NEW and First time using a Liner
jperez at snf.stanford.edu
Mon Jul 12 10:24:02 PDT 2004
I've just placed a New Tungsten liner with Au in the Innotec. So now it
will require _HALF _the power needed prior using the old source,and with
three to four times higher deposition rate. The Tooling Factor has been
changed from 33.5 to 40.0 for this new setup. It will become more
important to stay in the center of the source (due to less Au area)
using a SPIRAL e-beam.
At 4 % power you'll get a deposition rate of 4.0 to 4.5 A/sec.
At 2.2% to 2.5 % power you'll get about .1-.3 A/sec.
Any question, please see me!
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