From jhaydon at snf.stanford.edu Mon Aug 1 09:33:41 2011 From: jhaydon at snf.stanford.edu (jhaydon at snf.stanford.edu) Date: Mon, 1 Aug 2011 09:33:41 -0700 Subject: Problem innotec SNF 2011-07-30 20:29:07: Chamber is not goind down!! Message-ID: replaced springs in switch From daesung at snf.stanford.edu Tue Aug 2 22:54:39 2011 From: daesung at snf.stanford.edu (daesung at snf.stanford.edu) Date: Tue, 2 Aug 2011 22:54:39 -0700 Subject: Problem innotec SNF 2011-08-02 22:54:38: Shutter doesn't work properly Message-ID: Cannot open the shutter during the deposition but it was okay before pump down. From munekazu at snf.stanford.edu Wed Aug 3 08:04:27 2011 From: munekazu at snf.stanford.edu (munekazu at snf.stanford.edu) Date: Wed, 3 Aug 2011 08:04:27 -0700 Subject: Problem innotec SNF 2011-08-03 08:04:26: Polarized glass window Message-ID: Film stuck. Hard to see the inside. From jperez at snf.stanford.edu Thu Aug 4 10:42:36 2011 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Thu, 4 Aug 2011 10:42:36 -0700 Subject: Problem innotec SNF 2011-08-03 08:04:26: Polarized glass window Message-ID: If knob is turn counter-clock-wise, the film may get stuck. Right now it is turning fine. From jperez at snf.stanford.edu Thu Aug 4 10:43:58 2011 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Thu, 4 Aug 2011 10:43:58 -0700 Subject: Problem innotec SNF 2011-08-02 22:54:38: Shutter doesn't work properly Message-ID: Don't know what happen, but several Users after said it opened OK for them. From jperez at snf.stanford.edu Thu Aug 4 10:44:29 2011 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Thu, 4 Aug 2011 10:44:29 -0700 Subject: Comment innotec SNF 2011-07-27 01:02:30: Missed one wafer holding bolt Message-ID: Recovered screw. From jperez at snf.stanford.edu Fri Aug 5 10:24:53 2011 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Fri, 5 Aug 2011 10:24:53 -0700 Subject: Comment innotec SNF 2011-08-05 10:24:53: shutter is taking longer to open once you press open Message-ID: Shutter is opening, just give it a few seconds longer to open. From jperez at snf.stanford.edu Fri Aug 5 12:54:34 2011 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Fri, 5 Aug 2011 12:54:34 -0700 Subject: Comment innotec SNF 2011-08-05 10:24:53: shutter is taking longer to open once you press open Message-ID: Jim made adjust and should open with normal delay. From jperez at snf.stanford.edu Tue Aug 9 14:48:14 2011 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Tue, 9 Aug 2011 14:48:14 -0700 Subject: Problem innotec SNF 2011-08-09 14:48:13: Shutter sticking Message-ID: WE let the shutter open on it's own for 30 second, but still wouldn't open. Open and closed shutter three times before it opened. You have to visually look and see that the shutter opened. The clue was no deposition rate. From dongrip at snf.stanford.edu Wed Aug 10 17:52:10 2011 From: dongrip at snf.stanford.edu (dongrip at snf.stanford.edu) Date: Wed, 10 Aug 2011 17:52:10 -0700 Subject: Comment innotec SNF 2011-08-10 17:52:10: Pd pellets needed Message-ID: No more pellet of Pd. From jperez at snf.stanford.edu Fri Aug 12 06:14:24 2011 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Fri, 12 Aug 2011 06:14:24 -0700 Subject: Comment innotec SNF 2011-08-10 17:52:10: Pd pellets needed Message-ID: Added pellets to the jar. From jperez at snf.stanford.edu Fri Aug 12 11:32:27 2011 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Fri, 12 Aug 2011 11:32:27 -0700 Subject: Problem innotec SNF 2011-08-12 11:32:27: Hissing sound, OK to use Message-ID: Jim H. will working the problem on Monday From munekazu at snf.stanford.edu Mon Aug 15 05:41:34 2011 From: munekazu at snf.stanford.edu (munekazu at snf.stanford.edu) Date: Mon, 15 Aug 2011 05:41:34 -0700 Subject: Problem innotec SNF 2011-08-15 05:41:33: Not pump only mode Message-ID: When I came, the status was not the pump only mode. The ATM lamp was lit. The chamber was left vented. It seems OK to use. From jperez at snf.stanford.edu Thu Aug 18 07:26:30 2011 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Thu, 18 Aug 2011 07:26:30 -0700 Subject: Problem innotec SNF 2011-08-15 05:41:33: Not pump only mode Message-ID: Previous user forgot to press start when he walked away. From jhaydon at snf.stanford.edu Fri Aug 19 12:29:47 2011 From: jhaydon at snf.stanford.edu (jhaydon at snf.stanford.edu) Date: Fri, 19 Aug 2011 12:29:47 -0700 Subject: Comment innotec SNF 2011-08-19 12:29:46: pnuematic valves no langer available Message-ID: I will replace the valve manifold and valves in the next week or so From jperez at snf.stanford.edu Tue Aug 23 08:02:09 2011 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Tue, 23 Aug 2011 08:02:09 -0700 Subject: Problem innotec SNF 2011-08-09 14:48:13: Shutter sticking Message-ID: Jim made an adjustment and haven't seen the problem in a week. From maxms at snf.stanford.edu Wed Aug 24 10:19:29 2011 From: maxms at snf.stanford.edu (maxms at snf.stanford.edu) Date: Wed, 24 Aug 2011 10:19:29 -0700 Subject: Comment innotec SNF 2011-08-24 10:19:28: 1 Au pellet left Message-ID: From maxms at snf.stanford.edu Thu Aug 25 01:37:32 2011 From: maxms at snf.stanford.edu (maxms at snf.stanford.edu) Date: Thu, 25 Aug 2011 01:37:32 -0700 Subject: Comment innotec SNF 2011-08-25 01:37:31: logbook error Message-ID: I think someone misadded the total thickness evaporated in innotec... it's in the tens of thousands, when it jused to be in the hundreds of thousands... From jperez at snf.stanford.edu Thu Aug 25 07:45:46 2011 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Thu, 25 Aug 2011 07:45:46 -0700 Subject: Shutdown innotec SNF 2011-08-25 07:45:45: Shield change inprogress. Message-ID: From jperez at snf.stanford.edu Thu Aug 25 07:46:22 2011 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Thu, 25 Aug 2011 07:46:22 -0700 Subject: Comment innotec SNF 2011-08-25 01:37:31: logbook error Message-ID: Will correct error. From jperez at snf.stanford.edu Thu Aug 25 14:21:19 2011 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Thu, 25 Aug 2011 14:21:19 -0700 Subject: Shutdown innotec SNF 2011-08-25 07:45:45: Shield change inprogress. Message-ID: Regen Completed and shield change donw. From jperez at snf.stanford.edu Thu Aug 25 14:21:37 2011 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Thu, 25 Aug 2011 14:21:37 -0700 Subject: Comment innotec SNF 2011-08-24 10:19:28: 1 Au pellet left Message-ID: added pellets. From jperez at snf.stanford.edu Thu Aug 25 14:22:00 2011 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Thu, 25 Aug 2011 14:22:00 -0700 Subject: Comment innotec SNF 2011-08-16 10:58:46: SEVERE FLAKING Message-ID: Shield change completed. From jperez at snf.stanford.edu Thu Aug 25 14:22:39 2011 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Thu, 25 Aug 2011 14:22:39 -0700 Subject: Comment innotec SNF 2011-08-25 14:22:38: Coat and test, Message-ID: From dongrip at snf.stanford.edu Fri Aug 26 00:54:14 2011 From: dongrip at snf.stanford.edu (dongrip at snf.stanford.edu) Date: Fri, 26 Aug 2011 00:54:14 -0700 Subject: Problem innotec SNF 2011-08-26 00:54:13: Bell Jar doesn't go up. Message-ID: Bell Jar doesn't go up, even after I waited for long time since the ATM venting was lit. From jhaydon at snf.stanford.edu Fri Aug 26 07:12:59 2011 From: jhaydon at snf.stanford.edu (jhaydon at snf.stanford.edu) Date: Fri, 26 Aug 2011 07:12:59 -0700 Subject: Problem innotec SNF 2011-08-26 00:54:13: Bell Jar doesn't go up. Message-ID: bell jar was jambed. I repositioned down switch up about 1/4' so the motor will cut out sooner From maxms at snf.stanford.edu Sat Aug 27 09:42:19 2011 From: maxms at snf.stanford.edu (maxms at snf.stanford.edu) Date: Sat, 27 Aug 2011 09:42:19 -0700 Subject: Comment innotec SNF 2011-08-27 09:42:18: no Pt comments Message-ID: no Pt comments in container. It should still be okay for several depositions before a pellet has to be added though. From mtang at snf.stanford.edu Sun Aug 28 04:36:24 2011 From: mtang at snf.stanford.edu (mtang at snf.stanford.edu) Date: Sun, 28 Aug 2011 04:36:24 -0700 Subject: Problem innotec SNF 2011-08-28 04:36:24: Gold is low Message-ID: User reports gold target weight at 48g. No pellets in stock. From cave at snf.stanford.edu Sun Aug 28 17:36:12 2011 From: cave at snf.stanford.edu (cave at snf.stanford.edu) Date: Sun, 28 Aug 2011 17:36:12 -0700 Subject: Comment innotec SNF 2011-08-28 17:36:11: Message-ID: From jhaydon at snf.stanford.edu Mon Aug 29 06:56:50 2011 From: jhaydon at snf.stanford.edu (jhaydon at snf.stanford.edu) Date: Mon, 29 Aug 2011 06:56:50 -0700 Subject: Comment innotec SNF 2011-08-28 17:36:11: Message-ID: From jperez at snf.stanford.edu Mon Aug 29 07:07:04 2011 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Mon, 29 Aug 2011 07:07:04 -0700 Subject: Comment innotec SNF 2011-08-25 14:22:38: Coat and test, Message-ID: Good test results. From jperez at snf.stanford.edu Mon Aug 29 07:07:47 2011 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Mon, 29 Aug 2011 07:07:47 -0700 Subject: Comment innotec SNF 2011-08-27 09:42:18: no Pt comments Message-ID: This is a new starter source, doesn't need pellets at this time. From jperez at snf.stanford.edu Mon Aug 29 07:08:42 2011 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Mon, 29 Aug 2011 07:08:42 -0700 Subject: Comment innotec SNF 2011-08-25 20:44:18: cryopump Message-ID: Ok to use, check On Board display in back of Innotec. From jperez at snf.stanford.edu Tue Aug 30 07:06:38 2011 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Tue, 30 Aug 2011 07:06:38 -0700 Subject: Problem innotec SNF 2011-08-28 04:36:24: Gold is low Message-ID: Did two passes of Gold replenishing and weight is 61.2g with 20 pellets.added to baggy. From popomoo at snf.stanford.edu Tue Aug 30 17:51:26 2011 From: popomoo at snf.stanford.edu (popomoo at snf.stanford.edu) Date: Tue, 30 Aug 2011 17:51:26 -0700 Subject: Problem innotec SNF 2011-08-30 17:51:26: cut-back flashes too much Message-ID: I wanna deposit Au and Ag, in sequence. After Au deposition, I started to deposit Ag around 15nm. At that time, the power was 10%, and the deposition rate was around 4.5A/s. Suddenly, the light 'cut-back' kept flashing, and I could not deposit more. I have no idea why it happened.