From twt at stanford.edu  Wed Apr 18 14:11:32 2001
From: twt at stanford.edu (Tom)
Date: Wed, 18 Apr 2001 14:11:32 -0700 (PDT)
Subject: reservation cancel
Message-ID: <Pine.GSO.4.31.0104181410410.4742-100000@epic12.Stanford.EDU>


I have cancelled my reservation from 10 pm tonight to 12 noon tomorrow.

Tom



From flannery at leland.stanford.edu  Sat Apr 21 08:52:40 2001
From: flannery at leland.stanford.edu (Anthony Flannery)
Date: Sat, 21 Apr 2001 08:52:40 -0700
Subject: Innotec Status Update/Problems/Reservation
Message-ID: <3AE1ACC8.FA2075E1@leland.stanford.edu>

Hi All,

Jim, Chris Storment and I swapped out the shields on Friday. Jim did a
lot of work to remove the flakes from the edge of the shields so the
machine looks cleaner than it has in a long time.

The dummy wafers have all been replaced and are currently loaded.

The ion gun is still in place. I will be using it once more.

When I went to do the Al pre-dep, the chiller would not turn on even
after filling with DI water, and kept tripping its circuit breaker when
I reset it. System is currently shutdown.

I put another shutdown on the system for the Al pre-dep. Because this is
so important (it's the only way the shields can be chemically cleaned), 
I wanted to make sure no user enabled the system until it had been done.
Either a staff member will have to enable over the shutdown to do the
pre-dep, or they should verify (with a blood oath) that the first user
who uses the machine after the chiller is fixed will do the pre-dep
before removing the shutdown.

My motivation for doing all this was my need for a long 3-day deposition
in a very clean chamber. Since I loose this weekend, I will be doing it
next weekend (assuming the chiller is up). I have begun reserving out as
far as I can, and will continue to do so from Friday morning at 8:00 AM
through Tuesday morning at 9:00 AM, but since I am limited to a week in
advance I won't be able to complete the reservation until Tuesday.
Should some enterprising user nab a time slot over that period, it will
avail him or her not. Once my wafers are loaded only an act of Congress
or God will budge them from their planetary fixtures. (Can you tell it's
been a long night?)

Tony


From jhaydon at snf.stanford.edu  Mon Apr 23 17:32:20 2001
From: jhaydon at snf.stanford.edu (jhaydon)
Date: Mon, 23 Apr 2001 17:32:20 -0700
Subject: Chiller
Message-ID: <3AE4C994.A7707BC9@snf.stanford.edu>

To whom it may concern:

The Innotec is currently not working because the chiller seems to gave a
burnt out compressor. At this time I do not know when it will be
functional. I hope to find this out some time tomorrow and will post
when I do.

Jim



From jhaydon at snf.stanford.edu  Wed Apr 25 10:56:57 2001
From: jhaydon at snf.stanford.edu (jhaydon)
Date: Wed, 25 Apr 2001 10:56:57 -0700
Subject: Chiller
Message-ID: <3AE70FE9.654ADF29@snf.stanford.edu>


To all

Neslab called a few  minutes ago to let me know that they will be here
tomorrow and it should be operational by Friday, assuming there are no
other problems.

Jim



From jhaydon at snf.stanford.edu  Fri Apr 27 11:33:01 2001
From: jhaydon at snf.stanford.edu (jhaydon)
Date: Fri, 27 Apr 2001 11:33:01 -0700
Subject: Chiller
Message-ID: <3AE9BB5D.A32F7FCB@snf.stanford.edu>


To all:


The chiller is now working and the Innotec should be usable. However the
chamber still needs to have an aluminum  pre-dep before using so check
the logt o see if it has been done. because the pole extenders have been
changed it will be necessary to verify beam position and shape.


Jim