Problem innotec SNF 2011-02-02 02:18:17: Cut bank fan during dep

jasonlin at snf.stanford.edu jasonlin at snf.stanford.edu
Wed Feb 2 02:18:18 PST 2011


High voltage cut back fan flickers during deposition (causing HV to drop momentarily).  Deposition was otherwise fine.




More information about the innotec-pcs mailing list