evaporating germanium

Jeannie Perez jperez at snf.stanford.edu
Fri Aug 13 15:54:51 PDT 2004

The innotec can handle Ge, the question is are you qualified to use Ge? Even
if you've been trained to use the Innotec, you would of needed additional
training for Ge. Since your asking these questions, I am assuming that you
haven't been train to use Si or Ge in our evaporator.
If your doing this outside the SNF Lab, please see me for any information.
This metal can  cause damage to the equipment and or operator.

Charis Quay Huei Li wrote:

> hello, this fellow in my lab, guy is trying to evaporate germanium in
> another e-beam evaporator. (he's not an snf member, which is why i'm
> sending this for him.) we were wondering if anyone has had success
> evaporating germanium in the innotec and if you could give su some
> parameter values as well as any special instructions? (i know that
> parameters vary from machine to machine, but i have a good handle on the
> most common materials evaporated in the innotec, so we can make a
> reasonable guess based on any info people have.) please reply to both of
> us. thanks very much! charis.

Jeannie Perez
Science and Engineering Technician
Stanford Nanofabrication Facility
Stanford University
Tel: (650) 723-7997
Fax: (650) 725-6278

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