Problem innotec SNF 2012-06-20 08:26:12: Unstable deposition rate

munekazu at snf.stanford.edu munekazu at snf.stanford.edu
Wed Jun 20 08:26:13 PDT 2012


I was depositing Au with a rate of around 1 angstrom per sec.  However, it suddently went up hugely, and then, the crystal health instantly dropped down to 75%.  It was 86% till that moment.  Moreover, the total thickness jumped to more than 600 nm even though it was close to 30 nm till then.
But, eventually, the actual weight decreased as much as I deposit 30-50 nm of Au.  So, there is something weird.
One more thing, the deposition rate was slightly fluctuating before it went up suddenly.
Thanks,
-Mune




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