From jperez at snf.stanford.edu Mon Nov 1 15:06:05 2010 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Mon, 1 Nov 2010 15:06:05 -0700 Subject: Problem innotec SNF 2010-10-31 01:34:32: Need Pt target Message-ID: I've taken a look at the Pt starter source and decided it's still useable. Others have already used it. When any source starts to splatter you lower the power until metal has stablized. Bring power up slowly and if it starts to splatter again, bring power down until metal is stable again, continue until desired power. From fanpy at snf.stanford.edu Tue Nov 2 01:17:28 2010 From: fanpy at snf.stanford.edu (fanpy at snf.stanford.edu) Date: Tue, 2 Nov 2010 01:17:28 -0700 Subject: Problem innotec SNF 2010-11-02 01:17:27: no Au pellets Message-ID: need Au pellets. From jperez at snf.stanford.edu Tue Nov 2 10:52:17 2010 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Tue, 2 Nov 2010 10:52:17 -0700 Subject: Problem innotec SNF 2010-11-02 01:17:27: no Au pellets Message-ID: Added Gold pellets. From fanpy at snf.stanford.edu Mon Nov 8 19:22:45 2010 From: fanpy at snf.stanford.edu (fanpy at snf.stanford.edu) Date: Mon, 8 Nov 2010 19:22:45 -0800 Subject: Comment innotec SNF 2010-11-08 19:22:44: cryopump 18K Message-ID: cryopump temp at 18K now. pump and dep process was normal. From takane at snf.stanford.edu Tue Nov 9 19:54:27 2010 From: takane at snf.stanford.edu (takane at snf.stanford.edu) Date: Tue, 9 Nov 2010 19:54:27 -0800 Subject: Problem innotec SNF 2010-11-09 19:54:27: Pt source contaminated Message-ID: Pt source looks black and has a hole. I think the pellets are not Pt. From mkseo at snf.stanford.edu Wed Nov 10 13:39:38 2010 From: mkseo at snf.stanford.edu (mkseo at snf.stanford.edu) Date: Wed, 10 Nov 2010 13:39:38 -0800 Subject: Problem innotec SNF 2010-11-10 13:39:37: a big hole in Cr target Message-ID: I found that there is a big hole in the Cr target. From jperez at snf.stanford.edu Thu Nov 11 07:19:33 2010 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Thu, 11 Nov 2010 07:19:33 -0800 Subject: Shutdown innotec SNF 2010-11-11 07:19:32: Down for regen, PM, Temperature spikes at times Message-ID: From jperez at snf.stanford.edu Thu Nov 11 13:27:07 2010 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Thu, 11 Nov 2010 13:27:07 -0800 Subject: Shutdown innotec SNF 2010-11-11 07:19:32: Down for regen, PM, Temperature spikes at times Message-ID: Regen completed From jperez at snf.stanford.edu Fri Nov 12 07:34:27 2010 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Fri, 12 Nov 2010 07:34:27 -0800 Subject: Problem innotec SNF 2010-11-10 13:39:37: a big hole in Cr target Message-ID: Cr starter source replaced. From jperez at snf.stanford.edu Fri Nov 12 07:35:09 2010 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Fri, 12 Nov 2010 07:35:09 -0800 Subject: Comment innotec SNF 2010-11-08 19:22:44: cryopump 18K Message-ID: Regen complete From mzhang2 at snf.stanford.edu Sun Nov 14 19:12:55 2010 From: mzhang2 at snf.stanford.edu (mzhang2 at snf.stanford.edu) Date: Sun, 14 Nov 2010 19:12:55 -0800 Subject: Shutdown innotec SNF 2010-11-14 19:12:53: Si source clogged, water spilled Message-ID: I was planning to use Si source, but I didn't notice that the hump in the middle of the Si source was too high unitl I tried to rotate the source stage and it got stuck. I tried to unscrew the top cover plate but got cooling water spilling out. I've cleaned up the visible part but I don't know whether it's proper to use the machine again. I just close the bell jar and leave it vented. From ajamo at snf.stanford.edu Sun Nov 14 19:45:50 2010 From: ajamo at snf.stanford.edu (ajamo at snf.stanford.edu) Date: Sun, 14 Nov 2010 19:45:50 -0800 Subject: Problem innotec SNF 2010-11-14 19:45:49: Glass Ti jar broken Message-ID: Noticed that the Glass Ti jar is broken. I left a note on it but be careful From ajamo at snf.stanford.edu Sun Nov 14 19:47:41 2010 From: ajamo at snf.stanford.edu (ajamo at snf.stanford.edu) Date: Sun, 14 Nov 2010 19:47:41 -0800 Subject: Problem innotec SNF 2010-11-14 19:47:41: Au source looks thin & dep rate lower Message-ID: The Au source looks thin, I added a pellet prior to dep but probably needs more. Dep rate lower than usual. usually use 12% and get 4-5 A/sec, today had to use 18% to get 2.5 A/sec From jperez at snf.stanford.edu Mon Nov 15 09:11:27 2010 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Mon, 15 Nov 2010 09:11:27 -0800 Subject: Problem innotec SNF 2010-11-14 19:45:49: Glass Ti jar broken Message-ID: Replaced broken jar. From jperez at snf.stanford.edu Mon Nov 15 09:33:18 2010 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Mon, 15 Nov 2010 09:33:18 -0800 Subject: Shutdown innotec SNF 2010-11-14 19:12:53: Si source clogged, water spilled Message-ID: Pump down time took 24 minutes to reach 5X10-7. OK to use. From jperez at snf.stanford.edu Mon Nov 15 09:37:15 2010 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Mon, 15 Nov 2010 09:37:15 -0800 Subject: Problem innotec SNF 2010-11-09 19:54:27: Pt source contaminated Message-ID: Replaced source that appears contaminated. Vendor replaced a small amount of Pt pellets which I started building a starter source for use. All Pt material for Innotec has been taken out of the Lab until analzied. From dasgupta at snf.stanford.edu Mon Nov 15 13:56:32 2010 From: dasgupta at snf.stanford.edu (dasgupta at snf.stanford.edu) Date: Mon, 15 Nov 2010 13:56:32 -0800 Subject: Problem innotec SNF 2010-11-15 13:56:31: Irregular planetary motion Message-ID: Planetary motion not smooth, jerky. From jperez at snf.stanford.edu Tue Nov 16 15:31:32 2010 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Tue, 16 Nov 2010 15:31:32 -0800 Subject: Problem innotec SNF 2010-11-16 15:31:31: Remote sticking, becareful until Jim can look at it. Message-ID: From jperez at snf.stanford.edu Tue Nov 16 15:33:13 2010 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Tue, 16 Nov 2010 15:33:13 -0800 Subject: Problem innotec SNF 2010-11-15 13:56:31: Irregular planetary motion Message-ID: Foil came off one of the poles which is warp and planetary hits the pole. I replaced the foil and no longer touching pole. From jperez at snf.stanford.edu Tue Nov 16 15:33:31 2010 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Tue, 16 Nov 2010 15:33:31 -0800 Subject: Problem innotec SNF 2010-11-14 19:47:41: Au source looks thin & dep rate lower Message-ID: Added more pellets. From ajamo at snf.stanford.edu Sun Nov 21 16:31:58 2010 From: ajamo at snf.stanford.edu (ajamo at snf.stanford.edu) Date: Sun, 21 Nov 2010 16:31:58 -0800 Subject: Problem innotec SNF 2010-11-21 16:31:57: power up clicker is sticking Message-ID: The remote for the power is starting to stick more. I have to click a few times to get the power to increase by .1 From ajamo at snf.stanford.edu Sun Nov 21 16:47:22 2010 From: ajamo at snf.stanford.edu (ajamo at snf.stanford.edu) Date: Sun, 21 Nov 2010 16:47:22 -0800 Subject: Comment innotec SNF 2010-11-21 16:47:20: Au target slight discolor Message-ID: We melted one of the Au pizza shaped pellets on a 2000 ang dep and there is a small ring of discoloration around the edge of where the pellet melted. Dep was normal with no peeling under target and chamber/planetary. do not have an explanation From ajamo at snf.stanford.edu Sun Nov 21 16:58:55 2010 From: ajamo at snf.stanford.edu (ajamo at snf.stanford.edu) Date: Sun, 21 Nov 2010 16:58:55 -0800 Subject: Comment innotec SNF 2010-11-21 16:58:54: Chamber peeling Message-ID: The chamber is starting to really peel. Big chunks coming off while vacuuming From jperez at snf.stanford.edu Mon Nov 22 08:27:27 2010 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Mon, 22 Nov 2010 08:27:27 -0800 Subject: Shutdown innotec SNF 2010-11-22 08:27:27: Down for Shield change Message-ID: From jhaydon at snf.stanford.edu Mon Nov 22 15:24:48 2010 From: jhaydon at snf.stanford.edu (jhaydon at snf.stanford.edu) Date: Mon, 22 Nov 2010 15:24:48 -0800 Subject: Shutdown innotec SNF 2010-11-22 08:27:27: Down for Shield change Message-ID: shields changed From jperez at snf.stanford.edu Tue Nov 23 05:41:32 2010 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Tue, 23 Nov 2010 05:41:32 -0800 Subject: Comment innotec SNF 2010-11-21 16:58:54: Chamber peeling Message-ID: Completed shield change. From jperez at snf.stanford.edu Tue Nov 23 05:42:28 2010 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Tue, 23 Nov 2010 05:42:28 -0800 Subject: Comment innotec SNF 2010-11-21 16:47:20: Au target slight discolor Message-ID: Used a wipe and discoloration came off. From jperez at snf.stanford.edu Tue Nov 23 05:46:03 2010 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Tue, 23 Nov 2010 05:46:03 -0800 Subject: Problem innotec SNF 2010-11-21 16:31:57: power up clicker is sticking Message-ID: I played with the cord attached to the Maxtek section so that it doesn't hang down. I wrapped it around the plate which has the joy stick and sweep toggle. It seem to work better. We have two remotes on order. From pradeep.nataraj at gmail.com Tue Nov 23 09:50:47 2010 From: pradeep.nataraj at gmail.com (Pradeep Nataraj) Date: Tue, 23 Nov 2010 09:50:47 -0800 Subject: Finished Early free until 12:00 Message-ID: -------------- next part -------------- An HTML attachment was scrubbed... URL: From jennyhu at snf.stanford.edu Wed Nov 24 01:30:06 2010 From: jennyhu at snf.stanford.edu (jennyhu at snf.stanford.edu) Date: Wed, 24 Nov 2010 01:30:06 -0800 Subject: Problem innotec SNF 2010-11-24 01:30:06: Ti Target looks strange Message-ID: Can you please take a look at the Ti target? It looked a little strange today because there were lots of crystalline looking areas on it. Could it be a contamination by an incorrect pellet? I've used Ti several times in the past, and it never looked like this. For my deposition, I added a few pellets, and after the deposition, the surface still looked strange, and there are also dents in it. It looks like the evaporation was not uniform. I noticed I had to use a much higher power than other users for a lower dep rate. I'm not sure if the dents were there before, because I had asked the previous user to leave Ti inside for me. I checked the other targets, and this one definitely should be Ti because of the smooth edges. None of the other targets are like that. From lyjiao at snf.stanford.edu Sat Nov 27 17:52:56 2010 From: lyjiao at snf.stanford.edu (lyjiao at snf.stanford.edu) Date: Sat, 27 Nov 2010 17:52:56 -0800 Subject: Problem innotec SNF 2010-11-27 17:52:55: pumping slower Message-ID: It took 16 min to reach the cross over pressure and 38 min to below 5*10-7. From dkozak at snf.stanford.edu Mon Nov 29 10:13:58 2010 From: dkozak at snf.stanford.edu (dkozak at snf.stanford.edu) Date: Mon, 29 Nov 2010 10:13:58 -0800 Subject: Problem innotec SNF 2010-11-29 10:13:58: Cu target exploded Message-ID: Was doing Cu deposition: target barely fit in the crucible (C4), so I think bad thermal contact Brought power up to 2%, target was glowing Opened shutter, dep. rate was 0. Brought power up slowly to 2.6% -- still dep rate was 0. Target was glowing. Then, suddenly target went black, and "crystal failure" message appeared. Cleaned up as much as possible on the inside, changed crystal. From jhaydon at snf.stanford.edu Mon Nov 29 11:10:20 2010 From: jhaydon at snf.stanford.edu (jhaydon at snf.stanford.edu) Date: Mon, 29 Nov 2010 11:10:20 -0800 Subject: Problem innotec SNF 2010-11-27 17:52:55: pumping slower Message-ID: pumping speed seems to be correct at this time From jhaydon at snf.stanford.edu Mon Nov 29 11:11:34 2010 From: jhaydon at snf.stanford.edu (jhaydon at snf.stanford.edu) Date: Mon, 29 Nov 2010 11:11:34 -0800 Subject: Problem innotec SNF 2010-11-29 10:13:58: Cu target exploded Message-ID: target has been cleand up new one being melted From maurice at snf.stanford.edu Tue Nov 30 14:22:02 2010 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Tue, 30 Nov 2010 14:22:02 -0800 Subject: Comment innotec SNF 2010-11-30 14:22:01: 4 AU pellets added to box Message-ID: 4 AU pellets added to box From jackson at snf.stanford.edu Tue Nov 30 20:59:17 2010 From: jackson at snf.stanford.edu (jackson at snf.stanford.edu) Date: Tue, 30 Nov 2010 20:59:17 -0800 Subject: Comment innotec SNF 2010-11-30 20:59:16: need nickel pellets (none in jar) Message-ID: From jackson at snf.stanford.edu Tue Nov 30 21:00:34 2010 From: jackson at snf.stanford.edu (jackson at snf.stanford.edu) Date: Tue, 30 Nov 2010 21:00:34 -0800 Subject: Comment innotec SNF 2010-11-30 21:00:34: found spatter inside chamber Message-ID: looks like someones melt exploded..all on dummy wafers and inside bell jar. (just noting this) From gojh82 at snf.stanford.edu Tue Nov 30 23:03:10 2010 From: gojh82 at snf.stanford.edu (gojh82 at snf.stanford.edu) Date: Tue, 30 Nov 2010 23:03:10 -0800 Subject: Problem innotec SNF 2010-11-30 23:03:09: No Pt source Message-ID: Cannot find Pt source.