From flannery at leland.Stanford.EDU Mon Oct 9 05:01:26 2000 From: flannery at leland.Stanford.EDU (Anthony Flannery) Date: Mon, 09 Oct 2000 05:01:26 -0700 Subject: Ion Gun in Place Message-ID: <39E1B396.23845163@leland.stanford.edu> As foretold in previous e-mails, the ion gun is now in place in the Innotec. I will only have it in place for a week to 10 days. If you use the Innotec please observe the following: 1. Dep rates will be reduced by about 20%. Because it will only be in a week, I will not change the tooling factors. Re-calculate manually. If you require precise thicknesses, you should do a calibration run. (You should do that anyway because the shown thickness of the crystal is not accurate.) 2. Do not activate the ion gun. Improper usage could destroy it. 3. If you must rewrap the foil, include the gun. 4. Do not remove the gun. The gas connection is delicate and is not meant for repeated removal. Also, moving the gun under the shield is inadviseable because the electrical connections do not fit well under the shield and could cause a short if they shift. 5. Don't touch the knobs of the controller. Setting it up is tricky and requires a bit of work. Any questions, let me know. Tony Flannery From king at snf.stanford.edu Mon Oct 9 16:32:36 2000 From: king at snf.stanford.edu (Robin King) Date: Mon, 9 Oct 2000 16:32:36 -0700 (PDT) Subject: Ion Gun in Place In-Reply-To: <39E1B396.23845163@leland.stanford.edu> Message-ID: A followup reminder for all Innotec users: 1. Record every run in the logbook, noting any unusual circumstances. 2. Include with every run a shadowmask sample for Dektak step height measurement. This includes runs for which multiple layers are deposited and the step height result is the sum of all materials. 3. Measure the shadowmasked thickness_immediately_, while you are monitoring the pumpdown. 4. Record the results in the logbook in TWO places: a. On the run sheet page. b. On the dep rate page (in the front of the logbook) for easy reference. *** Be sure to note whether the ion gun was installed and/or used. The above steps take no additional process time and are easy for everyone to do. Resistivity, stress, and other results should also be recorded when they are available. Thanks for doing your part, Robin King From flannery at leland.Stanford.EDU Mon Oct 30 20:09:58 2000 From: flannery at leland.Stanford.EDU (Anthony Flannery) Date: Mon, 30 Oct 2000 20:09:58 -0800 Subject: Warnings on Innotec Message-ID: <39FE4616.B103B4DF@leland.stanford.edu> Planetary - Visually verify that the planetary is turning. ---------------------------------------------- Twice now the planetary has seized on me when the chamber has been pumped down. When I vent and open the chamber, I am not able to reproduce the problem. Both the ferrofluidic drive and the planetary appear to turn with no problem independently. My guess is that it is being caused by a misalignment when the jar is lowered. I have not been able to recover from this without venting. Once this happens, the controller drive controller must be reset. You can find me, Robin, or Chris Storment to do this. VCS Controller ------------ Today the controller locked up on me for no apparent reason. (This is the gray screen master controller with the toggle buttons). I was unable to get any reasponse from any key. Maybe it was a fluke, maybe not.