From justinwu at snf.stanford.edu Wed Sep 1 18:39:42 2010 From: justinwu at snf.stanford.edu (justinwu at snf.stanford.edu) Date: Wed, 1 Sep 2010 18:39:42 -0700 Subject: Problem innotec SNF 2010-09-01 18:39:41: Chamber stuck Message-ID: System has been venting for +10 minutes, atm light has been on for at least 4min. The up button does not raise the chamber lid. From takane at snf.stanford.edu Thu Sep 2 08:17:54 2010 From: takane at snf.stanford.edu (takane at snf.stanford.edu) Date: Thu, 2 Sep 2010 08:17:54 -0700 Subject: Problem innotec SNF 2010-09-02 08:17:53: Only 3 Pt pellets left Message-ID: From jhaydon at snf.stanford.edu Thu Sep 2 08:35:29 2010 From: jhaydon at snf.stanford.edu (jhaydon at snf.stanford.edu) Date: Thu, 2 Sep 2010 08:35:29 -0700 Subject: Problem innotec SNF 2010-09-01 18:39:41: Chamber stuck Message-ID: chamber lift working now the up switch probably got stuck From jhaydon at snf.stanford.edu Thu Sep 2 09:45:26 2010 From: jhaydon at snf.stanford.edu (jhaydon at snf.stanford.edu) Date: Thu, 2 Sep 2010 09:45:26 -0700 Subject: Problem innotec SNF 2010-09-02 08:17:53: Only 3 Pt pellets left Message-ID: pellets have been added From tkodama at snf.stanford.edu Sat Sep 4 05:44:21 2010 From: tkodama at snf.stanford.edu (tkodama at snf.stanford.edu) Date: Sat, 4 Sep 2010 05:44:21 -0700 Subject: Problem innotec SNF 2010-09-04 05:44:21: gold target could not be removed from C5 Message-ID: I kept using the gold target after previous user, so I could not understand how to insert it into the hole. and it looked difficult to extract it from the C5. it is still there. From kyunglok at snf.stanford.edu Sat Sep 4 14:08:04 2010 From: kyunglok at snf.stanford.edu (kyunglok at snf.stanford.edu) Date: Sat, 4 Sep 2010 14:08:04 -0700 Subject: Comment innotec SNF 2010-09-04 14:08:03: Old Cr source has a hole Message-ID: Next user should use the new one in a jar. From slcheng at snf.stanford.edu Sat Sep 4 15:14:22 2010 From: slcheng at snf.stanford.edu (slcheng at snf.stanford.edu) Date: Sat, 4 Sep 2010 15:14:22 -0700 Subject: Problem innotec SNF 2010-09-04 15:14:22: bell can't be pulled up Message-ID: Cannot pull up the bell after chamber vented. From jhaydon at snf.stanford.edu Sat Sep 4 20:39:00 2010 From: jhaydon at snf.stanford.edu (jhaydon at snf.stanford.edu) Date: Sat, 4 Sep 2010 20:39:00 -0700 Subject: Problem innotec SNF 2010-09-04 15:14:22: bell can't be pulled up Message-ID: chamber was stuck because the pully had jambed. I moved the down switch up a bout 1/8 inch so the motor will shut off sooner and maybe prevent it from being over driven From jperez at snf.stanford.edu Tue Sep 7 08:19:49 2010 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Tue, 7 Sep 2010 08:19:49 -0700 Subject: Comment innotec SNF 2010-09-04 14:08:03: Old Cr source has a hole Message-ID: Their is another new Cr in the jar with the used Cr. From jperez at snf.stanford.edu Thu Sep 9 07:40:17 2010 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Thu, 9 Sep 2010 07:40:17 -0700 Subject: Problem innotec SNF 2010-09-04 05:44:21: gold target could not be removed from C5 Message-ID: It was remove by next user. From jackson at snf.stanford.edu Thu Sep 9 22:27:51 2010 From: jackson at snf.stanford.edu (jackson at snf.stanford.edu) Date: Thu, 9 Sep 2010 22:27:51 -0700 Subject: Problem innotec SNF 2010-09-09 22:27:51: Nickel pellets needed Message-ID: From jperez at snf.stanford.edu Fri Sep 10 11:32:05 2010 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Fri, 10 Sep 2010 11:32:05 -0700 Subject: Problem innotec SNF 2010-09-09 22:27:51: Nickel pellets needed Message-ID: I replaced starter source, so first Users will take awhile to condition source to be able to evaporate. Added pellets From jperez at snf.stanford.edu Fri Sep 10 11:33:09 2010 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Fri, 10 Sep 2010 11:33:09 -0700 Subject: Comment innotec SNF 2010-07-12 13:26:07: please trim si source Message-ID: Si starter source OK after many uses. Could not trim. From altamash at snf.stanford.edu Mon Sep 13 08:44:32 2010 From: altamash at snf.stanford.edu (altamash at snf.stanford.edu) Date: Mon, 13 Sep 2010 08:44:32 -0700 Subject: Comment innotec SNF 2010-09-13 08:44:32: Lot of peeling under the Crystal mount and the belljar Message-ID: From jperez at snf.stanford.edu Mon Sep 13 08:55:15 2010 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Mon, 13 Sep 2010 08:55:15 -0700 Subject: Comment innotec SNF 2010-09-13 08:44:32: Lot of peeling under the Crystal mount and the belljar Message-ID: This is where the User starts vacuuming. From kyunglok at snf.stanford.edu Mon Sep 13 15:39:03 2010 From: kyunglok at snf.stanford.edu (kyunglok at snf.stanford.edu) Date: Mon, 13 Sep 2010 15:39:03 -0700 Subject: Comment innotec SNF 2010-09-13 15:39:02: Cr source contaminated Message-ID: Cr source is contaminated by gold when I see it before using. Will try to remove Au before deposition under the shutter From kyunglok at snf.stanford.edu Mon Sep 13 17:42:46 2010 From: kyunglok at snf.stanford.edu (kyunglok at snf.stanford.edu) Date: Mon, 13 Sep 2010 17:42:46 -0700 Subject: Comment innotec SNF 2010-09-13 17:42:46: Cr source decontamination Message-ID: Couldn't remove gold perfectly. Maybe next user can try it. From jperez at snf.stanford.edu Tue Sep 14 12:54:34 2010 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Tue, 14 Sep 2010 12:54:34 -0700 Subject: Comment innotec SNF 2010-09-13 15:39:02: Cr source contaminated Message-ID: I have replaced the Cr starter source. Please remember that it will take awhile to condition the new starter sources before you'll get them to evaporate. I also changed Cu and Ag starter sources. From jperez at snf.stanford.edu Tue Sep 14 12:55:34 2010 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Tue, 14 Sep 2010 12:55:34 -0700 Subject: Comment innotec SNF 2010-09-13 17:42:46: Cr source decontamination Message-ID: I Replaced the Cr, Ag, and Cu starter sources From narii at snf.stanford.edu Wed Sep 15 20:15:34 2010 From: narii at snf.stanford.edu (narii at snf.stanford.edu) Date: Wed, 15 Sep 2010 20:15:34 -0700 Subject: Problem innotec SNF 2010-09-15 20:15:33: Chamber A bulb failed in upper inner zone Message-ID: Error occured while running cleaning recipe. After this error, unable to run any recipe From narii at snf.stanford.edu Wed Sep 15 20:16:11 2010 From: narii at snf.stanford.edu (narii at snf.stanford.edu) Date: Wed, 15 Sep 2010 20:16:11 -0700 Subject: Comment innotec SNF 2010-09-15 20:16:10: Ignore upper error report Message-ID: It has be go to Epi2. Made mistake. From khu834 at snf.stanford.edu Thu Sep 16 18:21:44 2010 From: khu834 at snf.stanford.edu (khu834 at snf.stanford.edu) Date: Thu, 16 Sep 2010 18:21:44 -0700 Subject: Problem innotec SNF 2010-09-16 18:21:43: View window film need to be replaced Message-ID: The film seemed to have ran out and it very difficult to see inside the chamber through the view port. From khu834 at snf.stanford.edu Thu Sep 16 18:25:24 2010 From: khu834 at snf.stanford.edu (khu834 at snf.stanford.edu) Date: Thu, 16 Sep 2010 18:25:24 -0700 Subject: Comment innotec SNF 2010-09-16 18:25:23: view port film Message-ID: The film advanced a little when I turned the knob quite a bit more. Not sure whether the film is running low or the knob is not quite working From jhaydon at snf.stanford.edu Fri Sep 17 09:47:10 2010 From: jhaydon at snf.stanford.edu (jhaydon at snf.stanford.edu) Date: Fri, 17 Sep 2010 09:47:10 -0700 Subject: Problem innotec SNF 2010-09-16 18:21:43: View window film need to be replaced Message-ID: film working ok now. was probably turned backwards From jhaydon at snf.stanford.edu Fri Sep 17 09:47:19 2010 From: jhaydon at snf.stanford.edu (jhaydon at snf.stanford.edu) Date: Fri, 17 Sep 2010 09:47:19 -0700 Subject: Problem innotec SNF 2010-09-15 20:15:33: Chamber A bulb failed in upper inner zone Message-ID: From jhaydon at snf.stanford.edu Fri Sep 17 09:47:24 2010 From: jhaydon at snf.stanford.edu (jhaydon at snf.stanford.edu) Date: Fri, 17 Sep 2010 09:47:24 -0700 Subject: Comment innotec SNF 2010-09-15 20:16:10: Ignore upper error report Message-ID: From kyunglok at snf.stanford.edu Sat Sep 18 05:08:49 2010 From: kyunglok at snf.stanford.edu (kyunglok at snf.stanford.edu) Date: Sat, 18 Sep 2010 05:08:49 -0700 Subject: Comment innotec SNF 2010-09-18 05:08:48: Flash light missing Message-ID: Someone took it to different place? From khu834 at snf.stanford.edu Sun Sep 19 13:25:21 2010 From: khu834 at snf.stanford.edu (khu834 at snf.stanford.edu) Date: Sun, 19 Sep 2010 13:25:21 -0700 Subject: Comment innotec SNF 2010-09-19 13:25:20: Au pellets Message-ID: Only the Au target is in the jar. Need to add Au pellets. From jperez at snf.stanford.edu Mon Sep 20 13:56:58 2010 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Mon, 20 Sep 2010 13:56:58 -0700 Subject: Comment innotec SNF 2010-09-19 13:25:20: Au pellets Message-ID: Added Au pellets From jperez at snf.stanford.edu Mon Sep 20 13:58:06 2010 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Mon, 20 Sep 2010 13:58:06 -0700 Subject: Comment innotec SNF 2010-09-16 18:25:23: view port film Message-ID: Sounds like someone turned the film knob counter clockwise. From jackson at snf.stanford.edu Tue Sep 21 00:11:15 2010 From: jackson at snf.stanford.edu (jackson at snf.stanford.edu) Date: Tue, 21 Sep 2010 00:11:15 -0700 Subject: Comment innotec SNF 2010-09-21 00:11:15: need more nickel pellets Message-ID: From altamash at snf.stanford.edu Tue Sep 21 07:35:06 2010 From: altamash at snf.stanford.edu (altamash at snf.stanford.edu) Date: Tue, 21 Sep 2010 07:35:06 -0700 Subject: Comment innotec SNF 2010-09-21 07:35:05: LED torch missing Message-ID: From jperez at snf.stanford.edu Tue Sep 21 14:51:31 2010 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Tue, 21 Sep 2010 14:51:31 -0700 Subject: Comment innotec SNF 2010-09-18 05:08:48: Flash light missing Message-ID: Replaced LED flash light From jperez at snf.stanford.edu Tue Sep 21 14:52:43 2010 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Tue, 21 Sep 2010 14:52:43 -0700 Subject: Comment innotec SNF 2010-09-21 07:35:05: LED torch missing Message-ID: Replaced flashlight. From jperez at snf.stanford.edu Tue Sep 21 14:53:12 2010 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Tue, 21 Sep 2010 14:53:12 -0700 Subject: Comment innotec SNF 2010-09-21 00:11:15: need more nickel pellets Message-ID: Added nickel pellets. From takane at snf.stanford.edu Wed Sep 22 16:42:30 2010 From: takane at snf.stanford.edu (takane at snf.stanford.edu) Date: Wed, 22 Sep 2010 16:42:30 -0700 Subject: Problem innotec SNF 2010-09-22 16:42:30: Planetary not smooth Message-ID: During deposition, noticed that the planetary is not rotating smoothly. About once every second, it apparently gets stuck (?) and slows itself down., then rotate, then slow down again. Not sure but the overall speed might be slower too. From maxms at snf.stanford.edu Thu Sep 23 00:24:47 2010 From: maxms at snf.stanford.edu (maxms at snf.stanford.edu) Date: Thu, 23 Sep 2010 00:24:47 -0700 Subject: Comment innotec SNF 2010-09-23 00:24:46: Pd pellets running low Message-ID: The Pd pellets are running low. I need to use 3-5 pellets for every run because there are always huge wholes in the targets. Now, there are very few Pd pellets left From jperez at snf.stanford.edu Thu Sep 23 13:28:03 2010 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Thu, 23 Sep 2010 13:28:03 -0700 Subject: Comment innotec SNF 2010-09-23 00:24:46: Pd pellets running low Message-ID: Replaced old starter source and added pellets. Reminder that a new starter source will take awhile to condition before it will evaporate. From maxms at snf.stanford.edu Sun Sep 26 02:23:16 2010 From: maxms at snf.stanford.edu (maxms at snf.stanford.edu) Date: Sun, 26 Sep 2010 02:23:16 -0700 Subject: Comment innotec SNF 2010-09-26 02:23:15: cut back on high voltage supply Message-ID: Me and the next user had the cut-back light flash on and off occasionally during deposition. Ramp up and ramp down slowly. From ahazeghi at snf.stanford.edu Sun Sep 26 23:41:15 2010 From: ahazeghi at snf.stanford.edu (ahazeghi at snf.stanford.edu) Date: Sun, 26 Sep 2010 23:41:15 -0700 Subject: Problem innotec SNF 2010-09-26 23:41:14: dropped the Au target Message-ID: Au target was dropped in the hole next to the crucible. From jperez at snf.stanford.edu Mon Sep 27 07:36:55 2010 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Mon, 27 Sep 2010 07:36:55 -0700 Subject: Problem innotec SNF 2010-09-22 16:42:30: Planetary not smooth Message-ID: Ran Innotec twice and had no problem with planetary rotation. Make sure after closing bell jar the rotation appears right. At this time you can lift bell jar and rotate planetary so that the pin is at a different spot on the gear. From jhaydon at snf.stanford.edu Mon Sep 27 09:06:40 2010 From: jhaydon at snf.stanford.edu (jhaydon at snf.stanford.edu) Date: Mon, 27 Sep 2010 09:06:40 -0700 Subject: Problem innotec SNF 2010-09-26 23:41:14: dropped the Au target Message-ID: Au target recovered From jperez at snf.stanford.edu Tue Sep 28 15:04:14 2010 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Tue, 28 Sep 2010 15:04:14 -0700 Subject: Comment innotec SNF 2010-09-28 15:04:12: Replaced the Pt starter source Message-ID: Couldn't keep the Pt starter source from splattering. Brought the power down from 7% to 5% and Pt still would splatter. This is unusual.On the bottom of the Pt are lumps, which may be the cause. This Pt source has been in the Lab for a very long time, so I went ahead and replaced it with a new Pt starter source. Just a reminder that it will take awile to condition a new starter source before it will behave normally. From ahazeghi at snf.stanford.edu Wed Sep 29 01:10:17 2010 From: ahazeghi at snf.stanford.edu (ahazeghi at snf.stanford.edu) Date: Wed, 29 Sep 2010 01:10:17 -0700 Subject: Problem innotec SNF 2010-09-29 01:10:16: crystal failure Message-ID: Crystal failed during deposition (93%) chnaged crystal. Please make sure you insert crystal carefully. From jperez at snf.stanford.edu Thu Sep 30 07:05:02 2010 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Thu, 30 Sep 2010 07:05:02 -0700 Subject: Problem innotec SNF 2010-09-29 01:10:16: crystal failure Message-ID: Crystal can fail at anytime. Many ways / why crystal can fail. You need to be prepared at anytime during deposition for crystal to fail.