From flannery at stanford.edu Fri Feb 2 18:45:09 2001 From: flannery at stanford.edu (Anthony Flannery) Date: Fri, 02 Feb 2001 18:45:09 -0800 Subject: Problems Message-ID: <3A7B70B5.85A5FB52@stanford.edu> Most users should be interested in the following: Cr Target: The most recent looking Cr target from Plasmaterials is not Cr. I know this because a. it etches in sulfuric peroxide b. it has a reflowed, melted surface (Cr sublimates). I did an etch test in conc. HF, and it did not etch. Not Ti. Best guess to date is that it is Ni-Cr. A magnet would help screen for this. Either way, this cost me 2-3 months of work. You should be aware of this if you've used it. Au Target: A user in the last week got over-zealous and boiled the heck out of the gold target. There are very large gold spatters all over the chamber and on the dummies. It melted holes in the foil wrapping. It might be helpful to establish upper limits on various metals for power and dep rate. Au for instance, should go down at less than 3 A/sec. Shutter on backwards: The last person to assemble the shutter put it on upside down. The pin on the armature goes into the shutter. While this isn't really serious as it just allows the shutter to spin, this lack of common sense is a portent of doom. This machine needs to be treated like a 3 week old infant. Controls adjusted gently, targets caressed into place, particles lightly wiped, wafers loaded lovingly, status checked carefully, all done with a parents unwavering attention. Fab away, Tony Flannery From twt at stanford.edu Wed Feb 7 12:43:15 2001 From: twt at stanford.edu (Tom) Date: Wed, 7 Feb 2001 12:43:15 -0800 (PST) Subject: reserv. removed Message-ID: I have removed my reservation for tonight and tomorrow morning - my samples will not be ready. Thanks, Tom From vsabnis at snow.stanford.edu Tue Feb 13 11:08:50 2001 From: vsabnis at snow.stanford.edu (Vijit Sabnis) Date: Tue, 13 Feb 2001 11:08:50 -0800 (PST) Subject: gold source Message-ID: <200102131908.LAA10423@snowmass.Stanford.EDU> Hi, I loaded my sample/sources this morning and found that someone had left their gold target in the crucible. Since I have my own gold, I removed it and put it in a clean glove next to the small TV monitor above the control panel. - vijit sabnis Vijit Sabnis vsabnis at snow.stanford.edu Stanford University Department of Electrical Engineering Solid State and Photonics Laboratory CISX B113-23 650/725-2774 office 723-4659 fax From jhaydon at snf.stanford.edu Wed Feb 14 11:12:59 2001 From: jhaydon at snf.stanford.edu (jhaydon) Date: Wed, 14 Feb 2001 11:12:59 -0800 Subject: Shutdown innotec 2001-02-13 15:21:41: Innotec SHUTDOWN Message-ID: <3A8AD8BB.167BFE75@snf.stanford.edu> The temperature controller for the cooling water had a blown fuse. I replaced the fuse and system appears to be operating correctly but it should be checked on over the next few days. Jim H.