From suyog at snf.stanford.edu Sat Jun 2 21:11:41 2012 From: suyog at snf.stanford.edu (suyog at snf.stanford.edu) Date: Sat, 2 Jun 2012 21:11:41 -0700 Subject: Comment innotec SNF 2012-06-02 21:11:41: Need Ti pellets Message-ID: Only 3-4 remain as on 6/2/2012 From jperez at snf.stanford.edu Mon Jun 4 07:17:35 2012 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Mon, 4 Jun 2012 07:17:35 -0700 Subject: Comment innotec SNF 2012-05-30 15:53:37: broke wafer in chamber Message-ID: Cleaned up broken wafers From jperez at snf.stanford.edu Tue Jun 5 07:23:22 2012 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Tue, 5 Jun 2012 07:23:22 -0700 Subject: Comment innotec SNF 2012-06-02 21:11:41: Need Ti pellets Message-ID: ADDED Ti pellets to the baggy From jperez at snf.stanford.edu Tue Jun 5 07:24:02 2012 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Tue, 5 Jun 2012 07:24:02 -0700 Subject: Comment innotec SNF 2012-05-30 00:06:14: Tin Message-ID: Waiting for a quote from vendor From kyunglok at snf.stanford.edu Sat Jun 9 14:19:52 2012 From: kyunglok at snf.stanford.edu (kyunglok at snf.stanford.edu) Date: Sat, 9 Jun 2012 14:19:52 -0700 Subject: Comment innotec SNF 2012-06-09 14:19:52: Al source has some bumps Message-ID: A pellet will be used. From jperez at snf.stanford.edu Mon Jun 11 07:06:04 2012 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Mon, 11 Jun 2012 07:06:04 -0700 Subject: Comment innotec SNF 2012-06-09 14:19:52: Al source has some bumps Message-ID: Thanks From jperez at snf.stanford.edu Mon Jun 11 10:03:46 2012 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Mon, 11 Jun 2012 10:03:46 -0700 Subject: Problem innotec SNF 2012-05-21 15:29:27: Doing a Alum coat after shield change Message-ID: No improvement with pumpdown time From jasonlin at snf.stanford.edu Wed Jun 13 05:42:06 2012 From: jasonlin at snf.stanford.edu (jasonlin at snf.stanford.edu) Date: Wed, 13 Jun 2012 05:42:06 -0700 Subject: Problem innotec SNF 2012-06-13 05:42:05: Ti container broke Message-ID: I accidentally broke the Ti container, but the source and pellets are safe. Needs a new container. From lianglia at snf.stanford.edu Wed Jun 13 11:45:34 2012 From: lianglia at snf.stanford.edu (lianglia at snf.stanford.edu) Date: Wed, 13 Jun 2012 11:45:34 -0700 Subject: Problem innotec SNF 2012-06-13 11:45:33: pump down to 5e-7 need 1h 45min Message-ID: But I saw many people booked only 2 hours, which means they will finished all other procedures within 15min. Is this usual? Thanks! From jperez at snf.stanford.edu Thu Jun 14 13:08:44 2012 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Thu, 14 Jun 2012 13:08:44 -0700 Subject: Comment innotec SNF 2012-05-30 00:05:42: Need more Tin pallets Message-ID: Tin pellets are in the Lab. From jperez at snf.stanford.edu Thu Jun 14 14:51:58 2012 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Thu, 14 Jun 2012 14:51:58 -0700 Subject: Problem innotec SNF 2012-06-13 05:42:05: Ti container broke Message-ID: Replace broke glass jar with plastic jar. From kyunglok at snf.stanford.edu Sat Jun 16 05:21:38 2012 From: kyunglok at snf.stanford.edu (kyunglok at snf.stanford.edu) Date: Sat, 16 Jun 2012 05:21:38 -0700 Subject: Comment innotec SNF 2012-06-16 05:21:37: Gold source is almost punched through. Message-ID: I will try to fill it up using a pellet. From cave at snf.stanford.edu Sun Jun 17 13:48:49 2012 From: cave at snf.stanford.edu (cave at snf.stanford.edu) Date: Sun, 17 Jun 2012 13:48:49 -0700 Subject: Problem innotec SNF 2012-06-17 13:48:47: pump down Message-ID: The system does not pump down but gives an error stating "Process aborted cover off". I lifted the cover up and back down but the error remained. From cbaxter at snf.stanford.edu Sun Jun 17 16:53:58 2012 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Sun, 17 Jun 2012 16:53:58 -0700 Subject: Problem innotec SNF 2012-06-17 13:48:47: pump down Message-ID: Found front door was opened. From jperez at snf.stanford.edu Mon Jun 18 10:34:32 2012 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Mon, 18 Jun 2012 10:34:32 -0700 Subject: Comment innotec SNF 2012-06-16 05:21:37: Gold source is almost punched through. Message-ID: looks OK now. From munekazu at snf.stanford.edu Wed Jun 20 08:26:13 2012 From: munekazu at snf.stanford.edu (munekazu at snf.stanford.edu) Date: Wed, 20 Jun 2012 08:26:13 -0700 Subject: Problem innotec SNF 2012-06-20 08:26:12: Unstable deposition rate Message-ID: I was depositing Au with a rate of around 1 angstrom per sec. However, it suddently went up hugely, and then, the crystal health instantly dropped down to 75%. It was 86% till that moment. Moreover, the total thickness jumped to more than 600 nm even though it was close to 30 nm till then. But, eventually, the actual weight decreased as much as I deposit 30-50 nm of Au. So, there is something weird. One more thing, the deposition rate was slightly fluctuating before it went up suddenly. Thanks, -Mune From maxms at snf.stanford.edu Thu Jun 21 21:07:55 2012 From: maxms at snf.stanford.edu (maxms at snf.stanford.edu) Date: Thu, 21 Jun 2012 21:07:55 -0700 Subject: Problem innotec SNF 2012-06-21 21:07:54: out of gold pellets Message-ID: From jperez at snf.stanford.edu Fri Jun 22 14:30:17 2012 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Fri, 22 Jun 2012 14:30:17 -0700 Subject: Problem innotec SNF 2012-06-21 21:07:54: out of gold pellets Message-ID: replenished Au pellets in baggy. From jimkruger at snf.stanford.edu Fri Jun 22 18:00:57 2012 From: jimkruger at snf.stanford.edu (jimkruger at snf.stanford.edu) Date: Fri, 22 Jun 2012 18:00:57 -0700 Subject: Problem innotec SNF 2012-06-22 18:00:57: Al souce stuck in Innotec Message-ID: Sorry. Hopefully you can still use Innotec, even Al, over the weekend. From mzhang2 at snf.stanford.edu Fri Jun 22 19:30:58 2012 From: mzhang2 at snf.stanford.edu (mzhang2 at snf.stanford.edu) Date: Fri, 22 Jun 2012 19:30:58 -0700 Subject: Problem innotec SNF 2012-06-22 19:30:57: two problems Message-ID: 1. former user left Al in C2 and it's hard to remove it. since I want to use the system immediately, Al source is left in the chamber temperorily 2. when lowering the bell jar, a huge noise is heard, not sure about the source From yuxinz at snf.stanford.edu Sat Jun 23 23:36:07 2012 From: yuxinz at snf.stanford.edu (yuxinz at snf.stanford.edu) Date: Sat, 23 Jun 2012 23:36:07 -0700 Subject: Problem innotec SNF 2012-06-23 23:36:07: Cu starter not in good shape Message-ID: From kyunglok at snf.stanford.edu Sun Jun 24 15:09:43 2012 From: kyunglok at snf.stanford.edu (kyunglok at snf.stanford.edu) Date: Sun, 24 Jun 2012 15:09:43 -0700 Subject: Problem innotec SNF 2012-06-24 15:09:42: Found that Al source was stuck to the crucible C2 Message-ID: After enabling the machine, I check the crucible C2 in order to deposit Al flim on my wafers. And I just realized that Al source was stuck to the crucible. Some users who might have used the Al source did not clean his/her mess. Al source looks very ugly and might be hard to be pulled from the crucible. I will open my session since I plan to deposit 500nm Al and it might be dangerous if I go with this bad Al source. I have sent a photo about this. From jperez at snf.stanford.edu Mon Jun 25 07:42:22 2012 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Mon, 25 Jun 2012 07:42:22 -0700 Subject: Problem innotec SNF 2012-06-20 08:26:12: Unstable deposition rate Message-ID: Because you have to be there and I wasn't, I am assumming that The source was not flat in the crucible or you were depositing on pellets. From mtang at snf.stanford.edu Mon Jun 25 09:20:21 2012 From: mtang at snf.stanford.edu (mtang at snf.stanford.edu) Date: Mon, 25 Jun 2012 09:20:21 -0700 Subject: Comment innotec SNF 2012-06-25 09:20:20: Cryo update Message-ID: Last update - likely to arrive Friday. From jperez at snf.stanford.edu Mon Jun 25 11:46:08 2012 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Mon, 25 Jun 2012 11:46:08 -0700 Subject: Problem innotec SNF 2012-06-24 15:09:42: Found that Al source was stuck to the crucible C2 Message-ID: Replaced the Alum source. From jperez at snf.stanford.edu Mon Jun 25 11:47:53 2012 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Mon, 25 Jun 2012 11:47:53 -0700 Subject: Problem innotec SNF 2012-06-23 23:36:07: Cu starter not in good shape Message-ID: It shows that the crucible pocket wasn't cleaned out before inserting metals. Replaced Copper source. From jperez at snf.stanford.edu Mon Jun 25 11:52:11 2012 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Mon, 25 Jun 2012 11:52:11 -0700 Subject: Problem innotec SNF 2012-06-22 19:30:57: two problems Message-ID: Used Innotec and didn't here any noise when raising or lowering bell jar. Becareful because if the bell jar is moved out of position it sometimes can get stuck on the guide (rightside). The Alum source has been removed. From jperez at snf.stanford.edu Mon Jun 25 11:53:26 2012 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Mon, 25 Jun 2012 11:53:26 -0700 Subject: Problem innotec SNF 2012-06-13 11:45:33: pump down to 5e-7 need 1h 45min Message-ID: Someone isn't following all the rules. From jperez at snf.stanford.edu Mon Jun 25 11:54:16 2012 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Mon, 25 Jun 2012 11:54:16 -0700 Subject: Comment innotec SNF 2012-05-21 18:00:08: Pumpdown time longer than 2hrs Message-ID: This is about right. From jperez at snf.stanford.edu Thu Jun 28 06:58:43 2012 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Thu, 28 Jun 2012 06:58:43 -0700 Subject: Problem innotec SNF 2012-06-22 18:00:57: Al souce stuck in Innotec Message-ID: Al source removed and replaced