Problem innotec SNF 2010-02-05 01:43:10: Current source

fanpy at snf.stanford.edu fanpy at snf.stanford.edu
Fri Feb 5 01:43:11 PST 2010


it was normal until deposition of Al at 166A, where current drops off and there is a "puff" sound as when you vent the chamber. Vac and HVac lights on the panel went off. NUmber for ion gauge pressure is off. Voltage was 0.0X, not able to adjust it.  




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