comment innotec SNF 2010-02-15 22:31:56: ok to use when cry has reached operating temp around midnight Message-ID: Regen completed. From ajamo at snf.stanford.edu Wed Feb 17 22:22:21 2010 From: ajamo at snf.stanford.edu (ajamo at snf.stanford.edu) Date: Wed, 17 Feb 2010 22:22:21 -0800 Subject: Problem innotec SNF 2010-02-17 22:22:21: No HV Message-ID: I did two runs of thin Au (100A & 400A) I loaded up a third run and when I went to start the dep the HV would not come on. I shut off (in correct order) telemark, vented the system, re-pumped it down and tried again, still no HV. After pushing the power on (and waiting) I pushed the reset button, all 7 lights came on across the high voltage & source 1 panel. The ion guage filament was on, pressure was 3.7x10-7. I tried turning the HV down to zero and slowly turning up, but nothing registered. This problem seems to clear itself after sitting for a while. From jperez at snf.stanford.edu Fri Feb 19 07:03:00 2010 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Fri, 19 Feb 2010 07:03:00 -0800 Subject: Problem innotec SNF 2010-02-17 22:22:21: No HV Message-ID: High Voltage is working. No fix, just started working. From jperez at snf.stanford.edu Fri Feb 19 09:32:23 2010 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Fri, 19 Feb 2010 09:32:23 -0800 Subject: Comment innotec SNF 2010-02-05 03:38:39: finished dep Message-ID: Replaced Emitter, saw some excess metals bridging in different areas. Will help with some of the HV problems. From jperez at snf.stanford.edu Fri Feb 19 09:36:19 2010 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Fri, 19 Feb 2010 09:36:19 -0800 Subject: Problem innotec SNF 2009-12-09 00:14:15: current source failure Message-ID: I have not seen this problem after several useage. I ran in Jan and Feb 2010. 0 From jperez at snf.stanford.edu Fri Feb 19 09:38:31 2010 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Fri, 19 Feb 2010 09:38:31 -0800 Subject: Problem innotec SNF 2010-01-14 19:05:01: current source failure Message-ID: After running Innotec in Jan and Feb 2010, I haven't seen this problem. Jim replaced the emitter today and should see less of the HV problems. From jperez at snf.stanford.edu Fri Feb 19 09:39:58 2010 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Fri, 19 Feb 2010 09:39:58 -0800 Subject: Problem innotec SNF 2010-02-02 01:48:41: Current source cuts out during dep Message-ID: Replaced the Emitter today and should help with this source cutting out. From jperez at snf.stanford.edu Fri Feb 19 09:40:56 2010 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Fri, 19 Feb 2010 09:40:56 -0800 Subject: Problem innotec SNF 2010-01-15 17:12:27: Current source drips out Message-ID: Replaced the Emitter and should help with the source dropping off. From jperez at snf.stanford.edu Fri Feb 19 09:41:12 2010 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Fri, 19 Feb 2010 09:41:12 -0800 Subject: Problem innotec SNF 2010-02-02 20:11:29: current source failure again Message-ID: Replaced Emitter, saw some excess metals bridging in different areas. Will help with some of the HV problems. From jperez at snf.stanford.edu Fri Feb 19 09:41:27 2010 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Fri, 19 Feb 2010 09:41:27 -0800 Subject: Problem innotec SNF 2010-02-05 01:43:10: Current source Message-ID: Replaced Emitter, saw some excess metals bridging in different areas. Will help with some of the HV problems. From jperez at snf.stanford.edu Fri Feb 19 09:43:25 2010 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Fri, 19 Feb 2010 09:43:25 -0800 Subject: Problem innotec SNF 2010-02-06 12:53:45: same "e-beam off" problem Message-ID: Emitter replaced today, should take care of the e-beam dropping off Replaced Emitter, saw some excess metals bridging in different areas. Will help with some of the HV problems. From jperez at snf.stanford.edu Fri Feb 19 09:43:34 2010 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Fri, 19 Feb 2010 09:43:34 -0800 Subject: Problem innotec SNF 2010-02-06 12:55:19: clarification Message-ID: Replaced Emitter, saw some excess metals bridging in different areas. Will help with some of the HV problems. From yiwu at snf.stanford.edu Fri Feb 19 16:47:15 2010 From: yiwu at snf.stanford.edu (yiwu at snf.stanford.edu) Date: Fri, 19 Feb 2010 16:47:15 -0800 Subject: Comment innotec SNF 2010-02-19 16:47:14: DC kilovolts unstable for a while Message-ID: On 'high voltage' panel in telemark, the 'DC kilovolts' display was unstable time to time for a while, rest was ok. Deposition was done successfully. From sqliu at snf.stanford.edu Sat Feb 20 08:01:45 2010 From: sqliu at snf.stanford.edu (sqliu at snf.stanford.edu) Date: Sat, 20 Feb 2010 08:01:45 -0800 Subject: Comment innotec SNF 2010-02-20 08:01:44: Ag source dirty Message-ID: reddish, multi-colored surface