From ehe at snf.stanford.edu Sun Oct 3 14:01:35 2010 From: ehe at snf.stanford.edu (ehe at snf.stanford.edu) Date: Sun, 3 Oct 2010 14:01:35 -0700 Subject: Problem innotec SNF 2010-10-03 14:01:35: beam powered itself off during use Message-ID: In middle of silicon dep, beam power suddenly dropped to 0. The green vacuum light went out and the ion gauge stopped reading. Beam would not turn back on until I went back into pump only mode and then back to deposition. Rest of deposition was normal. It's dangerous for the beam to turn off by itself - this could have splattered or exploded my Si source, and was certainly not good for it. From jperez at snf.stanford.edu Mon Oct 4 09:52:19 2010 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Mon, 4 Oct 2010 09:52:19 -0700 Subject: Comment innotec SNF 2010-09-28 15:04:12: Replaced the Pt starter source Message-ID: Replace Pt, no problems have occured From altamash at snf.stanford.edu Mon Oct 4 17:02:29 2010 From: altamash at snf.stanford.edu (altamash at snf.stanford.edu) Date: Mon, 4 Oct 2010 17:02:29 -0700 Subject: Problem innotec SNF 2010-10-04 17:02:29: Cryopump at 16K Message-ID: The temp was oscillating between 15K and 16K during my dep. its now stable at 16K. From jhaydon at snf.stanford.edu Tue Oct 5 11:16:51 2010 From: jhaydon at snf.stanford.edu (jhaydon at snf.stanford.edu) Date: Tue, 5 Oct 2010 11:16:51 -0700 Subject: Problem innotec SNF 2010-10-03 14:01:35: beam powered itself off during use Message-ID: this happens some times do not have enough data yet to resolve From khu834 at snf.stanford.edu Wed Oct 6 17:50:09 2010 From: khu834 at snf.stanford.edu (khu834 at snf.stanford.edu) Date: Wed, 6 Oct 2010 17:50:09 -0700 Subject: Problem innotec SNF 2010-10-06 17:50:08: Planetary colliding/ Au target deformation Message-ID: The planetary is weakly grinding against support beams, audible collision sound. The Au target is deformed and cannot fit into the heart snugly. It can only be inserted at a slight angle which makes it difficult to get a focused e-beam on the target. From ajamo at snf.stanford.edu Wed Oct 6 22:25:35 2010 From: ajamo at snf.stanford.edu (ajamo at snf.stanford.edu) Date: Wed, 6 Oct 2010 22:25:35 -0700 Subject: Comment innotec SNF 2010-10-06 22:25:35: Au Target Message-ID: Au target looks uneven and thin. Adding 2 pellets From ajamo at snf.stanford.edu Thu Oct 7 01:36:13 2010 From: ajamo at snf.stanford.edu (ajamo at snf.stanford.edu) Date: Thu, 7 Oct 2010 01:36:13 -0700 Subject: Problem innotec SNF 2010-10-07 01:36:12: Au source stuck in C5 Message-ID: From jperez at snf.stanford.edu Thu Oct 7 11:05:12 2010 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Thu, 7 Oct 2010 11:05:12 -0700 Subject: Comment innotec SNF 2010-10-06 22:25:35: Au Target Message-ID: When starter sources deplete (too thin) the crucible side walls get coated and can make it difficult to remove starter sources like Gold. Most always add pellets. From jperez at snf.stanford.edu Thu Oct 7 11:08:16 2010 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Thu, 7 Oct 2010 11:08:16 -0700 Subject: Problem innotec SNF 2010-10-07 01:36:12: Au source stuck in C5 Message-ID: Five pellets may be too many at one time, considering the size of Au pellets. Everyone should add one Au pellet. From jperez at snf.stanford.edu Thu Oct 7 11:24:35 2010 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Thu, 7 Oct 2010 11:24:35 -0700 Subject: Problem innotec SNF 2010-10-06 17:50:08: Planetary colliding/ Au target deformation Message-ID: Instructions' have you turning on Planetary before pumping down to catch any problems with rotation. If a problem is seen or heard, lift bell jar and turn planetary so when bell jar is down the pin will be at a different position and try again. Seven users (including myself) after use of Innotec, did notice or hear any rotation problems From jperez at snf.stanford.edu Thu Oct 7 11:39:33 2010 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Thu, 7 Oct 2010 11:39:33 -0700 Subject: Problem innotec SNF 2010-10-04 17:02:29: Cryopump at 16K Message-ID: Temperature has recovered to normal (13-14K) after User finshed four depositions in one pumpdown. From faridz at snf.stanford.edu Thu Oct 7 16:45:27 2010 From: faridz at snf.stanford.edu (faridz at snf.stanford.edu) Date: Thu, 7 Oct 2010 16:45:27 -0700 Subject: Problem innotec SNF 2010-10-07 16:45:27: Pump down taking too long ! 2 hours 10/7 Message-ID: From faridz at snf.stanford.edu Thu Oct 7 16:46:58 2010 From: faridz at snf.stanford.edu (faridz at snf.stanford.edu) Date: Thu, 7 Oct 2010 16:46:58 -0700 Subject: Comment innotec SNF 2010-10-07 16:46:57: sorry i meant Metalica is taking too long to pump down ! Message-ID: From maurice at snf.stanford.edu Thu Oct 7 17:08:00 2010 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Thu, 7 Oct 2010 17:08:00 -0700 Subject: Problem innotec SNF 2010-10-07 16:45:27: Pump down taking too long ! 2 hours 10/7 Message-ID: wrong tool From maurice at snf.stanford.edu Thu Oct 7 17:08:12 2010 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Thu, 7 Oct 2010 17:08:12 -0700 Subject: Comment innotec SNF 2010-10-07 16:46:57: sorry i meant Metalica is taking too long to pump down ! Message-ID: wrong tool From svo at snf.stanford.edu Sun Oct 10 02:21:38 2010 From: svo at snf.stanford.edu (svo at snf.stanford.edu) Date: Sun, 10 Oct 2010 02:21:38 -0700 Subject: Comment innotec SNF 2010-10-10 02:21:37: vaccum issue Message-ID: had a hard time reaching 5e-7. vaccuum stayed at 1E-6 after 40mins of pumping... From jperez at snf.stanford.edu Mon Oct 11 08:13:29 2010 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Mon, 11 Oct 2010 08:13:29 -0700 Subject: Comment innotec SNF 2010-10-10 02:21:37: vaccum issue Message-ID: Samples, oils may have cause this because eight users after did not have a problem (20 -30) pump downs. From jperez at snf.stanford.edu Mon Oct 11 08:56:19 2010 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Mon, 11 Oct 2010 08:56:19 -0700 Subject: Comment innotec SNF 2010-09-26 02:23:15: cut back on high voltage supply Message-ID: I've ran the system may times and the cut back flashes doesn't seem abnormal. Seems to be doing it's job. Have been watching it for almost three weeks. From sgchong at snf.stanford.edu Mon Oct 11 18:10:47 2010 From: sgchong at snf.stanford.edu (sgchong at snf.stanford.edu) Date: Mon, 11 Oct 2010 18:10:47 -0700 Subject: Comment innotec SNF 2010-10-11 18:10:46: No more Pt pellets left Message-ID: From jperez at snf.stanford.edu Tue Oct 12 15:07:49 2010 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Tue, 12 Oct 2010 15:07:49 -0700 Subject: Shutdown innotec SNF 2010-10-12 15:07:47: Regen not completed due to a leak in the high vac Message-ID: Cause believe to be due to broken wafer pieces. Most likely not up today. From jperez at snf.stanford.edu Tue Oct 12 15:34:23 2010 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Tue, 12 Oct 2010 15:34:23 -0700 Subject: Problem innotec SNF 2010-10-12 15:34:23: When Innotec comes up, test will be ran later. Message-ID: If anyone would like to run a test with 1000A of Alum, the test wafers are on the table. Only one test wafer need to measure on Prometrix. From maurice at snf.stanford.edu Wed Oct 13 17:00:51 2010 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Wed, 13 Oct 2010 17:00:51 -0700 Subject: Shutdown innotec SNF 2010-10-12 15:07:47: Regen not completed due to a leak in the high vac Message-ID: Jim cleaned hi vac o ring system has been regen'ed Usha has done a 1000 ang Al coat on the system From maurice at snf.stanford.edu Wed Oct 13 17:01:30 2010 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Wed, 13 Oct 2010 17:01:30 -0700 Subject: Problem innotec SNF 2010-10-12 15:34:23: When Innotec comes up, test will be ran later. Message-ID: Test run. Wafer waiting on table for Jeannie From jperez at snf.stanford.edu Thu Oct 14 07:22:17 2010 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Thu, 14 Oct 2010 07:22:17 -0700 Subject: Comment innotec SNF 2010-10-11 18:10:46: No more Pt pellets left Message-ID: Replenished Pt pellets From jperez at snf.stanford.edu Thu Oct 14 07:23:00 2010 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Thu, 14 Oct 2010 07:23:00 -0700 Subject: Comment innotec SNF 2010-10-11 18:10:46: No more Pt pellets left Message-ID: replenish pellet bag. From lyjiao at snf.stanford.edu Thu Oct 14 14:06:46 2010 From: lyjiao at snf.stanford.edu (lyjiao at snf.stanford.edu) Date: Thu, 14 Oct 2010 14:06:46 -0700 Subject: Problem innotec SNF 2010-10-14 14:06:46: Pd source problem Message-ID: The backside of Pd source was used for deposition by previous user. The topside was contaminated and the source could not be fitted in the crucible. From jperez at snf.stanford.edu Fri Oct 15 15:04:14 2010 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Fri, 15 Oct 2010 15:04:14 -0700 Subject: Problem innotec SNF 2010-10-14 14:06:46: Pd source problem Message-ID: Pd starter source has a lump on the bottom, but I don't believe it was from someone putting ;up side down. I believe it was from not being fitted correctly in the crucible and got too hot. This Pd starter source has been put in the box less than a month time. I am leaving this Pd to use, so make sure you have it sitting correctly in the crucible. OK to use. From jperez at snf.stanford.edu Fri Oct 15 15:06:08 2010 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Fri, 15 Oct 2010 15:06:08 -0700 Subject: Comment innotec SNF 2010-08-03 07:13:01: Do not Regen until leak is repaired Message-ID: When Jim hayden did the shield change, he also fixed the bellows. OK to use Regen. We did and it worked. From jperez at snf.stanford.edu Fri Oct 15 15:07:57 2010 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Fri, 15 Oct 2010 15:07:57 -0700 Subject: Comment innotec SNF 2010-08-01 11:26:36: crossover problem Message-ID: The leak has been repaired, during the shield change. From jperez at snf.stanford.edu Fri Oct 15 15:08:45 2010 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Fri, 15 Oct 2010 15:08:45 -0700 Subject: Comment innotec SNF 2010-10-15 15:08:44: OK to use Pd source, make sure it fits well. Message-ID: From fanpy at snf.stanford.edu Sun Oct 31 01:34:32 2010 From: fanpy at snf.stanford.edu (fanpy at snf.stanford.edu) Date: Sun, 31 Oct 2010 01:34:32 -0700 Subject: Problem innotec SNF 2010-10-31 01:34:32: Need Pt target Message-ID: Pt target splashed during deposition (at power ~11%) Need new target.