Comment innotec SNF 2010-03-03 18:49:56: deposition shutdown

altamash at snf.stanford.edu altamash at snf.stanford.edu
Wed Mar 3 18:49:57 PST 2010


I was depositing CR and the deposition was shutdown automatically. The cryopump temp was allevated. After turning off the telemark and maxtec, I pumped the chamber down again and re did the deposition and this time it worked fine. The pump temp is back to 12K.




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