From jperez at snf.stanford.edu Wed Jan 15 16:07:06 2003 From: jperez at snf.stanford.edu (Jeannie Perez) Date: Wed, 15 Jan 2003 16:07:06 -0800 Subject: Please Read about the Innotec Message-ID: <3E25F7AA.7F09F188@snf.stanford.edu> Hello All users, The Innotec is up, but still needs some minor adjustments. The enable ON light (top right hand corner on the Innotec) is always on until Jim Haydon has a chance to fix the problem. Please ,still enable and disable on Coral. Thanks, Jeannie From jperez at snf.stanford.edu Fri Jan 17 17:03:25 2003 From: jperez at snf.stanford.edu (Jeannie Perez) Date: Fri, 17 Jan 2003 17:03:25 -0800 Subject: Please be aware! Message-ID: <3E28A7DD.D091D3F3@snf.stanford.edu> To All, The Innotec is up. The thickness on the display is different than the actual measurement on the Dektak by >10%. If you would like to be more precise, you'll need to run a test run to determine a more accurate thickness. I am characterizing the materials at this time, but it will take awhile to get through them all. Thanks, Jeannie Perez Stanford Nanofabrication Facility CIS Room 146, Mail Code 4070 Stanford, CA 94305 (650) 723-7997 jperez at snf.stanford.edu From opticalmachine at hotmail.com Fri Jan 17 17:23:36 2003 From: opticalmachine at hotmail.com (Ben Jian) Date: Fri, 17 Jan 2003 17:23:36 -0800 Subject: Innotec available from now to 8:30 PM Message-ID: My wafers are not ready. Sorry for the late notice. Ben _________________________________________________________________ MSN 8 helps eliminate e-mail viruses. Get 2 months FREE* http://join.msn.com/?page=features/virus From vlordi at stanford.edu Mon Jan 20 10:59:40 2003 From: vlordi at stanford.edu (Vincenzo Lordi) Date: Mon, 20 Jan 2003 10:59:40 -0800 Subject: res canceled today 10am-2pm Message-ID: Sorry for the late notice. I came in Sat and forgot I had this reservation. -Vince From yy7343 at hotmail.com Thu Jan 23 11:14:36 2003 From: yy7343 at hotmail.com (Yahong Yao) Date: Thu, 23 Jan 2003 11:14:36 -0800 Subject: display and measurement Message-ID: Hi All, After reading Jeannie's email regarding the thickness difference between display and measurement. I monitored my process of Al deposition on 01/22/03. The display was 3950A and the measurement from Dektak1 was around 3380A. Please plan accordingly. Yahong _________________________________________________________________ Help STOP SPAM with the new MSN 8 and get 2 months FREE* http://join.msn.com/?page=features/junkmail From eap at gloworm.Stanford.EDU Thu Jan 23 18:55:20 2003 From: eap at gloworm.Stanford.EDU (Eric Perozziello) Date: Thu, 23 Jan 2003 18:55:20 -0800 (PST) Subject: display and measurement In-Reply-To: Message-ID: Hi Yahong and innotec users, I also took data on this: 1000A on the maxtek gives ~925A on the outer row, and ~675 A on the inner row. But, before anyone goes and fiddles with the tooling factors, be aware that these numbers change all the time, based on the condition of the target, and the specific conditions. So, if the maxtek is within 20-30%, I suggest that we NOT adjust anything. If you need thickness control, you may have to do a calibration run using identical conditions to your run. My thought is that tooling factors should be left alone unless the system is drastically changed- In which case a sign is posted on the system that the tooling and the factors have been altered. Thanks, -Eric On Thu, 23 Jan 2003, Yahong Yao wrote: > Hi All, > > After reading Jeannie's email regarding the thickness difference between > display and measurement. I monitored my process of Al deposition on > 01/22/03. The display was 3950A and the measurement from Dektak1 was > around 3380A. Please plan accordingly. > > Yahong > > _________________________________________________________________ > Help STOP SPAM with the new MSN 8 and get 2 months FREE* > http://join.msn.com/?page=features/junkmail > > From grupp at snowmass.Stanford.EDU Mon Jan 27 18:53:44 2003 From: grupp at snowmass.Stanford.EDU (Dan Grupp) Date: Mon, 27 Jan 2003 18:53:44 -0800 (PST) Subject: Does anyone know where the Ti is? IGNORE this msg on Tuesday Message-ID: If you do, i'd appreciate a call 650-704-9551. Thanks, Dan --------------------------------------------------------------------------- Dr. Daniel Grupp, Visiting Scholar Center for Integrated Systems Stanford University Stanford, CA 94305 (650) 724-6911 FAX: 723-4659 ---------------------------------------------------------------------------