From shuhu at snf.stanford.edu Mon Mar 1 00:56:55 2010 From: shuhu at snf.stanford.edu (shuhu at snf.stanford.edu) Date: Mon, 1 Mar 2010 00:56:55 -0800 Subject: Problem innotec SNF 2010-03-01 00:56:54: Wafer pieces dropped in the chamber Message-ID: Vacumm the chamber. Big piece remained under the floor plate. From jhaydon at snf.stanford.edu Mon Mar 1 15:14:49 2010 From: jhaydon at snf.stanford.edu (jhaydon at snf.stanford.edu) Date: Mon, 1 Mar 2010 15:14:49 -0800 Subject: Problem innotec SNF 2010-03-01 00:56:54: Wafer pieces dropped in the chamber Message-ID: pieces picked up. This should really be just a comment From altamash at snf.stanford.edu Wed Mar 3 18:49:57 2010 From: altamash at snf.stanford.edu (altamash at snf.stanford.edu) Date: Wed, 3 Mar 2010 18:49:57 -0800 Subject: Comment innotec SNF 2010-03-03 18:49:56: deposition shutdown Message-ID: I was depositing CR and the deposition was shutdown automatically. The cryopump temp was allevated. After turning off the telemark and maxtec, I pumped the chamber down again and re did the deposition and this time it worked fine. The pump temp is back to 12K. From jperez at snf.stanford.edu Thu Mar 4 07:35:03 2010 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Thu, 4 Mar 2010 07:35:03 -0800 Subject: Comment innotec SNF 2010-02-20 08:01:44: Ag source dirty Message-ID: I had to replace the Ag starter source due to additional metal on the bottom of the source. This could cause many problems and this should of been reported. Please check you starter sources before and after use. From jperez at snf.stanford.edu Thu Mar 4 07:37:25 2010 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Thu, 4 Mar 2010 07:37:25 -0800 Subject: Comment innotec SNF 2010-02-19 16:47:14: DC kilovolts unstable for a while Message-ID: There is a different power supply controller. I ran the power up to 26% without any unstable DC Kilovolts. From aneesh at snf.stanford.edu Fri Mar 5 02:47:13 2010 From: aneesh at snf.stanford.edu (aneesh at snf.stanford.edu) Date: Fri, 5 Mar 2010 02:47:13 -0800 Subject: Shutdown innotec SNF 2010-03-05 02:47:13: bell jar not going down Message-ID: was starting the run. bell jar is stuck in the up position and not responding to the down buttons. From jhaydon at snf.stanford.edu Fri Mar 5 09:43:08 2010 From: jhaydon at snf.stanford.edu (jhaydon at snf.stanford.edu) Date: Fri, 5 Mar 2010 09:43:08 -0800 Subject: Shutdown innotec SNF 2010-03-05 02:47:13: bell jar not going down Message-ID: switch spring broke I have fixed temporarily fixed From usha at snf.stanford.edu Sat Mar 6 11:27:42 2010 From: usha at snf.stanford.edu (usha at snf.stanford.edu) Date: Sat, 6 Mar 2010 11:27:42 -0800 Subject: Comment innotec SNF 2010-03-06 11:27:41: Ag splatter Message-ID: During Ag depiosition, Ag dep started at ~5% at ~01.%. While slowly raising the power level, got deposition of ~24A and deposition stopped at ~6%. Checked previous user power level for Ag. Was ~14-18%. So increased the power slowly and deposition started over 12% power and a rate of over 1A/sec was reached at 14% power level. Deposited 200A silver at 14.5-15.5%. when chamber was opened, found Ag splattered all over.. Cleaned to my best. During clreaning some peeling started. Removed as much as peeled metal as possible and cleaned. No issue with Ti (1st material) seen. From mtang at snf.stanford.edu Sat Mar 6 14:36:17 2010 From: mtang at snf.stanford.edu (mtang at snf.stanford.edu) Date: Sat, 6 Mar 2010 14:36:17 -0800 Subject: Problem innotec SNF 2010-03-06 14:36:16: Chamber won't open Message-ID: Aleta reports that her wafers are stuck inside because the chamber won't open (although atmosphere light is on so it appears to be vented.) Cesar will be in shortly to look at this. From ajamo at snf.stanford.edu Sat Mar 6 14:39:36 2010 From: ajamo at snf.stanford.edu (ajamo at snf.stanford.edu) Date: Sat, 6 Mar 2010 14:39:36 -0800 Subject: Comment innotec SNF 2010-03-06 14:39:35: HV & DC flicker Message-ID: as per previous user, Ag splatter in chamber. I used the chisel and was able to get more of the Ag off the edge of the of the opening for the pocket and the magnets. I did two runs of Au. First run the beam flickered a bit (saw this through the shutter) and saw the read-outs flicker between ~ 6 & 10 volts. HV and source stayed on and I finished the run. Second run the beam / HV / DC was more stable. From ajamo at snf.stanford.edu Sat Mar 6 14:44:28 2010 From: ajamo at snf.stanford.edu (ajamo at snf.stanford.edu) Date: Sat, 6 Mar 2010 14:44:28 -0800 Subject: Problem innotec SNF 2010-03-06 14:44:28: wafers stuck inside Message-ID: The chamber won't open and I have 3 wafers with shadow masks taped to the front of each, and a monitor ( 1/4 wafer taped to a carrier wafer) that are stuck inside. I'm leaving a note on the front of the system & will leave a box labeled "ajamo" please unload my wafers. Thanks! From fanpy at snf.stanford.edu Sun Mar 7 10:46:46 2010 From: fanpy at snf.stanford.edu (fanpy at snf.stanford.edu) Date: Sun, 7 Mar 2010 10:46:46 -0800 Subject: Problem innotec SNF 2010-03-07 10:46:46: The starting point on source1 Message-ID: it's 0.03 instead of -0.03. everything works as normal From jperez at snf.stanford.edu Tue Mar 9 07:07:36 2010 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Tue, 9 Mar 2010 07:07:36 -0800 Subject: Problem innotec SNF 2010-03-07 10:46:46: The starting point on source1 Message-ID: This information was sent out to the Innotec Community. Thanks From jperez at snf.stanford.edu Tue Mar 9 07:08:37 2010 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Tue, 9 Mar 2010 07:08:37 -0800 Subject: Problem innotec SNF 2010-03-06 14:44:28: wafers stuck inside Message-ID: Wafers removed, because I saw no box on the table. From jperez at snf.stanford.edu Tue Mar 9 07:11:10 2010 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Tue, 9 Mar 2010 07:11:10 -0800 Subject: Comment innotec SNF 2010-03-06 14:39:35: HV & DC flicker Message-ID: After Jim H. and I vacuumed some more and cleaned up below where the gun sits, I didn't see any flickering. Used new hearth. From jhaydon at snf.stanford.edu Tue Mar 9 08:33:34 2010 From: jhaydon at snf.stanford.edu (jhaydon at snf.stanford.edu) Date: Tue, 9 Mar 2010 08:33:34 -0800 Subject: Problem innotec SNF 2010-03-06 14:36:16: Chamber won't open Message-ID: chamber lift working From mislam at snf.stanford.edu Thu Mar 11 00:27:52 2010 From: mislam at snf.stanford.edu (mislam at snf.stanford.edu) Date: Thu, 11 Mar 2010 00:27:52 -0800 Subject: Problem innotec SNF 2010-03-11 00:27:52: load arm stuck, broke wafer Message-ID: Load arm got stuck during wafer load. It broke one wafer while trying to recover wafers. From mislam at snf.stanford.edu Thu Mar 11 00:29:46 2010 From: mislam at snf.stanford.edu (mislam at snf.stanford.edu) Date: Thu, 11 Mar 2010 00:29:46 -0800 Subject: Comment innotec SNF 2010-03-11 00:29:46: Very sorry! disregard my previous problem report Message-ID: It was meant for Gryphon. Picked for tool while reporting problem From jperez at snf.stanford.edu Thu Mar 11 07:05:39 2010 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Thu, 11 Mar 2010 07:05:39 -0800 Subject: Comment innotec SNF 2010-03-11 00:29:46: Very sorry! disregard my previous problem report Message-ID: For Gryphon From jperez at snf.stanford.edu Thu Mar 11 07:07:29 2010 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Thu, 11 Mar 2010 07:07:29 -0800 Subject: Problem innotec SNF 2010-03-11 00:27:52: load arm stuck, broke wafer Message-ID: This is for the Gryphon. From jperez at snf.stanford.edu Thu Mar 11 07:08:37 2010 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Thu, 11 Mar 2010 07:08:37 -0800 Subject: Comment innotec SNF 2010-03-06 11:27:41: Ag splatter Message-ID: Splatter vacuumed up! From jperez at snf.stanford.edu Thu Mar 11 07:09:22 2010 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Thu, 11 Mar 2010 07:09:22 -0800 Subject: Comment innotec SNF 2010-03-03 18:49:56: deposition shutdown Message-ID: OK to use. From altamash at snf.stanford.edu Sat Mar 13 10:14:45 2010 From: altamash at snf.stanford.edu (altamash at snf.stanford.edu) Date: Sat, 13 Mar 2010 10:14:45 -0800 Subject: Comment innotec SNF 2010-03-13 10:14:44: Planetary noise Message-ID: The planetary was making some noise during my growth but now its fine! From bilee at snf.stanford.edu Thu Mar 18 01:27:11 2010 From: bilee at snf.stanford.edu (bilee at snf.stanford.edu) Date: Thu, 18 Mar 2010 01:27:11 -0700 Subject: Problem innotec SNF 2010-03-18 01:27:11: WFS1 error. Water failed? Message-ID: I've got WFS1 interlock error during the deposition. It interlocked the power - cannot turn it on. From fanpy at snf.stanford.edu Thu Mar 18 02:20:38 2010 From: fanpy at snf.stanford.edu (fanpy at snf.stanford.edu) Date: Thu, 18 Mar 2010 02:20:38 -0700 Subject: Problem innotec SNF 2010-03-18 02:20:37: same problem Message-ID: same problem as previous user. when reset, the "water" does not come on. did not run any deposition From jperez at snf.stanford.edu Thu Mar 18 07:48:42 2010 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Thu, 18 Mar 2010 07:48:42 -0700 Subject: Comment innotec SNF 2010-03-13 10:14:44: Planetary noise Message-ID: Ran Innotec twice and did not here noise coming from the planetary. From jperez at snf.stanford.edu Thu Mar 18 10:11:10 2010 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Thu, 18 Mar 2010 10:11:10 -0700 Subject: Problem innotec SNF 2010-03-18 02:20:37: same problem Message-ID: Water flow has been adjusted. From jperez at snf.stanford.edu Thu Mar 18 10:11:41 2010 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Thu, 18 Mar 2010 10:11:41 -0700 Subject: Problem innotec SNF 2010-03-18 01:27:11: WFS1 error. Water failed? Message-ID: Wafer flow has been adjusted. From sroonter at snf.stanford.edu Thu Mar 18 18:22:47 2010 From: sroonter at snf.stanford.edu (sroonter at snf.stanford.edu) Date: Thu, 18 Mar 2010 18:22:47 -0700 Subject: Problem innotec SNF 2010-03-18 18:22:47: Bell jar stuck - won't lift Message-ID: The seal is decompressed, the "ATM" light is lit but the bell jar won't respond to UP buttons. Samples are still inside. From emyers at snf.stanford.edu Thu Mar 18 19:26:16 2010 From: emyers at snf.stanford.edu (emyers at snf.stanford.edu) Date: Thu, 18 Mar 2010 19:26:16 -0700 Subject: Problem innotec SNF 2010-03-18 18:22:47: Bell jar stuck - won't lift Message-ID: I was able to free up the lift and get the samples out. The up down bottons worked, but I did not fix anything. From emyers at snf.stanford.edu Thu Mar 18 19:28:06 2010 From: emyers at snf.stanford.edu (emyers at snf.stanford.edu) Date: Thu, 18 Mar 2010 19:28:06 -0700 Subject: Comment innotec SNF 2010-03-18 19:28:05: Lift acting up Message-ID: Lab members wafers were stuck when the lift did not work. I was able to free up the lift and get the buttons to work. I did not fix anything, so it could happen again. From tzhu at snf.stanford.edu Mon Mar 22 18:02:02 2010 From: tzhu at snf.stanford.edu (tzhu at snf.stanford.edu) Date: Mon, 22 Mar 2010 18:02:02 -0700 Subject: Comment innotec SNF 2010-03-22 18:02:00: small issue Message-ID: found the interlock WFS2 there, but it still works for me. From jennyhu at snf.stanford.edu Mon Mar 22 23:29:23 2010 From: jennyhu at snf.stanford.edu (jennyhu at snf.stanford.edu) Date: Mon, 22 Mar 2010 23:29:23 -0700 Subject: Problem innotec SNF 2010-03-22 23:29:23: Interlock WFS2 On Message-ID: The error "interlock WFS2" shows up. All 7 lights are on when I turn on the main power, but I cannot get the high voltage to read 10. It remains at 0.01 or 0.02. Unable to use Innotec. From jhaydon at snf.stanford.edu Tue Mar 23 08:43:13 2010 From: jhaydon at snf.stanford.edu (jhaydon at snf.stanford.edu) Date: Tue, 23 Mar 2010 08:43:13 -0700 Subject: Problem innotec SNF 2010-03-22 23:29:23: Interlock WFS2 On Message-ID: to clear WFS error you cant be in the pump down screen From jameskim at snf.stanford.edu Tue Mar 23 10:00:15 2010 From: jameskim at snf.stanford.edu (jameskim at snf.stanford.edu) Date: Tue, 23 Mar 2010 10:00:15 -0700 Subject: Problem innotec SNF 2010-03-23 10:00:15: Telemark still does not work Message-ID: Telemark still does not supply high voltage From jperez at snf.stanford.edu Tue Mar 23 13:22:40 2010 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Tue, 23 Mar 2010 13:22:40 -0700 Subject: Problem innotec SNF 2010-03-23 10:00:15: Telemark still does not work Message-ID: Replaced the Gun. From jperez at snf.stanford.edu Tue Mar 23 13:23:47 2010 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Tue, 23 Mar 2010 13:23:47 -0700 Subject: Comment innotec SNF 2010-03-22 18:02:00: small issue Message-ID: Error was cleared by Jim Haydon. From jimkruger at snf.stanford.edu Thu Mar 25 09:59:57 2010 From: jimkruger at snf.stanford.edu (jimkruger at snf.stanford.edu) Date: Thu, 25 Mar 2010 09:59:57 -0700 Subject: Problem innotec SNF 2010-03-25 09:59:56: Belljar wont lift after vent Message-ID: Ed cleared it for me but may still be intermitant From jimkruger at snf.stanford.edu Thu Mar 25 11:46:38 2010 From: jimkruger at snf.stanford.edu (jimkruger at snf.stanford.edu) Date: Thu, 25 Mar 2010 11:46:38 -0700 Subject: Problem innotec SNF 2010-03-25 11:46:37: Si stuck in C1 Message-ID: System OK for other pockets. From jperez at snf.stanford.edu Fri Mar 26 06:57:39 2010 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Fri, 26 Mar 2010 06:57:39 -0700 Subject: Problem innotec SNF 2010-03-25 09:59:56: Belljar wont lift after vent Message-ID: Will need to contact staff or Maintenance to clear problem, until next week when Jim can work on this problem. From ehe at snf.stanford.edu Fri Mar 26 11:59:30 2010 From: ehe at snf.stanford.edu (ehe at snf.stanford.edu) Date: Fri, 26 Mar 2010 11:59:30 -0700 Subject: Comment innotec SNF 2010-03-26 11:59:29: un-stuck Si source Message-ID: Was able to remove Si source and put it away after my run. From jperez at snf.stanford.edu Fri Mar 26 12:01:55 2010 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Fri, 26 Mar 2010 12:01:55 -0700 Subject: Comment innotec SNF 2010-03-26 11:59:29: un-stuck Si source Message-ID: Thanks! From jperez at snf.stanford.edu Fri Mar 26 12:03:13 2010 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Fri, 26 Mar 2010 12:03:13 -0700 Subject: Problem innotec SNF 2010-03-25 11:46:37: Si stuck in C1 Message-ID: Si starter source back in its container. From gth at snf.stanford.edu Sat Mar 27 23:51:59 2010 From: gth at snf.stanford.edu (gth at snf.stanford.edu) Date: Sat, 27 Mar 2010 23:51:59 -0700 Subject: Problem innotec SNF 2010-03-27 23:51:59: instructions pages missing ? Message-ID: From altamash at snf.stanford.edu Sun Mar 28 04:49:08 2010 From: altamash at snf.stanford.edu (altamash at snf.stanford.edu) Date: Sun, 28 Mar 2010 04:49:08 -0700 Subject: Shutdown innotec SNF 2010-03-28 04:49:08: Bell jar does not rise up Message-ID: I vented the system. After about 30 mins i tried to raise the bell jar but it does not rise. The atm light is on but the jar is stuck so the chamber is inaccessible. From altamash at snf.stanford.edu Sun Mar 28 04:51:32 2010 From: altamash at snf.stanford.edu (altamash at snf.stanford.edu) Date: Sun, 28 Mar 2010 04:51:32 -0700 Subject: Problem innotec SNF 2010-03-28 04:51:31: System inoperable: Bell jar stuck. Can not raise it Message-ID: From ehe at snf.stanford.edu Sun Mar 28 08:38:33 2010 From: ehe at snf.stanford.edu (ehe at snf.stanford.edu) Date: Sun, 28 Mar 2010 08:38:33 -0700 Subject: Problem innotec SNF 2010-03-28 08:38:33: out of Si pellets Message-ID: From cbaxter at snf.stanford.edu Sun Mar 28 14:45:16 2010 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Sun, 28 Mar 2010 14:45:16 -0700 Subject: Shutdown innotec SNF 2010-03-28 04:49:08: Bell jar does not rise up Message-ID: The belljar travel over the lower micorsiwtch over limit. Manually move belljar up and was able to lift belljar up.. From cbaxter at snf.stanford.edu Sun Mar 28 19:20:01 2010 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Sun, 28 Mar 2010 19:20:01 -0700 Subject: Problem innotec SNF 2010-03-28 04:51:31: System inoperable: Bell jar stuck. Can not raise it Message-ID: Porblem is cleared.. From jperez at snf.stanford.edu Mon Mar 29 09:02:14 2010 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Mon, 29 Mar 2010 09:02:14 -0700 Subject: Problem innotec SNF 2010-03-28 08:38:33: out of Si pellets Message-ID: Added pieces to the Si jar. From jperez at snf.stanford.edu Mon Mar 29 09:03:25 2010 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Mon, 29 Mar 2010 09:03:25 -0700 Subject: Problem innotec SNF 2010-03-27 23:51:59: instructions pages missing ? Message-ID: Replaced Innotec operational procedures. From altamash at snf.stanford.edu Wed Mar 31 16:40:56 2010 From: altamash at snf.stanford.edu (altamash at snf.stanford.edu) Date: Wed, 31 Mar 2010 16:40:56 -0700 Subject: Problem innotec SNF 2010-03-31 16:40:56: Bell jar stuck again. Elmer fixed it Message-ID: Now its working