From jhaydon at snf.stanford.edu Fri Jul 6 07:20:24 2012 From: jhaydon at snf.stanford.edu (jhaydon at snf.stanford.edu) Date: Fri, 6 Jul 2012 07:20:24 -0700 Subject: Comment innotec SNF 2012-06-25 09:20:20: Cryo update Message-ID: From jhaydon at snf.stanford.edu Fri Jul 6 07:21:19 2012 From: jhaydon at snf.stanford.edu (jhaydon at snf.stanford.edu) Date: Fri, 6 Jul 2012 07:21:19 -0700 Subject: Comment innotec SNF 2012-07-06 07:21:19: cryo update Message-ID: Cryo pump is due to arrive Monday the9th From jparker at snf.stanford.edu Mon Jul 9 15:14:07 2012 From: jparker at snf.stanford.edu (jparker at snf.stanford.edu) Date: Mon, 9 Jul 2012 15:14:07 -0700 Subject: Problem innotec SNF 2012-07-09 15:14:06: One dummy clamp broken Message-ID: The screw to hold the backside clamp of 1 dummy broke during angle mount apparatus loading. It's marked with tape (and the dummy is held with tape) so it shouldn't affect processing unless you need to fill the whole planetary. From jhaydon at snf.stanford.edu Tue Jul 10 07:40:47 2012 From: jhaydon at snf.stanford.edu (jhaydon at snf.stanford.edu) Date: Tue, 10 Jul 2012 07:40:47 -0700 Subject: Shutdown innotec SNF 2012-07-10 07:40:46: cryo pump change Message-ID: From jhaydon at snf.stanford.edu Wed Jul 11 17:49:18 2012 From: jhaydon at snf.stanford.edu (jhaydon at snf.stanford.edu) Date: Wed, 11 Jul 2012 17:49:18 -0700 Subject: Shutdown innotec SNF 2012-07-10 07:40:46: cryo pump change Message-ID: New pump no real change in pump down. I will still look for other possiblities but this may be the correct pressure reading and the old one may not have been correct. From jperez at snf.stanford.edu Thu Jul 12 07:08:26 2012 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Thu, 12 Jul 2012 07:08:26 -0700 Subject: Comment innotec SNF 2012-07-06 07:21:19: cryo update Message-ID: New cryo pump installed. From jperez at snf.stanford.edu Thu Jul 12 11:01:27 2012 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Thu, 12 Jul 2012 11:01:27 -0700 Subject: Problem innotec SNF 2012-04-25 11:34:25: Still taking one hour + to pump down Message-ID: new pump install, not seeing much if any improverment From jperez at snf.stanford.edu Thu Jul 12 11:02:09 2012 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Thu, 12 Jul 2012 11:02:09 -0700 Subject: Problem innotec SNF 2012-04-27 12:04:03: pump down has improved but not as much as I had hoped for Message-ID: New Cryo pump From jperez at snf.stanford.edu Thu Jul 12 11:03:11 2012 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Thu, 12 Jul 2012 11:03:11 -0700 Subject: Comment innotec SNF 2012-05-21 22:00:53: pump time update. Message-ID: New cryo pump. this message for old cryo pump. From jperez at snf.stanford.edu Thu Jul 12 11:04:20 2012 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Thu, 12 Jul 2012 11:04:20 -0700 Subject: Comment innotec SNF 2012-07-12 11:04:19: Taking 2 hours + to reach 5X10-7 Message-ID: From jparker at snf.stanford.edu Tue Jul 17 19:16:31 2012 From: jparker at snf.stanford.edu (jparker at snf.stanford.edu) Date: Tue, 17 Jul 2012 19:16:31 -0700 Subject: Comment innotec SNF 2012-07-17 19:16:30: "power down" button flaky Message-ID: About every other press of the power down button on the remote doesn't register. It'll work, but wanted to report it in case it's a symptom of the remote starting to go bad. From kyunglok at snf.stanford.edu Sat Jul 21 07:57:00 2012 From: kyunglok at snf.stanford.edu (kyunglok at snf.stanford.edu) Date: Sat, 21 Jul 2012 07:57:00 -0700 Subject: Comment innotec SNF 2012-07-21 07:57:00: Shutter exchange and Au source Message-ID: A shutter had a hole whose diameter is about 8mm. So new shutter is replaced with the old one. Au source seemed to be used off-center. I'll try to make it planar with pellets before the deposition. From jperez at snf.stanford.edu Tue Jul 24 09:55:48 2012 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Tue, 24 Jul 2012 09:55:48 -0700 Subject: Comment innotec SNF 2012-07-21 07:57:00: Shutter exchange and Au source Message-ID: Shutter replaced, need to know who put the hole on top of shutter with e-beam. From jperez at snf.stanford.edu Tue Jul 24 09:56:15 2012 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Tue, 24 Jul 2012 09:56:15 -0700 Subject: Comment innotec SNF 2012-07-17 19:16:30: "power down" button flaky Message-ID: Replacred remote. From yiwu at snf.stanford.edu Tue Jul 24 20:00:55 2012 From: yiwu at snf.stanford.edu (yiwu at snf.stanford.edu) Date: Tue, 24 Jul 2012 20:00:55 -0700 Subject: Comment innotec SNF 2012-07-24 20:00:54: polarized window blurry Message-ID: the polaried window somewhat blurry. When ramping up the power, couldn't see the entire cruicible but only the upper half. From jhaydon at snf.stanford.edu Thu Jul 26 06:51:37 2012 From: jhaydon at snf.stanford.edu (jhaydon at snf.stanford.edu) Date: Thu, 26 Jul 2012 06:51:37 -0700 Subject: Shutdown innotec SNF 2012-07-26 06:51:36: shield change Message-ID: From jperez at snf.stanford.edu Fri Jul 27 09:42:07 2012 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Fri, 27 Jul 2012 09:42:07 -0700 Subject: Shutdown innotec SNF 2012-07-26 06:51:36: shield change Message-ID: PM along with shield change complete. Ready for coat and test. From jperez at snf.stanford.edu Fri Jul 27 11:50:36 2012 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Fri, 27 Jul 2012 11:50:36 -0700 Subject: Comment innotec SNF 2012-07-24 20:00:54: polarized window blurry Message-ID: Ran Innotec a few times with no difficult seeing source. From jperez at snf.stanford.edu Fri Jul 27 11:51:33 2012 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Fri, 27 Jul 2012 11:51:33 -0700 Subject: Comment innotec SNF 2012-07-12 11:04:19: Taking 2 hours + to reach 5X10-7 Message-ID: Ran twp depositions and both times matched to the minute one hour and twelve minutes. From jperez at snf.stanford.edu Fri Jul 27 11:52:44 2012 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Fri, 27 Jul 2012 11:52:44 -0700 Subject: Problem innotec SNF 2012-07-09 15:14:06: One dummy clamp broken Message-ID: Replaced planetary, but it also has one scew broken off. Don't use this slot . From jperez at snf.stanford.edu Fri Jul 27 11:54:24 2012 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Fri, 27 Jul 2012 11:54:24 -0700 Subject: Problem innotec SNF 2012-07-27 11:54:24: The ATM light is taking longer to go off when pumping down. Message-ID: It took 16 and 20 seconds for the ATM light to go off. From jperez at snf.stanford.edu Fri Jul 27 11:58:27 2012 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Fri, 27 Jul 2012 11:58:27 -0700 Subject: Comment innotec SNF 2012-07-27 11:58:27: After shield change it's taking 1.25 hours to pump down to standard base pressure. Message-ID: From jperez at snf.stanford.edu Fri Jul 27 14:56:29 2012 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Fri, 27 Jul 2012 14:56:29 -0700 Subject: Comment innotec SNF 2012-07-27 14:56:28: Test results thicker Message-ID: Do to different parts being used during each shield change the thick- ness and uniformity will change. Innotec is using the newest planetary and I can't control speed. My target was a 1000A on the display and I can get +-/-200 to 300A more than the display. this is normal. I could try changing my program, but I don't want to change other Users using the Alum recipe/ program. The Uniformity across the wafer was 77A, the avg. thickness 1298A. Consider Innotec UP.