From hwi at sunray.snffab.stanford.edu Wed Jun 14 13:41:09 2000 From: hwi at sunray.snffab.stanford.edu (Wonill Ha) Date: Wed, 14 Jun 2000 13:41:09 -0700 (PDT) Subject: cryo regen Message-ID: Hi all, I checked the cryo. temp. reading 15K. I reserved the machine on this Friday to regen. Please let me know if you have any objection. Wonill From flannery at leland.Stanford.EDU Tue Jun 27 16:29:39 2000 From: flannery at leland.Stanford.EDU (Anthony Flannery) Date: Tue, 27 Jun 2000 16:29:39 -0700 Subject: Heads up Message-ID: <395938E3.E51A93EB@leland.stanford.edu> Innotec Users: I just wanted to send an e-mail out to the users for a heads up on the Innotec. Sometime in the next few weeks I will be re-installing the ion gun in the Innotec. Chris Storment and I had good results using it to reduce the tensile stress in deposited metals to roughly a quarter of what they would have otherwise been, and I need to use it to deposit some thicker films of Pt and/or Ir. For those who don't know, the ion gun shoots Argon ions at the wafers during the deposition. The energy of the ions is such that they provide some energy for surface rearrangment and can reduce several fold the tensile stress typical in evaporated metals. 1. If you have any critical runs and want to get them done before I install the gun, let me know. 2. The tooling factor will change. I will do a dep and let people know what it is. If you have a critical thickness run, though, you may want to either get it in ahead of the installation or double-check the tooling factor afterwards. 3. If you want to use it, you will have to be trained. I'd also be interested in whether or not most people want me to leave it in or take it out when I am done. It is a useful tool, particularly for metals like Cr, Pt, and Ir. The downside is that it shadows the wafers, reducing the dep rate by somewhere around 20%. It also has to be maintained to continue to function properly which means changing the filament occasionally and keeping it wrapped properly. It does not have to be used during the dep and can just be left off. Let me know what your thoughts are. This won't be happening for until well into July, but I thought I would give everyone an advance warning. I will send out another e-mail as the date gets closer. Thanks, Tony Flannery