From chquay at MtHolyoke.edu  Sun Aug  3 18:20:38 2003
From: chquay at MtHolyoke.edu (Something or Other)
Date: Sun, 3 Aug 2003 21:20:38 -0400 (EDT)
Subject: innotec free tonight
Message-ID: <Pine.OSF.4.21.0308032120210.470624-100000@mhc.mtholyoke.edu>

starting 11:30pm.

cqhl.



From zlrao at stanford.edu  Thu Aug  7 21:05:31 2003
From: zlrao at stanford.edu (Zhilong Rao)
Date: Thu, 7 Aug 2003 21:05:31 -0700
Subject: reservation from 1:30-5:30pm tomorrow is canceled
Message-ID: <018d01c35d62$4f8db110$3701000a@Rao>

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From liux at usc.edu  Thu Aug  7 21:57:20 2003
From: liux at usc.edu (xiaolei liu)
Date: Thu, 07 Aug 2003 21:57:20 -0700
Subject: Reservation cancelled
Message-ID: <101e80b101bd21.101bd21101e80b@usc.edu>

Samples not ready. The reservations tonight and tomorrow night(Friday) have been

removed. Sorry for the late notice!

Regards,

liux



From chquay at MtHolyoke.edu  Thu Aug  7 22:06:00 2003
From: chquay at MtHolyoke.edu (Something or Other)
Date: Fri, 8 Aug 2003 01:06:00 -0400 (EDT)
Subject: reservations
In-Reply-To: <018d01c35d62$4f8db110$3701000a@Rao>
Message-ID: <Pine.OSF.4.21.0308080105090.60837-100000@mhc.mtholyoke.edu>

tomorrow and saturday, various reservations cancelled/moved around in
consequence of earlier cancellations. check coral. thanks. charis.



From chquay at MtHolyoke.edu  Sat Aug  9 09:05:45 2003
From: chquay at MtHolyoke.edu (Something or Other)
Date: Sat, 9 Aug 2003 12:05:45 -0400 (EDT)
Subject: innotec incident?
In-Reply-To: <Pine.OSF.4.21.0308080105090.60837-100000@mhc.mtholyoke.edu>
Message-ID: <Pine.OSF.4.21.0308091158580.59609-100000@mhc.mtholyoke.edu>

Hi guys,

     This morning when I came in the Innotec looked like an explosion had
happened inside it...little specks of gold all over everthing including
the planetary. And it's all peeling off slowly. I tried to clean it as
much as possible before I put my piece in, but it still looks quite bad.
Is this normal? There was no note from the previous users.

Cheers,
Charis.



From vlordi at stanford.edu  Sat Aug  9 15:40:37 2003
From: vlordi at stanford.edu (vlordi at stanford.edu)
Date: Sat, 09 Aug 2003 15:40:37 -0700
Subject: innotec incident?
In-Reply-To: <Pine.OSF.4.21.0308091158580.59609-100000@mhc.mtholyoke.edu>
References: <Pine.OSF.4.21.0308091158580.59609-100000@mhc.mtholyoke.edu>
Message-ID: <1060468837.3f357865392b0@webmail.stanford.edu>

Hi. When I went to use the Innotec Thursday night, I noticed lots of 
what looked like splattered Al in the chamber, all over the planetary 
and wafers and also in the bell jar. Most of it looked pretty well 
stuck (not peeling), but there was a lot. I tried to clean the worst 
of it with the vacuum, but it wasn't easy and I wasn't quite sure what 
to do with the wafers. I actually meant to make a note, but forgot... 
I have no idea when it happened though, sometime before I used it on 
Thursday, and I'm pretty definite it's not normal. I've never seen 
such huge splatters before. I and others deposited gold after that, so 
that would explain why you thought it was gold and not Al or whatever 
silvery metal originally splattered.

-Vince

Quoting Something or Other <chquay at MtHolyoke.edu>:

> Hi guys,
> 
>      This morning when I came in the Innotec looked like an explosion
> had
> happened inside it...little specks of gold all over everthing
> including
> the planetary. And it's all peeling off slowly. I tried to clean it
> as
> much as possible before I put my piece in, but it still looks quite
> bad.
> Is this normal? There was no note from the previous users.
> 
> Cheers,
> Charis.
> 
> 


From george.c.lopez at intel.com  Sat Aug  9 16:29:57 2003
From: george.c.lopez at intel.com (Lopez, George C)
Date: Sat, 9 Aug 2003 16:29:57 -0700
Subject: innotec incident?
Message-ID: <54861D6B12931E4091AEEE0755125F5C10EA43@fmsmsx410.fm.intel.com>

I noticed it Thursday morning at 5am, it looked aluminum in color and
similar to solder splashes.  I cleaned up the shutter, the base of the
chamber, and some of the blanks since I had to load 16 samples into the
chamber.  I believe someone went too hi on the power for that material
and it started to 'spit'.  If you ever see fireworks shooting from the
evaporation source, lower the power.
George

-----Original Message-----
From: vlordi at stanford.edu [mailto:vlordi at stanford.edu] 
Sent: Saturday, August 09, 2003 3:41 PM
To: Something or Other
Cc: innotec at snf.stanford.edu
Subject: Re: innotec incident?


Hi. When I went to use the Innotec Thursday night, I noticed lots of 
what looked like splattered Al in the chamber, all over the planetary 
and wafers and also in the bell jar. Most of it looked pretty well 
stuck (not peeling), but there was a lot. I tried to clean the worst 
of it with the vacuum, but it wasn't easy and I wasn't quite sure what 
to do with the wafers. I actually meant to make a note, but forgot... 
I have no idea when it happened though, sometime before I used it on 
Thursday, and I'm pretty definite it's not normal. I've never seen 
such huge splatters before. I and others deposited gold after that, so 
that would explain why you thought it was gold and not Al or whatever 
silvery metal originally splattered.

-Vince

Quoting Something or Other <chquay at MtHolyoke.edu>:

> Hi guys,
> 
>      This morning when I came in the Innotec looked like an explosion
> had
> happened inside it...little specks of gold all over everthing
> including
> the planetary. And it's all peeling off slowly. I tried to clean it
> as
> much as possible before I put my piece in, but it still looks quite
> bad.
> Is this normal? There was no note from the previous users.
> 
> Cheers,
> Charis.
> 
> 



From scaccag at stanford.edu  Sun Aug 10 21:37:04 2003
From: scaccag at stanford.edu (Luigi Scaccabarozzi)
Date: Sun, 10 Aug 2003 21:37:04 -0700 (PDT)
Subject: res removed tomorrow 10a to 1:30p
Message-ID: <Pine.LNX.4.44.0308102136280.13400-100000@cardinal4.Stanford.EDU>

Sorry for the late notice!



From liux at usc.edu  Mon Aug 11 16:05:46 2003
From: liux at usc.edu (xiaolei liu)
Date: Mon, 11 Aug 2003 16:05:46 -0700
Subject: Reservations cancelled
Message-ID: <6c8ba66cc7bc.6cc7bc6c8ba6@usc.edu>

My reservations Monday ~ Wednesday have been removed, feel free to 

take them.

liux



From curlwang at stanford.edu  Tue Aug 12 08:35:35 2003
From: curlwang at stanford.edu (Ke Wang)
Date: Tue, 12 Aug 2003 08:35:35 -0700 (PDT)
Subject: about Innotec reservation time
Message-ID: <Pine.LNX.4.44.0308120811090.16105-100000@cardinal4.Stanford.EDU>

Dear Innotec users,

I got up at 6:30 this morning (which is pretty early for me) to do
Innotec, and found that the machine has not been used since 7pm last
night. I was in lab till 6:30pm yesterday, and I'm pretty sure that 7-11pm
was still reserved by that time. Since Innotec is becoming a second STS
these days, it would be very considerate if we all remember to send an
email when cancelling a reservation, to save others some early
morning/late night/weekend trips!

Also, as some of us already known, an old useful trick of bringing the
chamber pressure low quickly is to evaporate Ti first (with shutter1 open,
and you can hide your wafer behind the screen). It works quite well for
me. With a few hundred angstroms of Ti, the pressure drops down to the
order of 10^-8 (try it and you'll love it!:) ). So if you have only one
wafer, it should not take any longer than four hours!

Thanks for your attention,

Ke
_____________________________________________
Ke Wang
PHD Candidate
Department of Applied Physics, Stanford University

CISX B113-14
Stanford, CA 94305-4070

Phone: (650)723-8040



From fumin at stanford.edu  Tue Aug 12 12:22:41 2003
From: fumin at stanford.edu (Fu-Min Wang)
Date: Tue, 12 Aug 2003 12:22:41 -0700
Subject: Innotec reservation cancelled this afternoon from 3:30pm to 7:30pm
References: <Pine.LNX.4.44.0308120811090.16105-100000@cardinal4.Stanford.EDU>
Message-ID: <005201c36107$198afbb0$3eac0c80@FUMIN>

Unable to use this time slot. 
Sorry for the late notice.



From scaccag at stanford.edu  Tue Aug 12 23:43:31 2003
From: scaccag at stanford.edu (Luigi Scaccabarozzi)
Date: Tue, 12 Aug 2003 23:43:31 -0700 (PDT)
Subject: reservation cancelled tomorrow (wed) 3.30-7p
Message-ID: <Pine.LNX.4.44.0308122342560.4031-100000@cardinal4.Stanford.EDU>




From zlrao at stanford.edu  Wed Aug 13 14:42:39 2003
From: zlrao at stanford.edu (Zhilong Rao)
Date: Wed, 13 Aug 2003 14:42:39 -0700
Subject: reservation from 19:00-22:30 today cancelled
Message-ID: <000d01c361e3$d227f3d0$39aa0c80@Rao>

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From yyao at snf.stanford.edu  Wed Aug 13 18:23:52 2003
From: yyao at snf.stanford.edu (Yahong Yao)
Date: Wed, 13 Aug 2003 18:23:52 -0700
Subject: help!!!  Innotec
Message-ID: <3F3AE4A8.EC55B2DB@snf.stanford.edu>

Hello Innotec users,

The three bottons of source1 are all off.  I can't turn on the source1.
Did not check the source1 status before I loaded the sample.  Any one
out there can help?  Thank you very much.

Call me at 408-718-8831.

Yahong



From yyao at snf.stanford.edu  Wed Aug 13 18:31:02 2003
From: yyao at snf.stanford.edu (Yahong Yao)
Date: Wed, 13 Aug 2003 18:31:02 -0700
Subject: innotec problem solved
Message-ID: <3F3AE656.2803B521@snf.stanford.edu>

Thanks for your attention.

Yahong



From yyao at snf.stanford.edu  Wed Aug 13 19:48:40 2003
From: yyao at snf.stanford.edu (Yahong Yao)
Date: Wed, 13 Aug 2003 19:48:40 -0700
Subject: innotec free Thursday 7:30--11:30a
Message-ID: <3F3AF888.81B3A13E@snf.stanford.edu>

done earlier.   ^_^

Yh



From curlwang at stanford.edu  Wed Aug 13 23:58:41 2003
From: curlwang at stanford.edu (Ke Wang)
Date: Wed, 13 Aug 2003 23:58:41 -0700 (PDT)
Subject: res cancelled Thurs afternoon
Message-ID: <Pine.LNX.4.44.0308132357540.15308-100000@cardinal4.Stanford.EDU>



_____________________________________________
Ke Wang
PHD Candidate
Department of Applied Physics, Stanford University

CISX B113-14
Stanford, CA 94305-4070

Phone: (650)723-8040



From liux at usc.edu  Thu Aug 14 04:38:08 2003
From: liux at usc.edu (xiaolei liu)
Date: Thu, 14 Aug 2003 04:38:08 -0700
Subject: Resverations cancelled
Message-ID: <e75060e75fe6.e75fe6e75060@usc.edu>

Samples will not be ready by then. Reservations at Thursday and Friday's nights have been

removed.

liux



From jliu at photonicpower.com  Thu Aug 14 12:40:15 2003
From: jliu at photonicpower.com (James Liu)
Date: Thu, 14 Aug 2003 12:40:15 -0700
Subject: Innotec times available
Message-ID: <006d01c3629b$e337be40$0500a8c0@VAIOPC>

Hello;

Because of unexpected epi wafer delay, we have to cancel the following reservations:

08/18 (Mon.) 6:00 - 10:00 AM
08/19 (Tue.) 5:30 - 9:00 AM

Sorry for the short notice.

James Liu, PhD.
Photonic Power Systems, Inc.
(408) 725-7597 (O)
(408) 839-7228 (Cell)
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From zlrao at stanford.edu  Fri Aug 15 23:08:56 2003
From: zlrao at stanford.edu (Zhilong Rao)
Date: Fri, 15 Aug 2003 23:08:56 -0700
Subject: reservation from 11:30am---16:00 saturday cancelled
Message-ID: <000a01c363bc$e1267020$39aa0c80@Rao>

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From chquay at MtHolyoke.edu  Sat Aug 16 23:56:06 2003
From: chquay at MtHolyoke.edu (Charis Quay Huei Li)
Date: Sun, 17 Aug 2003 02:56:06 -0400 (EDT)
Subject: reservation cancelled tuesday
Message-ID: <Pine.OSF.4.21.0308170255490.462804-100000@mhc.mtholyoke.edu>

5pm. sample not ready. cqhl.



From scaccag at stanford.edu  Mon Aug 18 00:02:42 2003
From: scaccag at stanford.edu (Luigi Scaccabarozzi)
Date: Mon, 18 Aug 2003 00:02:42 -0700 (PDT)
Subject: reservation cancelled mon 3-7pm
Message-ID: <Pine.LNX.4.44.0308180002090.31855-100000@cardinal4.Stanford.EDU>

sorry for late notice



From fumin at stanford.edu  Mon Aug 18 00:59:46 2003
From: fumin at stanford.edu (Fu-Min Wang)
Date: Mon, 18 Aug 2003 00:59:46 -0700
Subject: innotec free from 7-11 pm on Monday
Message-ID: <001001c3655e$b164f2a0$6501a8c0@FUMIN>

I just schedule my run to earlier time slot so it's free from 7-11 pm on
Monday night.

Fumin



From jperez at snf.stanford.edu  Mon Aug 18 16:22:24 2003
From: jperez at snf.stanford.edu (Jeannie Perez)
Date: Mon, 18 Aug 2003 16:22:24 -0700
Subject: Contaminated Sources
Message-ID: <3F415FB0.DC3E4B6A@snf.stanford.edu>

All Users,
Warning! I discovered the Alum source was a purplish color (appears
oxidized). Nickel, Chromium. Cobalt has some soot left after deposition.
Possible leak, if you still want to use the Innotec for non critical
work, we would like you to wait 15 minutes (instead of 5 minutes on
standard material) during PUMP ONLY MODE
before venting the system. Any inform to add, please contact staff.

--
Jeannie Perez
Stanford Nanofabrication Facility
CIS Room 146, Mail Code 4070
Stanford, CA  94305
(650) 723-7997
jperez at snf.stanford.edu

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From zlrao at stanford.edu  Tue Aug 19 00:34:11 2003
From: zlrao at stanford.edu (Zhilong Rao)
Date: Tue, 19 Aug 2003 00:34:11 -0700
Subject: reservation 13:00-17:30 Tuesday cancelled
Message-ID: <000901c36624$48922920$39aa0c80@Rao>

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From liux at usc.edu  Tue Aug 19 00:37:37 2003
From: liux at usc.edu (xiaolei liu)
Date: Tue, 19 Aug 2003 00:37:37 -0700
Subject: Reservation cancelled
Message-ID: <813a2680f5f0.80f5f0813a26@usc.edu>

The reservation on the Tuesday's morning (1:00 am -- 3:00am) has been removed.

Sorry for the late notice.

liux



From fumin at stanford.edu  Tue Aug 19 15:41:51 2003
From: fumin at stanford.edu (Fu-Min Wang)
Date: Tue, 19 Aug 2003 15:41:51 -0700
Subject: reservation removed from 5:30 to 9:00pm today
Message-ID: <001601c366a3$15c52590$6601a8c0@FUMIN>

The reservation from 5:30 to 9:00pm today has been removed. Feel free to use
it.
I cannot remove Ti source in C4 last night. I deposited Ti and Au. The base
pressure before Ti deposition is about 6e-7 and base pressure during Au
deposition is from 9.6e-7 to 1.2e-6.



From curlwang at stanford.edu  Tue Aug 19 23:24:03 2003
From: curlwang at stanford.edu (Ke Wang)
Date: Tue, 19 Aug 2003 23:24:03 -0700 (PDT)
Subject: Innotec free Wednesday 3-8pm
Message-ID: <Pine.LNX.4.44.0308192322090.20784-100000@cardinal3.Stanford.EDU>



_____________________________________________
Ke Wang
PHD Candidate
Department of Applied Physics, Stanford University

CISX B113-14
Stanford, CA 94305-4070

Phone: (650)723-8040



From liux at usc.edu  Wed Aug 20 21:45:45 2003
From: liux at usc.edu (xiaolei liu)
Date: Wed, 20 Aug 2003 21:45:45 -0700
Subject: Reservation cancelled
Message-ID: <eb5eeeeb9123.eb9123eb5eee@usc.edu>

Sample not ready. My reservation tonight is cancelled. Please feel free to take the time tonight. 

Sorry for the late notice.

liux



From cshen at briontech.com  Fri Aug 22 14:21:32 2003
From: cshen at briontech.com (cshen at briontech.com)
Date: Fri, 22 Aug 2003 14:21:32 -0700 (PDT)
Subject: Innotec res partially cancelled
Message-ID: <2761.171.64.100.124.1061587292.squirrel@mail.briontech.com>

 Free from 5:30pm to 7:30pm today.




From curlwang at stanford.edu  Fri Aug 22 16:33:54 2003
From: curlwang at stanford.edu (Ke Wang)
Date: Fri, 22 Aug 2003 16:33:54 -0700 (PDT)
Subject: innotec 5:30-7:30 released
Message-ID: <Pine.LNX.4.44.0308221633330.3613-100000@cardinal4.Stanford.EDU>



_____________________________________________
Ke Wang
PHD Candidate
Department of Applied Physics, Stanford University

CISX B113-14
Stanford, CA 94305-4070

Phone: (650)723-8040



From cshen at briontech.com  Fri Aug 22 19:50:36 2003
From: cshen at briontech.com (Chongfei Shen)
Date: Fri, 22 Aug 2003 19:50:36 -0700
Subject: Innotec res cancelled tonight
Message-ID: <LFEILMPGMMLMGLNEDHNLEEFBCBAA.cshen@briontech.com>

Sorry for the late notice, couldn't get the samples ready.


From liux at usc.edu  Fri Aug 22 21:17:54 2003
From: liux at usc.edu (xiaolei liu)
Date: Fri, 22 Aug 2003 21:17:54 -0700
Subject: Reservations removed
Message-ID: <244f2d24130e.24130e244f2d@usc.edu>

My reservations tonight and tomorrow night (Saturday) have been cancelled due to the change

of my plan. Sorry for the late notice.

Regards,

liux



From zlrao at stanford.edu  Sat Aug 23 01:19:38 2003
From: zlrao at stanford.edu (Zhilong Rao)
Date: Sat, 23 Aug 2003 01:19:38 -0700
Subject: reservation from 11:30--15:30 Sunday cancelled
Message-ID: <000c01c3694f$4b8a17e0$39aa0c80@Rao>

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From scaccag at stanford.edu  Sun Aug 24 09:31:04 2003
From: scaccag at stanford.edu (Luigi Scaccabarozzi)
Date: Sun, 24 Aug 2003 09:31:04 -0700 (PDT)
Subject: reservation removed this afternoon (sunday)
Message-ID: <Pine.LNX.4.44.0308240930290.13834-100000@cardinal3.Stanford.EDU>

... sorry, I cannot finish preparing the sample on time.



From hendrikb at stanford.edu  Sun Aug 24 22:17:46 2003
From: hendrikb at stanford.edu (Hendrik Bluhm)
Date: Sun, 24 Aug 2003 22:17:46 -0700 (PDT)
Subject: Innotec free tonight
Message-ID: <Pine.GSO.4.44.0308242217310.21481-100000@elaine38.Stanford.EDU>



---------------------------------------------------
Hendrik Bluhm
Department of Physics
Stanford University

Work adress:                    Moler Lab
           			Lab. for Advanced Materials
Phone: (650) 723-4012           McCullough Bldg.
Fax:   (650) 725-2189           476  Lomita Mall
                                Stanford, CA 94305




From yy7343 at hotmail.com  Mon Aug 25 13:53:22 2003
From: yy7343 at hotmail.com (Yahong Yao)
Date: Mon, 25 Aug 2003 13:53:22 -0700
Subject: innotec free Tuesday 0--9am
Message-ID: <Law12-F20UfKRfcjcMz0000bce7@hotmail.com>



_________________________________________________________________
MSN 8: Get 6 months for $9.95/month. http://join.msn.com/?page=dept/dialup



From fumin at stanford.edu  Tue Aug 26 12:51:29 2003
From: fumin at stanford.edu (Fu-Min Wang)
Date: Tue, 26 Aug 2003 12:51:29 -0700
Subject: reservation from 5-8pm free
Message-ID: <005d01c36c0b$745abe90$6501a8c0@FUMIN>

innotec reservation from 5-8pm free tonight


From jperez at snf.stanford.edu  Wed Aug 27 16:22:24 2003
From: jperez at snf.stanford.edu (Jeannie Perez)
Date: Wed, 27 Aug 2003 16:22:24 -0700
Subject: Innotec New Harth 
Message-ID: <3F4D3D30.6B8418F@snf.stanford.edu>

Hello Everyone,
Please be careful with the new harth that Jim Haydon replaced today.
Make sure when you're using our sources that they are at least 3/4 full.
I am finding them below 1/2 full.
Regards,
--
Jeannie Perez
Stanford Nanofabrication Facility
CIS Room 146, Mail Code 4070
Stanford, CA  94305
(650) 723-7997
jperez at snf.stanford.edu

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From liux at usc.edu  Wed Aug 27 18:42:17 2003
From: liux at usc.edu (xiaolei liu)
Date: Wed, 27 Aug 2003 18:42:17 -0700
Subject: Reservation cancelled
Message-ID: <12cd71212d35ef.12d35ef12cd712@usc.edu>

Sample not ready. The reservation 10pm to tomorrow moring 2am has been removed.

Regards,

liux



From jliu at photonicpower.com  Thu Aug 28 00:44:39 2003
From: jliu at photonicpower.com (James Liu)
Date: Thu, 28 Aug 2003 00:44:39 -0700
Subject: Some midnight reservation time slots are available, sorry for the short notice.
Message-ID: <OMEKLEINCMPLABNLLGAPOEGCCBAA.jliu@photonicpower.com>





From fumin at stanford.edu  Thu Aug 28 12:34:01 2003
From: fumin at stanford.edu (Fu-Min Wang)
Date: Thu, 28 Aug 2003 12:34:01 -0700
Subject: free this afternoon
Message-ID: <007801c36d9b$55bca250$115c40ab@nanolab>

The reservation has been removed. Sorry for the late notice.
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From jperez at snf.stanford.edu  Fri Aug 29 15:22:35 2003
From: jperez at snf.stanford.edu (Jeannie Perez)
Date: Fri, 29 Aug 2003 15:22:35 -0700
Subject: No Au or Pt for this Labor Day weekend!
Message-ID: <3F4FD22B.E20B63EB@snf.stanford.edu>

All users,

All of our inventory of Au and Pt pellets has been depleted. If you
don't replenish our sources and keep them 3/4 full, then it takes more
pellets then what is in inventory to bring them up to a safe level to
process with.  These sources are half their original size. I won't be
getting any material until Tuesday (Sept. 2).
Regards,

--
Jeannie Perez
Stanford Nanofabrication Facility
CIS Room 146, Mail Code 4070
Stanford, CA  94305
(650) 723-7997
jperez at snf.stanford.edu




From fumin at stanford.edu  Fri Aug 29 19:13:47 2003
From: fumin at stanford.edu (Fu-Min Wang)
Date: Fri, 29 Aug 2003 19:13:47 -0700
Subject: free innotec now to midnight
Message-ID: <1062209627.3f50085ba435c@webmail.stanford.edu>


I need to cancel my reservation since there is no gold source.