Lowered Power and Dep. Rate for Innotec Au w/W liner
jperez at snf.stanford.edu
Wed Nov 10 16:30:57 PST 2004
I've attached this notice to the Innotec. Some Users said that they
didn't receive my previous e-mail from me. I lowered the Power and
Deposition Rate again. We are getting an under spray and just
contaminated the Chromium source (C4) that was in the pocket next to the
Au. Please let me know if you have any questions or problems.
PLEASE USE WITH CAUTION!
1) No greater then 5 angstroms per second
2) No greater then 3% POWER
3) Use the spiral sweep.
4) Au no thicker then 2000 A
5) Add pellets when below 1/4 full
6) See me if you have any questions
Science and Engineering Technician
Stanford Nanofabrication Facility
Tel: (650) 723-7997
Fax: (650) 725-6278
More information about the innotec