From maurice at snf.stanford.edu Fri Jul 1 16:21:25 2011 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Fri, 1 Jul 2011 16:21:25 -0700 Subject: Problem innotec SNF 2011-06-25 14:39:23: Cr target has been punched through Message-ID: Replaced Cr target From maurice at snf.stanford.edu Fri Jul 1 16:25:17 2011 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Fri, 1 Jul 2011 16:25:17 -0700 Subject: Problem innotec SNF 2011-06-20 13:02:27: Ni pellets all gone Message-ID: Added more pellets replaced plastic bag From maurice at snf.stanford.edu Fri Jul 1 16:25:32 2011 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Fri, 1 Jul 2011 16:25:32 -0700 Subject: Comment innotec SNF 2011-06-22 15:06:47: Ni pellets added to box Message-ID: logged From maurice at snf.stanford.edu Fri Jul 1 16:26:12 2011 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Fri, 1 Jul 2011 16:26:12 -0700 Subject: Problem innotec SNF 2011-06-21 19:37:28: Cryopump temp at 16K Message-ID: system regen'ed 6/30/11 From maurice at snf.stanford.edu Fri Jul 1 16:26:25 2011 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Fri, 1 Jul 2011 16:26:25 -0700 Subject: Problem innotec SNF 2011-06-18 16:04:13: Cryopump back to 19K during deposition Message-ID: system regen'ed 6/30/11 From maurice at snf.stanford.edu Fri Jul 1 16:26:37 2011 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Fri, 1 Jul 2011 16:26:37 -0700 Subject: Comment innotec SNF 2011-06-18 15:30:40: cryopump back at 14k Message-ID: logged From maurice at snf.stanford.edu Fri Jul 1 16:26:43 2011 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Fri, 1 Jul 2011 16:26:43 -0700 Subject: Problem innotec SNF 2011-06-18 14:25:42: Cryopump at 18K Message-ID: system regen'ed 6/30/11 From bilee at snf.stanford.edu Tue Jul 5 04:36:50 2011 From: bilee at snf.stanford.edu (bilee at snf.stanford.edu) Date: Tue, 5 Jul 2011 04:36:50 -0700 Subject: Problem innotec SNF 2011-07-05 04:36:49: No Pt pellets. Message-ID: No Pt pellets left. From jperez at snf.stanford.edu Tue Jul 5 14:50:17 2011 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Tue, 5 Jul 2011 14:50:17 -0700 Subject: Problem innotec SNF 2011-07-05 04:36:49: No Pt pellets. Message-ID: Added Pt pellets to baggy. From jperez at snf.stanford.edu Tue Jul 5 14:51:23 2011 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Tue, 5 Jul 2011 14:51:23 -0700 Subject: Comment innotec SNF 2011-06-28 18:33:52: Source material low in depth Message-ID: At this time all three starters look OK. Replaced Ag starter source and added pellets. From jperez at snf.stanford.edu Tue Jul 5 14:56:22 2011 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Tue, 5 Jul 2011 14:56:22 -0700 Subject: Problem innotec SNF 2011-07-05 14:56:22: It appears that we are out of film for the polarized window Message-ID: It is difficult to see a bright e-beam or hot starter source due to being unable to get a clean strip of film. Becareful not to increase power to tried for a brighter hot source. Will have Maintenance replace film tomorrow. From jhaydon at snf.stanford.edu Wed Jul 6 10:52:13 2011 From: jhaydon at snf.stanford.edu (jhaydon at snf.stanford.edu) Date: Wed, 6 Jul 2011 10:52:13 -0700 Subject: Problem innotec SNF 2011-07-05 14:56:22: It appears that we are out of film for the polarized window Message-ID: film is ok just have been truned the wrong way and jammed From jaehlee at snf.stanford.edu Thu Jul 7 02:10:42 2011 From: jaehlee at snf.stanford.edu (jaehlee at snf.stanford.edu) Date: Thu, 7 Jul 2011 02:10:42 -0700 Subject: Problem innotec SNF 2011-07-07 02:10:42: Cr source Message-ID: There isn't a through hole yet but the hole was deep enough to leave some mark on the bottom of the source. I am really sorry about this. From ajamo at snf.stanford.edu Fri Jul 8 17:37:09 2011 From: ajamo at snf.stanford.edu (ajamo at snf.stanford.edu) Date: Fri, 8 Jul 2011 17:37:09 -0700 Subject: Problem innotec SNF 2011-07-08 17:37:09: Cryo temp higher than usual Message-ID: The cryo temp bounced up to 17K and then back down to 14K. I did 3 depositions and it went up to 16, then back down again when I vented the system. From jperez at snf.stanford.edu Mon Jul 11 07:22:39 2011 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Mon, 11 Jul 2011 07:22:39 -0700 Subject: Problem innotec SNF 2011-07-07 02:10:42: Cr source Message-ID: Make sure residuals are off the side wallsand sources fit snug. From jperez at snf.stanford.edu Tue Jul 12 10:01:34 2011 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Tue, 12 Jul 2011 10:01:34 -0700 Subject: Problem innotec SNF 2011-07-05 15:40:38: Material List problem on Deposition Controller Message-ID: program has been fixed. Ni vs Ta From yuxinz at snf.stanford.edu Sun Jul 17 21:42:04 2011 From: yuxinz at snf.stanford.edu (yuxinz at snf.stanford.edu) Date: Sun, 17 Jul 2011 21:42:04 -0700 Subject: Problem innotec SNF 2011-07-17 21:42:04: cryo temp sometimes goes up to 19K Message-ID: From maxms at snf.stanford.edu Tue Jul 19 18:57:48 2011 From: maxms at snf.stanford.edu (maxms at snf.stanford.edu) Date: Tue, 19 Jul 2011 18:57:48 -0700 Subject: Problem innotec SNF 2011-07-19 18:57:48: cannot see target during evap Message-ID: I tried evaporating Au, but had to stop before I moved the shutter. When it clearly should have been evaporating (above 13%), I cannot see the target glowing through the viewfinder. It's as if something is obstructing the view. From bilee at snf.stanford.edu Wed Jul 20 05:12:29 2011 From: bilee at snf.stanford.edu (bilee at snf.stanford.edu) Date: Wed, 20 Jul 2011 05:12:29 -0700 Subject: Problem innotec SNF 2011-07-20 05:12:28: Cannot see the beam well Message-ID: The window is too dark. Hard to see the beam during the deposition. From jhaydon at snf.stanford.edu Wed Jul 20 13:41:42 2011 From: jhaydon at snf.stanford.edu (jhaydon at snf.stanford.edu) Date: Wed, 20 Jul 2011 13:41:42 -0700 Subject: Problem innotec SNF 2011-07-20 05:12:28: Cannot see the beam well Message-ID: new film and repaired window installed From jhaydon at snf.stanford.edu Wed Jul 20 13:42:03 2011 From: jhaydon at snf.stanford.edu (jhaydon at snf.stanford.edu) Date: Wed, 20 Jul 2011 13:42:03 -0700 Subject: Problem innotec SNF 2011-07-19 18:57:48: cannot see target during evap Message-ID: new film and repaired window installed From jperez at snf.stanford.edu Tue Jul 26 07:04:44 2011 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Tue, 26 Jul 2011 07:04:44 -0700 Subject: Comment innotec SNF 2011-07-21 17:38:31: Ni Source Low!!! Message-ID: Replaced Nickel starter source. From jperez at snf.stanford.edu Tue Jul 26 07:05:18 2011 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Tue, 26 Jul 2011 07:05:18 -0700 Subject: Problem innotec SNF 2011-07-17 21:42:04: cryo temp sometimes goes up to 19K Message-ID: regen cryo completed 7/25/11 From jperez at snf.stanford.edu Tue Jul 26 07:06:00 2011 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Tue, 26 Jul 2011 07:06:00 -0700 Subject: Problem innotec SNF 2011-07-08 17:37:09: Cryo temp higher than usual Message-ID: regen cryo pump, completed 7/25/11 From jperez at snf.stanford.edu Tue Jul 26 14:17:00 2011 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Tue, 26 Jul 2011 14:17:00 -0700 Subject: Shutdown innotec SNF 2011-07-26 13:23:27: chamber stuck open Message-ID: Down switch was down, Jim Haydon already made an adjustment. OK to use. From jperez at snf.stanford.edu Tue Jul 26 14:18:08 2011 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Tue, 26 Jul 2011 14:18:08 -0700 Subject: Problem innotec SNF 2011-07-26 13:01:37: Hoist not lowering... Message-ID: The hoist wouldn't work becaue it thought it was already down. Mr Haydon made an adjustment and is now working. From dwnam at snf.stanford.edu Wed Jul 27 01:02:30 2011 From: dwnam at snf.stanford.edu (dwnam at snf.stanford.edu) Date: Wed, 27 Jul 2011 01:02:30 -0700 Subject: Comment innotec SNF 2011-07-27 01:02:30: Missed one wafer holding bolt Message-ID: While I was removing angle deposition holder, one bolt was missed. Actually, it was very tight when I was taking it off and could not put it back missed it while I was struggling to squeeze it into the hole. From jperez at snf.stanford.edu Fri Jul 29 10:28:05 2011 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Fri, 29 Jul 2011 10:28:05 -0700 Subject: Problem innotec SNF 2011-07-29 10:28:05: Crystal failured when turning on control supply Message-ID: From jperez at snf.stanford.edu Fri Jul 29 10:33:25 2011 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Fri, 29 Jul 2011 10:33:25 -0700 Subject: Problem innotec SNF 2011-07-29 10:28:05: Crystal failured when turning on control supply Message-ID: Jim replaced communication cable to crystal sensor. From hrleebh at snf.stanford.edu Sat Jul 30 20:29:08 2011 From: hrleebh at snf.stanford.edu (hrleebh at snf.stanford.edu) Date: Sat, 30 Jul 2011 20:29:08 -0700 Subject: Problem innotec SNF 2011-07-30 20:29:07: Chamber is not goind down!! Message-ID: After I load my wafers and put the source in, I tried to close the chamber. But the "down" button is not working. It still can go up, but I can't close it.