From jperez at snf.stanford.edu Tue Jan 4 05:14:14 2011 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Tue, 4 Jan 2011 05:14:14 -0800 Subject: Problem innotec SNF 2011-01-04 05:14:13: power controller won't come on. Message-ID: From jperez at snf.stanford.edu Tue Jan 4 08:55:04 2011 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Tue, 4 Jan 2011 08:55:04 -0800 Subject: Problem innotec SNF 2011-01-04 05:14:13: power controller won't come on. Message-ID: Turn power on in basement. From jperez at snf.stanford.edu Tue Jan 4 08:56:01 2011 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Tue, 4 Jan 2011 08:56:01 -0800 Subject: Shutdown innotec SNF 2010-12-16 07:06:34: Lab shutdown for 2010 Message-ID: Happy New Year, test in progress. OK TO USE From jperez at snf.stanford.edu Tue Jan 4 08:56:23 2011 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Tue, 4 Jan 2011 08:56:23 -0800 Subject: Comment innotec SNF 2010-12-14 09:11:24: added 16 duumies to box Message-ID: THANKS From clee58 at snf.stanford.edu Wed Jan 5 06:51:07 2011 From: clee58 at snf.stanford.edu (clee58 at snf.stanford.edu) Date: Wed, 5 Jan 2011 06:51:07 -0800 Subject: Problem innotec SNF 2011-01-05 06:51:07: Damaged Ni source Message-ID: Nickel starter source was exploded. I vacuumed inside chamber and changed crystal. From faridz at snf.stanford.edu Wed Jan 5 16:27:03 2011 From: faridz at snf.stanford.edu (faridz at snf.stanford.edu) Date: Wed, 5 Jan 2011 16:27:03 -0800 Subject: Problem innotec SNF 2011-01-05 16:27:03: beam issue ! Message-ID: beam is very weak i was trying to depo Au and CU but unable to fire up the beam its look like big weak blob. check with Jim vented the chamber and clean source, but problem still there i wasn not able to despo any metal. From jhaydon at snf.stanford.edu Wed Jan 5 18:16:44 2011 From: jhaydon at snf.stanford.edu (jhaydon at snf.stanford.edu) Date: Wed, 5 Jan 2011 18:16:44 -0800 Subject: Shutdown innotec SNF 2011-01-05 18:16:44: bad pressure burst suspect HV feedthrough Message-ID: I will replace them in the morning after Elmer welds some shielding on them for me From jhaydon at snf.stanford.edu Wed Jan 5 21:35:43 2011 From: jhaydon at snf.stanford.edu (jhaydon at snf.stanford.edu) Date: Wed, 5 Jan 2011 21:35:43 -0800 Subject: Shutdown innotec SNF 2011-01-05 18:16:44: bad pressure burst suspect HV feedthrough Message-ID: feedthroughs replaced and e-gun tested to 20% 4.6 kw From maxms at snf.stanford.edu Wed Jan 5 23:46:46 2011 From: maxms at snf.stanford.edu (maxms at snf.stanford.edu) Date: Wed, 5 Jan 2011 23:46:46 -0800 Subject: Problem innotec SNF 2011-01-05 23:46:46: crystal failure Message-ID: always displays "crystal failure," no matter if new crystal is put in or not. From jperez at snf.stanford.edu Thu Jan 6 09:42:49 2011 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Thu, 6 Jan 2011 09:42:49 -0800 Subject: Shutdown innotec SNF 2011-01-06 09:42:48: Crystal monitor isn't working Message-ID: You won't be able to get a reading on the display for thickness or deposition rate. From jperez at snf.stanford.edu Thu Jan 6 12:52:15 2011 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Thu, 6 Jan 2011 12:52:15 -0800 Subject: Problem innotec SNF 2011-01-06 12:52:15: wfs1 interlock error Message-ID: From jperez at snf.stanford.edu Thu Jan 6 14:31:58 2011 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Thu, 6 Jan 2011 14:31:58 -0800 Subject: Problem innotec SNF 2011-01-06 14:31:58: Inner shield came off the pin and is sticking out Message-ID: The shield is too far from the pin for me to move it. Back rightside. From maurice at snf.stanford.edu Thu Jan 6 16:35:11 2011 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Thu, 6 Jan 2011 16:35:11 -0800 Subject: Problem innotec SNF 2011-01-06 14:31:58: Inner shield came off the pin and is sticking out Message-ID: Muscled shield back into position From maurice at snf.stanford.edu Thu Jan 6 16:36:29 2011 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Thu, 6 Jan 2011 16:36:29 -0800 Subject: Problem innotec SNF 2011-01-06 12:52:15: wfs1 interlock error Message-ID: Ed adjusted water flow. From maurice at snf.stanford.edu Thu Jan 6 16:39:34 2011 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Thu, 6 Jan 2011 16:39:34 -0800 Subject: Shutdown innotec SNF 2011-01-06 09:42:48: Crystal monitor isn't working Message-ID: Ed and I found a wire from the crystal monitor pinched in the shielding near the feedthough. After freeing the wire the monitor displayed normally. From maurice at snf.stanford.edu Thu Jan 6 16:40:33 2011 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Thu, 6 Jan 2011 16:40:33 -0800 Subject: Problem innotec SNF 2011-01-05 23:46:46: crystal failure Message-ID: Ed and I found a wire from the crystal monitor pinched in the shielding near the feedthough. After freeing the wire the monitor displayed normally. From emyers at snf.stanford.edu Thu Jan 6 17:29:06 2011 From: emyers at snf.stanford.edu (emyers at snf.stanford.edu) Date: Thu, 6 Jan 2011 17:29:06 -0800 Subject: Comment innotec SNF 2011-01-06 17:29:05: Ran Dep -Beam Problems Message-ID: I ran a fast 100Ang Al deposition to test the crystal monitor and the water flow error. I did not have a problem with either of these issues. Both worked fine. The beam, however is in poor shape. There seems to be a very small area where it is in focus. The location is near the edge of the source and could cause problems if ran. The beam size increases very rapidly with only small movement. I also was seeing unstable high voltage. It was very unstable when I turned on the power supply. The variations became less with time, but continued while the high voltage was on. From emyers at snf.stanford.edu Thu Jan 6 17:32:25 2011 From: emyers at snf.stanford.edu (emyers at snf.stanford.edu) Date: Thu, 6 Jan 2011 17:32:25 -0800 Subject: Shutdown innotec SNF 2011-01-06 17:32:24: Very Bad Beam Focus Message-ID: There is a significant beam focusing problem. Since the functionality is so limited I am putting the system down until this is corrected. I appologize to tonights users. From jperez at snf.stanford.edu Fri Jan 7 09:19:24 2011 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Fri, 7 Jan 2011 09:19:24 -0800 Subject: Shutdown innotec SNF 2011-01-06 17:32:24: Very Bad Beam Focus Message-ID: Jim cleaned up E gun and debrie below. Beam focus looks good and in the center . From jperez at snf.stanford.edu Fri Jan 7 09:24:33 2011 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Fri, 7 Jan 2011 09:24:33 -0800 Subject: Comment innotec SNF 2011-01-06 17:29:05: Ran Dep -Beam Problems Message-ID: Beam size looks good after cleaning and replacing the E-gun. Some arcing but believe due to the cleaning. Everything was stable at 7.1% power. From jperez at snf.stanford.edu Fri Jan 7 09:27:07 2011 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Fri, 7 Jan 2011 09:27:07 -0800 Subject: Problem innotec SNF 2011-01-05 16:27:03: beam issue ! Message-ID: Replaced E-gun and cleaned more of the Nickel debrie. Beam centered and looks good. From jperez at snf.stanford.edu Mon Jan 10 07:23:11 2011 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Mon, 10 Jan 2011 07:23:11 -0800 Subject: Problem innotec SNF 2011-01-05 06:51:07: Damaged Ni source Message-ID: Nickel has been replaced. From ajforman at snf.stanford.edu Wed Jan 12 13:07:28 2011 From: ajforman at snf.stanford.edu (ajforman at snf.stanford.edu) Date: Wed, 12 Jan 2011 13:07:28 -0800 Subject: Comment innotec SNF 2011-01-12 13:07:27: Innotec vac dump Message-ID: When I first started for the day the vac dumped as I turned on the HV. Jim looked at it and couldn't find the source of teh problem. The vac was fine for 2 subsequent runs. From maurice at snf.stanford.edu Thu Jan 13 09:39:50 2011 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Thu, 13 Jan 2011 09:39:50 -0800 Subject: Problem innotec SNF 2010-12-13 13:39:15: Out of Pt pellets Message-ID: 30 pellets added to box Horvath will added them all to the source From khu834 at snf.stanford.edu Wed Jan 19 17:47:11 2011 From: khu834 at snf.stanford.edu (khu834 at snf.stanford.edu) Date: Wed, 19 Jan 2011 17:47:11 -0800 Subject: Comment innotec SNF 2011-01-19 17:47:11: planetary touching frame Message-ID: The planetary is making slight contact with the bell jar frame, rotation speed is unstable. Weak squeeking sound is audible. From robinhmb at yahoo.com Fri Jan 21 10:00:14 2011 From: robinhmb at yahoo.com (Robin King) Date: Fri, 21 Jan 2011 10:00:14 -0800 (PST) Subject: Innotec is available until noon today Message-ID: <517985.20760.qm@web111512.mail.gq1.yahoo.com> Jeannie is out sick today and it's reserved under her name till 12 noon. I thought someone else might be able to use it. From ajamo at snf.stanford.edu Sat Jan 22 03:36:57 2011 From: ajamo at snf.stanford.edu (ajamo at snf.stanford.edu) Date: Sat, 22 Jan 2011 03:36:57 -0800 Subject: Comment innotec SNF 2011-01-22 03:36:56: Out of Pt & Au Pellets Message-ID: I did Pt and Au deps tonight, there were only 2 Pt pellets left and 3 Au pellets left. I used them all and now there are no more pellets for Pt and Au. Pt source starting to look a little thin. From hrleebh at snf.stanford.edu Sun Jan 23 11:19:16 2011 From: hrleebh at snf.stanford.edu (hrleebh at snf.stanford.edu) Date: Sun, 23 Jan 2011 11:19:16 -0800 Subject: Problem innotec SNF 2011-01-23 11:19:15: Au pellets are needed !!!! Message-ID: The Au source is really thin now and we don't have any more pellets.:( From maurice at snf.stanford.edu Sun Jan 23 12:02:45 2011 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Sun, 23 Jan 2011 12:02:45 -0800 Subject: Problem innotec SNF 2011-01-23 11:19:15: Au pellets are needed !!!! Message-ID: Added 30 Au pellets From maurice at snf.stanford.edu Sun Jan 23 12:03:19 2011 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Sun, 23 Jan 2011 12:03:19 -0800 Subject: Comment innotec SNF 2011-01-22 03:36:56: Out of Pt & Au Pellets Message-ID: added 30 Au and 30 Pt pellets From khu834 at snf.stanford.edu Mon Jan 24 11:16:29 2011 From: khu834 at snf.stanford.edu (khu834 at snf.stanford.edu) Date: Mon, 24 Jan 2011 11:16:29 -0800 Subject: Comment innotec SNF 2011-01-24 11:16:29: Crystal plate Message-ID: Changed shutter. The metal plate around the crystal is missing 2 screws, currently tilted to one side. From alsune at snf.stanford.edu Tue Jan 25 02:31:10 2011 From: alsune at snf.stanford.edu (alsune at snf.stanford.edu) Date: Tue, 25 Jan 2011 02:31:10 -0800 Subject: Problem innotec SNF 2011-01-25 02:31:10: Pt target missing? Message-ID: When preping up the innotec for Pt deposition, found out that Pt target is missing.... Do the staff keep them in a safe at night? From nxs4059 at snf.stanford.edu Tue Jan 25 13:46:11 2011 From: nxs4059 at snf.stanford.edu (nxs4059 at snf.stanford.edu) Date: Tue, 25 Jan 2011 13:46:11 -0800 Subject: Shutdown innotec SNF 2011-01-25 13:46:10: cannot pumpdown Message-ID: after loading wafers and closing chamber & stopping vent, no option to "pump Down" (F5) becomes available From maurice at snf.stanford.edu Tue Jan 25 14:48:35 2011 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Tue, 25 Jan 2011 14:48:35 -0800 Subject: Shutdown innotec SNF 2011-01-25 13:46:10: cannot pumpdown Message-ID: Jim rebooted VSC From maurice at snf.stanford.edu Tue Jan 25 14:49:43 2011 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Tue, 25 Jan 2011 14:49:43 -0800 Subject: Problem innotec SNF 2011-01-25 02:31:10: Pt target missing? Message-ID: Target not missing. User did not read his emails to see the procedure for using Pt. From hrleebh at snf.stanford.edu Mon Jan 31 16:25:28 2011 From: hrleebh at snf.stanford.edu (hrleebh at snf.stanford.edu) Date: Mon, 31 Jan 2011 16:25:28 -0800 Subject: Comment innotec SNF 2011-01-31 16:25:28: Need more Au pellets Message-ID: We are almost out of Au pellets again. Right now, there are 2 and 1/2 pellets in the case.