Unable to pump down

Zhilong Rao zlrao at stanford.edu
Wed Dec 3 18:50:26 PST 2003


High voltage turned off suddenly during deposition. Turned on the power again. one of the seven lights('Tank') wasn't lit after pressing 'reset' on high voltage. Ion gauge went off suddenly. Vented the chamber. While trying to pump down, MDC abort kept showing. Chamber was left venting.
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