From jweisse at snf.stanford.edu Sun Apr 1 19:59:42 2012 From: jweisse at snf.stanford.edu (jweisse at snf.stanford.edu) Date: Sun, 1 Apr 2012 19:59:42 -0700 Subject: Comment innotec SNF 2012-04-01 19:59:42: No useable Ti source Message-ID: Upon heating the Ti source to 2.3% power it popped out of the crucible and deformed to a shape that no long fits well in the crucible. Sorry for any inconvience. From jperez at snf.stanford.edu Mon Apr 2 10:53:59 2012 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Mon, 2 Apr 2012 10:53:59 -0700 Subject: Comment innotec SNF 2012-04-01 19:59:42: No useable Ti source Message-ID: Replaced Ti starter source. OK to use. When using a new metal starter source will take awhile to break through and be able to evap. This could take as long as 5 to 30 minutes on some metals. From zzp at snf.stanford.edu Wed Apr 4 02:35:28 2012 From: zzp at snf.stanford.edu (zzp at snf.stanford.edu) Date: Wed, 4 Apr 2012 02:35:28 -0700 Subject: Problem innotec SNF 2012-04-04 02:35:27: Pt deposit rate shown 0 at 4.5% power Message-ID: everything else seemed normal From zzp at snf.stanford.edu Wed Apr 4 02:38:50 2012 From: zzp at snf.stanford.edu (zzp at snf.stanford.edu) Date: Wed, 4 Apr 2012 02:38:50 -0700 Subject: Problem innotec SNF 2012-04-04 02:38:49: Pt deposit rate shown 0 at 4.5%power Message-ID: deposition and everthing else seemed normal From jhaydon at snf.stanford.edu Wed Apr 4 09:23:03 2012 From: jhaydon at snf.stanford.edu (jhaydon at snf.stanford.edu) Date: Wed, 4 Apr 2012 09:23:03 -0700 Subject: Shutdown innotec SNF 2012-04-04 09:23:02: regen Message-ID: From jhaydon at snf.stanford.edu Wed Apr 4 11:17:12 2012 From: jhaydon at snf.stanford.edu (jhaydon at snf.stanford.edu) Date: Wed, 4 Apr 2012 11:17:12 -0700 Subject: Shutdown innotec SNF 2012-04-04 09:23:02: regen Message-ID: regen complete ok to use From maxms at snf.stanford.edu Wed Apr 11 08:29:21 2012 From: maxms at snf.stanford.edu (maxms at snf.stanford.edu) Date: Wed, 11 Apr 2012 08:29:21 -0700 Subject: Comment innotec SNF 2012-04-11 08:29:21: Pt evap fine, source in bad condition Message-ID: I did Pt evaporation today. contrary to preivous user, I had great evaporation of .3A/s at only 3%. The target was in terrible condition - not fully melted pellets, large divet, etc., I tried to reshape, so had some spitting, but tried to minimize. next user should give extra attention to shutter to make sure it looks okay, i think it does... From jimkruger at snf.stanford.edu Wed Apr 11 11:09:22 2012 From: jimkruger at snf.stanford.edu (jimkruger at snf.stanford.edu) Date: Wed, 11 Apr 2012 11:09:22 -0700 Subject: Problem innotec SNF 2012-04-11 11:09:22: Ni pellets gone Message-ID: Ni pellets gone From maurice at snf.stanford.edu Wed Apr 11 11:27:08 2012 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Wed, 11 Apr 2012 11:27:08 -0700 Subject: Problem innotec SNF 2012-04-11 11:09:22: Ni pellets gone Message-ID: added 10.18 g Ni to the box From maxms at snf.stanford.edu Thu Apr 12 22:46:38 2012 From: maxms at snf.stanford.edu (maxms at snf.stanford.edu) Date: Thu, 12 Apr 2012 22:46:38 -0700 Subject: Problem innotec SNF 2012-04-12 22:46:38: power outage Message-ID: Power outage for brief second while storm passed. Innotec power suddenly went off then on... not says interlock WSF1 and WSF2 and the water light will not light up out of the 7 LEDs... I cannot vent chamber without finishing my evap, so I will leave them inside until the problem is fixed, then I only have 5nm to evaporate. If this is resolved, please let me know at 650 274 4987. thanks, max From maxms at snf.stanford.edu Thu Apr 12 22:52:09 2012 From: maxms at snf.stanford.edu (maxms at snf.stanford.edu) Date: Thu, 12 Apr 2012 22:52:09 -0700 Subject: Shutdown innotec SNF 2012-04-12 22:52:08: power outage Message-ID: never mind my problem report... i vented and remove my samples, after they suffered their terrible fate (lightning truly can kill after all). I was also told to shut down the machine until the problem is fixed From mtang at snf.stanford.edu Thu Apr 12 22:54:16 2012 From: mtang at snf.stanford.edu (mtang at snf.stanford.edu) Date: Thu, 12 Apr 2012 22:54:16 -0700 Subject: Shutdown innotec SNF 2012-04-12 22:52:08: power outage Message-ID: From maxms at snf.stanford.edu Thu Apr 12 23:10:19 2012 From: maxms at snf.stanford.edu (maxms at snf.stanford.edu) Date: Thu, 12 Apr 2012 23:10:19 -0700 Subject: Shutdown innotec SNF 2012-04-12 23:10:19: Message-ID: From jperez at snf.stanford.edu Fri Apr 13 07:07:54 2012 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Fri, 13 Apr 2012 07:07:54 -0700 Subject: Problem innotec SNF 2012-04-04 02:35:27: Pt deposit rate shown 0 at 4.5% power Message-ID: Wasn't there when Pt was ran, but know that the power can change each day. I added pellets yesterday and didn't see a problem. I didn't do an evaporation, I only melted pellets with power at 2.9%. From jperez at snf.stanford.edu Fri Apr 13 07:08:33 2012 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Fri, 13 Apr 2012 07:08:33 -0700 Subject: Problem innotec SNF 2012-04-04 02:38:49: Pt deposit rate shown 0 at 4.5%power Message-ID: Thanks for the passdown. From jperez at snf.stanford.edu Fri Apr 13 07:09:50 2012 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Fri, 13 Apr 2012 07:09:50 -0700 Subject: Comment innotec SNF 2012-04-11 08:29:21: Pt evap fine, source in bad condition Message-ID: Sometimes pellets roll to the edges or back of the source and you can't drivve wthe ebeam all the back. Yesterday Pt was OK. From maurice at snf.stanford.edu Fri Apr 13 08:23:17 2012 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Fri, 13 Apr 2012 08:23:17 -0700 Subject: Shutdown innotec SNF 2012-04-12 23:10:19: Message-ID: chiller in basement was off From maurice at snf.stanford.edu Fri Apr 13 08:23:59 2012 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Fri, 13 Apr 2012 08:23:59 -0700 Subject: Problem innotec SNF 2012-04-12 22:46:38: power outage Message-ID: turned chiller in basement back on From jasonlin at snf.stanford.edu Sat Apr 14 21:30:27 2012 From: jasonlin at snf.stanford.edu (jasonlin at snf.stanford.edu) Date: Sat, 14 Apr 2012 21:30:27 -0700 Subject: Problem innotec SNF 2012-04-14 21:30:26: No more clean shutters Message-ID: From jperez at snf.stanford.edu Mon Apr 16 07:12:13 2012 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Mon, 16 Apr 2012 07:12:13 -0700 Subject: Problem innotec SNF 2012-04-14 21:30:26: No more clean shutters Message-ID: There are several clean shutters under the table. They don't look as nice as the ones we've sent out in the past, but they are clean. From suyog at snf.stanford.edu Tue Apr 17 18:43:28 2012 From: suyog at snf.stanford.edu (suyog at snf.stanford.edu) Date: Tue, 17 Apr 2012 18:43:28 -0700 Subject: Problem innotec SNF 2012-04-17 18:43:27: Cannot pump down to below 1e-5 Message-ID: System won't pump down to below 1e-5. No significant reduction in pressure after switch from roughing to hi-vac pump. Base pressure remains close to 1e-5 even after 45-50 mins of pumping From maxms at snf.stanford.edu Tue Apr 17 22:11:04 2012 From: maxms at snf.stanford.edu (maxms at snf.stanford.edu) Date: Tue, 17 Apr 2012 22:11:04 -0700 Subject: Shutdown innotec SNF 2012-04-17 22:11:04: pump failure Message-ID: Once it crosses over, the pressure stops dropping. cannot do evap, previous users had some experience, so I'm shutting down since unusable. From aslani at snf.stanford.edu Wed Apr 18 11:21:16 2012 From: aslani at snf.stanford.edu (aslani at snf.stanford.edu) Date: Wed, 18 Apr 2012 11:21:16 -0700 Subject: Comment innotec SNF 2012-04-18 11:21:16: Message-ID: From jhaydon at snf.stanford.edu Wed Apr 18 14:20:59 2012 From: jhaydon at snf.stanford.edu (jhaydon at snf.stanford.edu) Date: Wed, 18 Apr 2012 14:20:59 -0700 Subject: Shutdown innotec SNF 2012-04-17 22:11:04: pump failure Message-ID: leak fixed From jhaydon at snf.stanford.edu Wed Apr 18 14:21:27 2012 From: jhaydon at snf.stanford.edu (jhaydon at snf.stanford.edu) Date: Wed, 18 Apr 2012 14:21:27 -0700 Subject: Comment innotec SNF 2012-04-18 11:21:16: Message-ID: From jhaydon at snf.stanford.edu Wed Apr 18 14:21:41 2012 From: jhaydon at snf.stanford.edu (jhaydon at snf.stanford.edu) Date: Wed, 18 Apr 2012 14:21:41 -0700 Subject: Problem innotec SNF 2012-04-17 18:43:27: Cannot pump down to below 1e-5 Message-ID: leak fixed From jperez at snf.stanford.edu Thu Apr 19 06:38:22 2012 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Thu, 19 Apr 2012 06:38:22 -0700 Subject: Shutdown innotec SNF 2012-04-19 06:38:21: Shield change Message-ID: From jperez at snf.stanford.edu Thu Apr 19 14:29:07 2012 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Thu, 19 Apr 2012 14:29:07 -0700 Subject: Problem innotec SNF 2012-03-06 15:37:40: STATIC SEAL FOR VIEWPORT SHUTTER LOOKS BAD Message-ID: replaced static seal on view port. From jperez at snf.stanford.edu Thu Apr 19 14:29:46 2012 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Thu, 19 Apr 2012 14:29:46 -0700 Subject: Shutdown innotec SNF 2012-04-19 06:38:21: Shield change Message-ID: Finished shield change. will test and coat. From jperez at snf.stanford.edu Thu Apr 19 14:34:45 2012 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Thu, 19 Apr 2012 14:34:45 -0700 Subject: Problem innotec SNF 2012-04-19 14:34:44: Will not finish test. Message-ID: You can use Innotec at your own risk! From jperez at snf.stanford.edu Fri Apr 20 14:16:38 2012 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Fri, 20 Apr 2012 14:16:38 -0700 Subject: Comment innotec SNF 2012-04-20 14:16:37: Alum Program Message-ID: I test Innotec with the Aluminum program, metal is shiney. Uniformity isn't great. This does not mean all programs have a problem. Once parts are changed out I will see worse uniformity or' better uniformity. I want to make it better, so I am working on it. So if you feel uncomfortable, ran a test. From apal at snf.stanford.edu Wed Apr 25 03:16:04 2012 From: apal at snf.stanford.edu (apal at snf.stanford.edu) Date: Wed, 25 Apr 2012 03:16:04 -0700 Subject: Comment innotec SNF 2012-04-25 03:16:03: Pumpdown Message-ID: Pumpdown too slow -- taking more than an hour From jperez at snf.stanford.edu Wed Apr 25 08:35:33 2012 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Wed, 25 Apr 2012 08:35:33 -0700 Subject: Comment innotec SNF 2012-04-25 03:16:03: Pumpdown Message-ID: Cleaned Oring, vacuumed. Jim checked moving parts to see if they were causing the long pump downs. Saw some improvements. From jperez at snf.stanford.edu Wed Apr 25 08:37:59 2012 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Wed, 25 Apr 2012 08:37:59 -0700 Subject: Comment innotec SNF 2012-04-20 14:16:37: Alum Program Message-ID: Test show a 10% uniformity problem. Not sure what is the main cause after shield change. Reads are normal. I'll try a slower dep. next tiem to see if or how much it will improve. From jperez at snf.stanford.edu Wed Apr 25 08:39:02 2012 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Wed, 25 Apr 2012 08:39:02 -0700 Subject: Problem innotec SNF 2012-04-19 14:34:44: Will not finish test. Message-ID: Tests are complete (2), showing a 10 % range across the wafer. From jperez at snf.stanford.edu Wed Apr 25 11:34:25 2012 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Wed, 25 Apr 2012 11:34:25 -0700 Subject: Problem innotec SNF 2012-04-25 11:34:25: Still taking one hour + to pump down Message-ID: From clee58 at snf.stanford.edu Thu Apr 26 03:21:01 2012 From: clee58 at snf.stanford.edu (clee58 at snf.stanford.edu) Date: Thu, 26 Apr 2012 03:21:01 -0700 Subject: Problem innotec SNF 2012-04-26 03:21:00: Cr has been contaminated Message-ID: When finished the deposition, small hole was found in the middle of the Cr source. From jhaydon at snf.stanford.edu Fri Apr 27 12:04:04 2012 From: jhaydon at snf.stanford.edu (jhaydon at snf.stanford.edu) Date: Fri, 27 Apr 2012 12:04:04 -0700 Subject: Problem innotec SNF 2012-04-27 12:04:03: pump down has improved but not as much as I had hoped for Message-ID: