From yiwu at snf.stanford.edu Wed May 2 21:17:16 2012 From: yiwu at snf.stanford.edu (yiwu at snf.stanford.edu) Date: Wed, 2 May 2012 21:17:16 -0700 Subject: Comment innotec SNF 2012-05-02 21:17:15: Pd pellets ran out Message-ID: I used the last one. From jperez at snf.stanford.edu Thu May 3 15:21:59 2012 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Thu, 3 May 2012 15:21:59 -0700 Subject: Comment innotec SNF 2012-05-02 21:17:15: Pd pellets ran out Message-ID: refilled baggy with Pd pellets From jperez at snf.stanford.edu Thu May 3 15:23:23 2012 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Thu, 3 May 2012 15:23:23 -0700 Subject: Problem innotec SNF 2012-04-26 03:21:00: Cr has been contaminated Message-ID: Replace Cr starter source and refilled baggy pellets. From jasonlin at snf.stanford.edu Mon May 7 00:28:37 2012 From: jasonlin at snf.stanford.edu (jasonlin at snf.stanford.edu) Date: Mon, 7 May 2012 00:28:37 -0700 Subject: Problem innotec SNF 2012-05-07 00:28:37: No Planetary Rotation Message-ID: Before pumpdown, planetary rotated fine. After pumpdown, no rotation. From alsune at snf.stanford.edu Mon May 7 00:59:58 2012 From: alsune at snf.stanford.edu (alsune at snf.stanford.edu) Date: Mon, 7 May 2012 00:59:58 -0700 Subject: Problem innotec SNF 2012-05-07 00:59:58: Planetary not rotating Message-ID: Planetary not rotating when toggled to on state From jhaydon at snf.stanford.edu Mon May 7 08:21:13 2012 From: jhaydon at snf.stanford.edu (jhaydon at snf.stanford.edu) Date: Mon, 7 May 2012 08:21:13 -0700 Subject: Problem innotec SNF 2012-05-07 00:59:58: Planetary not rotating Message-ID: rotation fixed From jhaydon at snf.stanford.edu Mon May 7 08:21:37 2012 From: jhaydon at snf.stanford.edu (jhaydon at snf.stanford.edu) Date: Mon, 7 May 2012 08:21:37 -0700 Subject: Problem innotec SNF 2012-05-07 00:28:37: No Planetary Rotation Message-ID: rotation fixed pin dropped out From jhaydon at snf.stanford.edu Sun May 20 15:43:19 2012 From: jhaydon at snf.stanford.edu (jhaydon at snf.stanford.edu) Date: Sun, 20 May 2012 15:43:19 -0700 Subject: Shutdown innotec SNF 2012-05-20 15:43:19: shields out Message-ID: i will reinstall the shields in the morning From jperez at snf.stanford.edu Mon May 21 15:27:16 2012 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Mon, 21 May 2012 15:27:16 -0700 Subject: Shutdown innotec SNF 2012-05-20 15:43:19: shields out Message-ID: Jim replace some of the shields and checked to see if a possible leak. He could find any leaks. From jperez at snf.stanford.edu Mon May 21 15:29:28 2012 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Mon, 21 May 2012 15:29:28 -0700 Subject: Problem innotec SNF 2012-05-21 15:29:27: Doing a Alum coat after shield change Message-ID: OK to use if you wish to take the risk. I've not done a test run yet! Not sure if there is any improvement on pump down time. From haiwei at snf.stanford.edu Mon May 21 22:00:54 2012 From: haiwei at snf.stanford.edu (haiwei at snf.stanford.edu) Date: Mon, 21 May 2012 22:00:54 -0700 Subject: Comment innotec SNF 2012-05-21 22:00:53: pump time update. Message-ID: Just saw the pressure went down to 3.5e-7 with 1 hour 50 minutes pumping time. The tool should be okay. It just takes longer. From apal at snf.stanford.edu Fri May 25 02:17:55 2012 From: apal at snf.stanford.edu (apal at snf.stanford.edu) Date: Fri, 25 May 2012 02:17:55 -0700 Subject: Problem innotec SNF 2012-05-25 02:17:53: Problems Message-ID: 1. Shutter is in bad condition, but no new shutter 2. Silicon deposition rate suddenly increased after closing the shutter From yhngchen at snf.stanford.edu Wed May 30 00:05:43 2012 From: yhngchen at snf.stanford.edu (yhngchen at snf.stanford.edu) Date: Wed, 30 May 2012 00:05:43 -0700 Subject: Comment innotec SNF 2012-05-30 00:05:42: Need more Tin pallets Message-ID: From yhngchen at snf.stanford.edu Wed May 30 00:06:15 2012 From: yhngchen at snf.stanford.edu (yhngchen at snf.stanford.edu) Date: Wed, 30 May 2012 00:06:15 -0700 Subject: Comment innotec SNF 2012-05-30 00:06:14: Tin Message-ID: Need more tin pallets From joem at snf.stanford.edu Wed May 30 15:53:38 2012 From: joem at snf.stanford.edu (joem at snf.stanford.edu) Date: Wed, 30 May 2012 15:53:38 -0700 Subject: Comment innotec SNF 2012-05-30 15:53:37: broke wafer in chamber Message-ID: Pieces were removed and chamber vacuum'd. Joe From jperez at snf.stanford.edu Thu May 31 07:02:39 2012 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Thu, 31 May 2012 07:02:39 -0700 Subject: Problem innotec SNF 2012-05-25 02:17:53: Problems Message-ID: added clean shutters on Tuesday