Problem innotec SNF 2010-03-06 14:44:28: wafers stuck inside

ajamo at snf.stanford.edu ajamo at snf.stanford.edu
Sat Mar 6 14:44:28 PST 2010


The chamber won't open and I have 3 wafers with shadow masks taped to the front of each, and a monitor ( 1/4 wafer taped to a carrier wafer) that are stuck inside.  I'm leaving a note on the front of the system & will leave a box labeled "ajamo"  please unload my wafers.  
Thanks!




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