Problem innotec SNF 2010-03-18 01:27:11: WFS1 error. Water failed?

bilee at snf.stanford.edu bilee at snf.stanford.edu
Thu Mar 18 01:27:11 PDT 2010

Previous message: Comment innotec SNF 2010-03-13 10:14:44: Planetary noise
Next message: Problem innotec SNF 2010-03-18 01:27:11: WFS1 error. Water failed?
Messages sorted by: [ date ] [ thread ] [ subject ] [ author ]

I've got WFS1 interlock error during the deposition.
It interlocked the power - cannot turn it on.

Previous message: Comment innotec SNF 2010-03-13 10:14:44: Planetary noise
Next message: Problem innotec SNF 2010-03-18 01:27:11: WFS1 error. Water failed?
Messages sorted by: [ date ] [ thread ] [ subject ] [ author ]

More information about the innotec-pcs mailing list