Shutdown innotec SNF 2010-07-12 13:21:24:

mzhang2 at mzhang2 at
Mon Jul 12 13:21:26 PDT 2010

before I made the deposition, Si source is clogged when I rotate the crucible  and I can't take it out.
other source in the crucible:
C3: Fe; C4: Ti; 

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