Comment innotec SNF 2012-10-01 19:39:26: Al source has a deep trench

kyunglok at snf.stanford.edu kyunglok at snf.stanford.edu
Fri Jan 11 13:06:37 PST 2013


After 1um thick Al deposition, the source has a deep trench. A lot of pellets are necessary to fill it up. 



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