Problem innotec SNF 2011-12-12 04:44:30: Pop and pressure jump

nxs4059 at snf.stanford.edu nxs4059 at snf.stanford.edu
Mon Dec 12 04:44:31 PST 2011


When I tuned on the high voltage source I heard a pop and the pressure jumped.  when I went back to pump only the roughing pump started again, unable to do deposition due to time limitations and need for another full pump down




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