Problem innotec SNF 2010-03-06 14:44:28: wafers stuck inside

ajamo at ajamo at
Sat Mar 6 14:44:28 PST 2010

The chamber won't open and I have 3 wafers with shadow masks taped to the front of each, and a monitor ( 1/4 wafer taped to a carrier wafer) that are stuck inside.  I'm leaving a note on the front of the system & will leave a box labeled "ajamo"  please unload my wafers.  

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