Problem innotec SNF 2010-11-29 10:13:58: Cu target exploded

dkozak at snf.stanford.edu dkozak at snf.stanford.edu
Mon Nov 29 10:13:58 PST 2010


Was doing Cu deposition:
target barely fit in the crucible (C4), so I think bad thermal contact 
Brought power up to 2%, target was glowing
Opened shutter, dep. rate was 0.
Brought power up slowly to 2.6% -- still dep rate was 0.  Target was glowing.
Then, suddenly target went black, and "crystal failure" message appeared.  
Cleaned up as much as possible on the inside, changed crystal.




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