Shutdown innotec SNF 2011-01-25 13:46:10: cannot pumpdown

nxs4059 at snf.stanford.edu nxs4059 at snf.stanford.edu
Tue Jan 25 13:46:11 PST 2011

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after loading wafers and closing chamber & stopping vent, no option to "pump Down" (F5) becomes available

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