From jimkruger at snf.stanford.edu Mon Mar 7 13:22:08 2011 From: jimkruger at snf.stanford.edu (jimkruger at snf.stanford.edu) Date: Mon, 7 Mar 2011 13:22:08 -0800 Subject: Comment innotec SNF 2011-03-07 13:22:07: Ti container broken Message-ID: Need new Jar for Ti From jperez at snf.stanford.edu Mon Mar 7 14:50:21 2011 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Mon, 7 Mar 2011 14:50:21 -0800 Subject: Comment innotec SNF 2011-03-07 13:22:07: Ti container broken Message-ID: Replaced broken jar. From jimkruger at snf.stanford.edu Wed Mar 9 17:42:16 2011 From: jimkruger at snf.stanford.edu (jimkruger at snf.stanford.edu) Date: Wed, 9 Mar 2011 17:42:16 -0800 Subject: Problem innotec SNF 2011-03-09 17:42:15: Crystal "Noisy" Message-ID: Crystal was a little jumpy during my run even though is is only at 92%. Perhaps it should be changed. From justinwu at snf.stanford.edu Thu Mar 10 06:57:50 2011 From: justinwu at snf.stanford.edu (justinwu at snf.stanford.edu) Date: Thu, 10 Mar 2011 06:57:50 -0800 Subject: Shutdown innotec SNF 2011-03-10 06:57:50: Source fell down hole. Message-ID: Ti source fell down hole in front of hearth. From jhaydon at snf.stanford.edu Thu Mar 10 07:00:22 2011 From: jhaydon at snf.stanford.edu (jhaydon at snf.stanford.edu) Date: Thu, 10 Mar 2011 07:00:22 -0800 Subject: Shutdown innotec SNF 2011-03-10 06:57:50: Source fell down hole. Message-ID: target recovered From jperez at snf.stanford.edu Thu Mar 10 08:13:52 2011 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Thu, 10 Mar 2011 08:13:52 -0800 Subject: Problem innotec SNF 2011-03-09 17:42:15: Crystal "Noisy" Message-ID: replaced From ajamo at snf.stanford.edu Thu Mar 10 12:31:07 2011 From: ajamo at snf.stanford.edu (ajamo at snf.stanford.edu) Date: Thu, 10 Mar 2011 12:31:07 -0800 Subject: Comment innotec SNF 2011-03-10 12:31:07: Beam? Message-ID: I did a Pt and Au dep today. Usually I can see the beam when the power is at 2-4 % Had to put the power up higher before I could start to see the beam, like around 6% From zeyuan at snf.stanford.edu Fri Mar 11 01:06:12 2011 From: zeyuan at snf.stanford.edu (zeyuan at snf.stanford.edu) Date: Fri, 11 Mar 2011 01:06:12 -0800 Subject: Problem innotec SNF 2011-03-11 01:06:12: Interlock WSF1 Message-ID: Before enabling the equipment, noticed there was "Interlock WSF1" on the runtime screen. Since last user used it and I have already stripped off my oxide, continued the pump down. After pumpdown, when turned on Main Power and press reset, the water lid is not up and Source 1 can't be turned on. Abandonned the run. Considering last user has finished deposition and only claimed a problem with target not the equipment, maybe there is some ways to operate the equipment under this condition, that I don't know. Only put a problem report. Please check the problem before planning your run. From zeyuan at snf.stanford.edu Fri Mar 11 01:12:54 2011 From: zeyuan at snf.stanford.edu (zeyuan at snf.stanford.edu) Date: Fri, 11 Mar 2011 01:12:54 -0800 Subject: Problem innotec SNF 2011-03-11 01:12:54: Hole on W source Message-ID: Previous user made a hole on W target From yoneoka at snf.stanford.edu Fri Mar 11 06:14:27 2011 From: yoneoka at snf.stanford.edu (yoneoka at snf.stanford.edu) Date: Fri, 11 Mar 2011 06:14:27 -0800 Subject: Problem innotec SNF 2011-03-11 06:14:27: Source 1 does not turn on Message-ID: I also encontered same problem with previous user. As zeyuan reported, Source 1 does not tuen on due to the water cooling problem. I think the maintenace is needed to solve this problem. From cursive at snf.stanford.edu Sat Mar 12 10:04:34 2011 From: cursive at snf.stanford.edu (cursive at snf.stanford.edu) Date: Sat, 12 Mar 2011 10:04:34 -0800 Subject: Problem innotec SNF 2011-03-12 10:04:34: someone left a unknown metal source on the table Message-ID: From jasonlin at snf.stanford.edu Mon Mar 14 23:19:55 2011 From: jasonlin at snf.stanford.edu (jasonlin at snf.stanford.edu) Date: Mon, 14 Mar 2011 23:19:55 -0700 Subject: Problem innotec SNF 2011-03-14 23:19:54: Al source is thin Message-ID: Need more pellets From jhaydon at snf.stanford.edu Thu Mar 17 10:10:38 2011 From: jhaydon at snf.stanford.edu (jhaydon at snf.stanford.edu) Date: Thu, 17 Mar 2011 10:10:38 -0700 Subject: Problem innotec SNF 2011-03-11 01:06:12: Interlock WSF1 Message-ID: could not find a problem, reset machine WFS1 cleared From jperez at snf.stanford.edu Fri Mar 18 07:20:21 2011 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Fri, 18 Mar 2011 07:20:21 -0700 Subject: Problem innotec SNF 2011-03-11 06:14:27: Source 1 does not turn on Message-ID: Reset in manual screen From jperez at snf.stanford.edu Fri Mar 18 07:33:00 2011 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Fri, 18 Mar 2011 07:33:00 -0700 Subject: Comment innotec SNF 2011-03-10 12:31:07: Beam? Message-ID: Isolated incident, no other complaints. Used Au and Pt several times and saw e-beam at normal power 2.2%. From jperez at snf.stanford.edu Fri Mar 18 07:33:37 2011 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Fri, 18 Mar 2011 07:33:37 -0700 Subject: Problem innotec SNF 2011-03-11 01:12:54: Hole on W source Message-ID: replaced W starter source. From jperez at snf.stanford.edu Fri Mar 18 07:34:15 2011 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Fri, 18 Mar 2011 07:34:15 -0700 Subject: Problem innotec SNF 2011-03-12 10:04:34: someone left a unknown metal source on the table Message-ID: Remove starter source. From jperez at snf.stanford.edu Fri Mar 18 07:34:46 2011 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Fri, 18 Mar 2011 07:34:46 -0700 Subject: Problem innotec SNF 2011-03-14 23:19:54: Al source is thin Message-ID: Added Aluminum pellets to the bag. From khu834 at snf.stanford.edu Fri Mar 18 19:30:21 2011 From: khu834 at snf.stanford.edu (khu834 at snf.stanford.edu) Date: Fri, 18 Mar 2011 19:30:21 -0700 Subject: Problem innotec SNF 2011-03-18 19:30:21: No "Pump Only" option Message-ID: After unloading sample, sources and stopped venting, the usual "Pump Only" F5 option does not appear. System status is "Stopped". I checked in the Manual page, the cryo pump is "off", I'm not sure if this is supposed to be on, maybe I turned it off by mistake when I tried to open the shutter. From mislam at snf.stanford.edu Fri Mar 18 23:35:48 2011 From: mislam at snf.stanford.edu (mislam at snf.stanford.edu) Date: Fri, 18 Mar 2011 23:35:48 -0700 Subject: Comment innotec SNF 2011-03-18 23:35:47: Innotec working fine Message-ID: From jimkruger at snf.stanford.edu Mon Mar 21 11:32:32 2011 From: jimkruger at snf.stanford.edu (jimkruger at snf.stanford.edu) Date: Mon, 21 Mar 2011 11:32:32 -0700 Subject: Problem innotec SNF 2011-03-21 11:32:30: Ti pellets: only 2 remain Message-ID: From jperez at snf.stanford.edu Tue Mar 22 07:47:01 2011 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Tue, 22 Mar 2011 07:47:01 -0700 Subject: Problem innotec SNF 2011-03-18 19:30:21: No "Pump Only" option Message-ID: Cryo pump should be on. From jperez at snf.stanford.edu Tue Mar 22 07:47:30 2011 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Tue, 22 Mar 2011 07:47:30 -0700 Subject: Comment innotec SNF 2011-03-18 23:35:47: Innotec working fine Message-ID: Thanks for the information. The cryo pump should be on. From jperez at snf.stanford.edu Tue Mar 22 07:48:53 2011 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Tue, 22 Mar 2011 07:48:53 -0700 Subject: Problem innotec SNF 2011-03-21 11:32:30: Ti pellets: only 2 remain Message-ID: added pellets. From jperez at snf.stanford.edu Tue Mar 22 15:04:31 2011 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Tue, 22 Mar 2011 15:04:31 -0700 Subject: Problem innotec SNF 2011-03-22 15:04:30: Remote up button is sticking Message-ID: From jperez at snf.stanford.edu Tue Mar 22 15:04:59 2011 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Tue, 22 Mar 2011 15:04:59 -0700 Subject: Problem innotec SNF 2011-03-22 15:04:30: Remote up button is sticking Message-ID: Replacing remote with a new one. From jperez at snf.stanford.edu Thu Mar 24 10:24:33 2011 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Thu, 24 Mar 2011 10:24:33 -0700 Subject: Shutdown innotec SNF 2011-03-24 10:24:33: Shield C;hange Message-ID: From jperez at snf.stanford.edu Thu Mar 24 14:52:11 2011 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Thu, 24 Mar 2011 14:52:11 -0700 Subject: Shutdown innotec SNF 2011-03-24 10:24:33: Shield C;hange Message-ID: Shield change and regen complete. Coat and test in progress. From jperez at snf.stanford.edu Thu Mar 24 14:53:27 2011 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Thu, 24 Mar 2011 14:53:27 -0700 Subject: Problem innotec SNF 2011-03-24 14:53:26: Test will be read 3/25.11 Message-ID: Use at your own risk. Everything appears to be running well. From kpkuhl at snf.stanford.edu Sat Mar 26 06:31:19 2011 From: kpkuhl at snf.stanford.edu (kpkuhl at snf.stanford.edu) Date: Sat, 26 Mar 2011 06:31:19 -0700 Subject: Problem innotec SNF 2011-03-26 06:31:18: screen is dark Message-ID: The main screen used to control innotec is dark. Things seem to work, but I couldn't tell where the cursor was, so I couldn't use it. From maxms at snf.stanford.edu Sat Mar 26 08:23:02 2011 From: maxms at snf.stanford.edu (maxms at snf.stanford.edu) Date: Sat, 26 Mar 2011 08:23:02 -0700 Subject: Problem innotec SNF 2011-03-26 08:23:02: screen Message-ID: The main console screen, as said above, is stuck in a grey, flickering state. It is unusable until this is fixed, since you cannot tell where the cursor is From jperez at snf.stanford.edu Mon Mar 28 07:34:15 2011 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Mon, 28 Mar 2011 07:34:15 -0700 Subject: Shutdown innotec SNF 2011-03-28 07:34:15: CRT screen is blank, Message-ID: From jperez at snf.stanford.edu Mon Mar 28 14:01:46 2011 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Mon, 28 Mar 2011 14:01:46 -0700 Subject: Shutdown innotec SNF 2011-03-28 07:34:15: CRT screen is blank, Message-ID: Switched out CRT screen from old SCT sputter system. System is back up. From jperez at snf.stanford.edu Mon Mar 28 14:02:30 2011 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Mon, 28 Mar 2011 14:02:30 -0700 Subject: Problem innotec SNF 2011-03-26 08:23:02: screen Message-ID: Screen has been replaced, Innotec back up. From jperez at snf.stanford.edu Mon Mar 28 14:03:35 2011 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Mon, 28 Mar 2011 14:03:35 -0700 Subject: Problem innotec SNF 2011-03-26 06:31:18: screen is dark Message-ID: Switched screen from old SCT sputter system. Innotec is back up. From jperez at snf.stanford.edu Mon Mar 28 14:03:59 2011 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Mon, 28 Mar 2011 14:03:59 -0700 Subject: Problem innotec SNF 2011-03-24 14:53:26: Test will be read 3/25.11 Message-ID: Test wafers are good.