From yoonyoung at snf.stanford.edu Fri May 6 08:38:25 2011 From: yoonyoung at snf.stanford.edu (yoonyoung at snf.stanford.edu) Date: Fri, 6 May 2011 08:38:25 -0700 Subject: Problem innotec SNF 2011-05-06 08:38:24: Al Source Message-ID: it seems that deep valley was created on the Al source last night. Please add MANY Al pallets when you use it. From jperez at snf.stanford.edu Mon May 9 08:48:26 2011 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Mon, 9 May 2011 08:48:26 -0700 Subject: Problem innotec SNF 2011-05-06 08:38:24: Al Source Message-ID: Pellets added and back to normal. From jimkruger at snf.stanford.edu Mon May 16 12:55:02 2011 From: jimkruger at snf.stanford.edu (jimkruger at snf.stanford.edu) Date: Mon, 16 May 2011 12:55:02 -0700 Subject: Comment innotec SNF 2011-05-16 12:55:02: All Ni pellets gone Message-ID: Ni source OK for now. From jperez at snf.stanford.edu Tue May 17 09:28:31 2011 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Tue, 17 May 2011 09:28:31 -0700 Subject: Comment innotec SNF 2011-05-16 12:55:02: All Ni pellets gone Message-ID: Replenished the baggy with Ni pellets. From jperez at snf.stanford.edu Tue May 17 09:50:44 2011 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Tue, 17 May 2011 09:50:44 -0700 Subject: Comment innotec SNF 2011-05-17 09:50:44: System peeling, just vacuum Message-ID: From dongrip at snf.stanford.edu Tue May 17 16:46:59 2011 From: dongrip at snf.stanford.edu (dongrip at snf.stanford.edu) Date: Tue, 17 May 2011 16:46:59 -0700 Subject: Problem innotec SNF 2011-05-17 16:46:59: high voltage turned off during the deposition, and didn't come back. Message-ID: From dongrip at snf.stanford.edu Tue May 17 16:50:43 2011 From: dongrip at snf.stanford.edu (dongrip at snf.stanford.edu) Date: Tue, 17 May 2011 16:50:43 -0700 Subject: Problem innotec SNF 2011-05-17 16:50:43: high voltage is gone Message-ID: High voltage was suddenly turned off during my deposition. I attempted to turn on three times after pumping down, but it couldn't make it. Whenever I press the on-button of high-voltage, cut-back becomes lit and high-voltage still reads zero. From dongrip at snf.stanford.edu Tue May 17 17:32:27 2011 From: dongrip at snf.stanford.edu (dongrip at snf.stanford.edu) Date: Tue, 17 May 2011 17:32:27 -0700 Subject: Comment innotec SNF 2011-05-17 17:32:26: Si source was not properly cooled down. Message-ID: Since I encountered the problem of voltage shut-down during the Si deposition, the Si source couldn't be slowly cooled down... From fanpy at snf.stanford.edu Tue May 17 23:19:04 2011 From: fanpy at snf.stanford.edu (fanpy at snf.stanford.edu) Date: Tue, 17 May 2011 23:19:04 -0700 Subject: Problem innotec SNF 2011-05-17 23:19:03: No HV Message-ID: As reported by previous user. HV reads zero and cutback fan lights up when HV is turned on. From jhaydon at snf.stanford.edu Wed May 18 09:10:40 2011 From: jhaydon at snf.stanford.edu (jhaydon at snf.stanford.edu) Date: Wed, 18 May 2011 09:10:40 -0700 Subject: Problem innotec SNF 2011-05-17 23:19:03: No HV Message-ID: replaced emitter HV working now From jhaydon at snf.stanford.edu Wed May 18 09:11:09 2011 From: jhaydon at snf.stanford.edu (jhaydon at snf.stanford.edu) Date: Wed, 18 May 2011 09:11:09 -0700 Subject: Problem innotec SNF 2011-05-17 16:50:43: high voltage is gone Message-ID: replaced emitter HV working now From jhaydon at snf.stanford.edu Wed May 18 09:11:29 2011 From: jhaydon at snf.stanford.edu (jhaydon at snf.stanford.edu) Date: Wed, 18 May 2011 09:11:29 -0700 Subject: Problem innotec SNF 2011-05-17 16:46:59: high voltage turned off during the deposition, and didn't come back. Message-ID: replaced emitter HV working now From jparker at snf.stanford.edu Wed May 18 18:45:42 2011 From: jparker at snf.stanford.edu (jparker at snf.stanford.edu) Date: Wed, 18 May 2011 18:45:42 -0700 Subject: Comment innotec SNF 2011-05-18 18:45:41: Si src ok Message-ID: Si source remelted and peak from 5/17 comment is gone. From jperez at snf.stanford.edu Tue May 24 10:03:26 2011 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Tue, 24 May 2011 10:03:26 -0700 Subject: Comment innotec SNF 2011-05-17 17:32:26: Si source was not properly cooled down. Message-ID: JParker melted Si peak when previous User lost power and couldn't bring down power slowly. From jperez at snf.stanford.edu Tue May 24 10:03:40 2011 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Tue, 24 May 2011 10:03:40 -0700 Subject: Comment innotec SNF 2011-05-18 18:45:41: Si src ok Message-ID: Thank you! From fanpy at snf.stanford.edu Thu May 26 01:47:02 2011 From: fanpy at snf.stanford.edu (fanpy at snf.stanford.edu) Date: Thu, 26 May 2011 01:47:02 -0700 Subject: Problem innotec SNF 2011-05-26 01:47:02: Dropped Ti source Message-ID: I accidentally dropped the Ti starter source into the hole next to the rotating crucibles when I tried to get it out of the crucible. I'm not sure where it went as I couldn't see it when I look down the hole. Hopefully this won't affect depositions of other metals. I am truly sorry for the inconvenience! From justinwu at snf.stanford.edu Thu May 26 06:20:51 2011 From: justinwu at snf.stanford.edu (justinwu at snf.stanford.edu) Date: Thu, 26 May 2011 06:20:51 -0700 Subject: Comment innotec SNF 2011-05-26 06:20:50: Recovered Ti source Message-ID: Fished it out. From jperez at snf.stanford.edu Thu May 26 10:26:51 2011 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Thu, 26 May 2011 10:26:51 -0700 Subject: Shutdown innotec SNF 2011-05-26 10:26:51: Shield Change Message-ID: From jperez at snf.stanford.edu Thu May 26 15:11:01 2011 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Thu, 26 May 2011 15:11:01 -0700 Subject: Shutdown innotec SNF 2011-05-26 10:26:51: Shield Change Message-ID: Finished Shield Change late. Parts didn't arrive. Jim had to clean some parts that he doesn't have for a full third set. Aleta will coat and run test. I will read tests in the morning. From jperez at snf.stanford.edu Thu May 26 15:11:16 2011 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Thu, 26 May 2011 15:11:16 -0700 Subject: Comment innotec SNF 2011-05-26 06:20:50: Recovered Ti source Message-ID: Thanks! From jperez at snf.stanford.edu Thu May 26 15:11:37 2011 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Thu, 26 May 2011 15:11:37 -0700 Subject: Problem innotec SNF 2011-05-26 01:47:02: Dropped Ti source Message-ID: Recovered by Jason Wu. From jperez at snf.stanford.edu Thu May 26 15:12:00 2011 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Thu, 26 May 2011 15:12:00 -0700 Subject: Comment innotec SNF 2011-05-17 09:50:44: System peeling, just vacuum Message-ID: Changed shields. From jperez at snf.stanford.edu Thu May 26 15:13:35 2011 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Thu, 26 May 2011 15:13:35 -0700 Subject: Problem innotec SNF 2011-05-26 15:13:34: Tests will be read in the morning 2/27/11 Message-ID: OK to use, but test need to be read tomorrow. From ajamo at snf.stanford.edu Thu May 26 17:09:42 2011 From: ajamo at snf.stanford.edu (ajamo at snf.stanford.edu) Date: Thu, 26 May 2011 17:09:42 -0700 Subject: Problem innotec SNF 2011-05-26 17:09:42: Beam is Wide Message-ID: I did the chamber coat and also a test wafer run of 1000A of Al each. The beam looks bigger than usual and when you move it towards the front of the pocket it spreads out to be very wide. Rate was a bit erratic, had to use a bit more power. Maurice came by and agreed that it looked wider than usual. He took a picture of the magnet position when I opened up the chamber. From zeyuan at snf.stanford.edu Thu May 26 19:00:05 2011 From: zeyuan at snf.stanford.edu (zeyuan at snf.stanford.edu) Date: Thu, 26 May 2011 19:00:05 -0700 Subject: Comment innotec SNF 2011-05-26 19:00:04: Both beam size and power ok Message-ID: 800A Pt deposition, both beam size and power seem to be ok. From suyog at snf.stanford.edu Thu May 26 23:11:53 2011 From: suyog at snf.stanford.edu (suyog at snf.stanford.edu) Date: Thu, 26 May 2011 23:11:53 -0700 Subject: Comment innotec SNF 2011-05-26 23:11:53: Beam is wide indeed Message-ID: The beam is much wider than usual.. alteast in the lateral direction. From zeyuan at snf.stanford.edu Sun May 29 18:39:27 2011 From: zeyuan at snf.stanford.edu (zeyuan at snf.stanford.edu) Date: Sun, 29 May 2011 18:39:27 -0700 Subject: Comment innotec SNF 2011-05-29 18:39:27: Cryo pump is turned off. Message-ID: Innotec is left vented, cryo pump is turned off. From fanpy at snf.stanford.edu Sun May 29 23:33:13 2011 From: fanpy at snf.stanford.edu (fanpy at snf.stanford.edu) Date: Sun, 29 May 2011 23:33:13 -0700 Subject: Comment innotec SNF 2011-05-29 23:33:13: Al target became hot Message-ID: It seems the Al target does not fit well in crucible #2 and it was really hot after the deposition. From takane at snf.stanford.edu Tue May 31 19:37:59 2011 From: takane at snf.stanford.edu (takane at snf.stanford.edu) Date: Tue, 31 May 2011 19:37:59 -0700 Subject: Comment innotec SNF 2011-05-31 19:37:59: no pt pellets Message-ID: no more pt pellets left From fanpy at snf.stanford.edu Tue May 31 23:26:43 2011 From: fanpy at snf.stanford.edu (fanpy at snf.stanford.edu) Date: Tue, 31 May 2011 23:26:43 -0700 Subject: Comment innotec SNF 2011-05-31 23:26:43: Au dep rate too low? Message-ID: Au dep rate at ~0.8A/s with 11% power