Problem innotec SNF 2011-08-30 17:51:26: cut-back flashes too much

popomoo at popomoo at
Tue Aug 30 17:51:26 PDT 2011

I wanna deposit Au and Ag, in sequence.
After Au deposition, I started to deposit Ag around 15nm.
At that time, the power was 10%, and the deposition rate was around 4.5A/s. Suddenly, the light 'cut-back' kept flashing, and I could not deposit more. I have no idea why it happened. 

More information about the innotec-pcs mailing list