Problem innotec SNF 2010-03-06 14:36:16: Chamber won't open

mtang at snf.stanford.edu mtang at snf.stanford.edu
Sat Mar 6 14:36:17 PST 2010


Aleta reports that her wafers are stuck inside because the chamber won't open (although atmosphere light is on so it appears to be vented.)  Cesar will be in shortly to look at this.




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