Comment innotec SNF 2010-03-03 18:49:56: deposition shutdown

altamash at altamash at
Wed Mar 3 18:49:57 PST 2010

I was depositing CR and the deposition was shutdown automatically. The cryopump temp was allevated. After turning off the telemark and maxtec, I pumped the chamber down again and re did the deposition and this time it worked fine. The pump temp is back to 12K.

More information about the innotec-pcs mailing list